GB8909747D0 - Sputtering apparatus - Google Patents
Sputtering apparatusInfo
- Publication number
- GB8909747D0 GB8909747D0 GB898909747A GB8909747A GB8909747D0 GB 8909747 D0 GB8909747 D0 GB 8909747D0 GB 898909747 A GB898909747 A GB 898909747A GB 8909747 A GB8909747 A GB 8909747A GB 8909747 D0 GB8909747 D0 GB 8909747D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- sputtering apparatus
- sputtering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB898909747A GB8909747D0 (en) | 1989-04-27 | 1989-04-27 | Sputtering apparatus |
PCT/GB1990/000633 WO1990013137A1 (en) | 1989-04-27 | 1990-04-25 | Sputtering apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB898909747A GB8909747D0 (en) | 1989-04-27 | 1989-04-27 | Sputtering apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
GB8909747D0 true GB8909747D0 (en) | 1989-06-14 |
Family
ID=10655887
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB898909747A Pending GB8909747D0 (en) | 1989-04-27 | 1989-04-27 | Sputtering apparatus |
Country Status (2)
Country | Link |
---|---|
GB (1) | GB8909747D0 (en) |
WO (1) | WO1990013137A1 (en) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH690805A5 (en) * | 1993-05-04 | 2001-01-15 | Unaxis Balzers Ag | Magnetic-assisted atomization and vacuum treatment system herewith. |
US5433835B1 (en) * | 1993-11-24 | 1997-05-20 | Applied Materials Inc | Sputtering device and target with cover to hold cooling fluid |
US5487822A (en) * | 1993-11-24 | 1996-01-30 | Applied Materials, Inc. | Integrated sputtering target assembly |
DE4415232A1 (en) * | 1994-04-30 | 1995-11-02 | Leybold Ag | Coating system |
DE4426200A1 (en) * | 1994-07-23 | 1996-01-25 | Leybold Ag | Cathode sputtering appts. |
US6221217B1 (en) | 1995-07-10 | 2001-04-24 | Cvc, Inc. | Physical vapor deposition system having reduced thickness backing plate |
WO1997003221A1 (en) * | 1995-07-10 | 1997-01-30 | Cvc Products, Inc. | Magnetron cathode apparatus and method for sputtering |
DE19722056A1 (en) * | 1997-05-27 | 1998-12-03 | Roland Dr Gesche | Method and apparatus for production of thin layers by low pressure gas discharge in a hollow cathode |
US6340415B1 (en) | 1998-01-05 | 2002-01-22 | Applied Materials, Inc. | Method and apparatus for enhancing a sputtering target's lifetime |
US6852202B2 (en) * | 2002-05-21 | 2005-02-08 | Applied Materials, Inc. | Small epicyclic magnetron with controlled radial sputtering profile |
US6841050B2 (en) | 2002-05-21 | 2005-01-11 | Applied Materials, Inc. | Small planetary magnetron |
DE10232179B4 (en) | 2002-07-16 | 2009-01-08 | Qimonda Ag | PVD |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59173265A (en) * | 1983-03-22 | 1984-10-01 | Fujitsu Ltd | Sputtering device |
EP0169680A1 (en) * | 1984-07-20 | 1986-01-29 | Varian Associates, Inc. | Magnetron sputter etching system |
JPS6199673A (en) * | 1984-10-15 | 1986-05-17 | Tokuda Seisakusho Ltd | Sputtering device |
JPS6260866A (en) * | 1985-08-02 | 1987-03-17 | Fujitsu Ltd | Magnetron sputtering device |
JPS6247478A (en) * | 1985-08-26 | 1987-03-02 | バリアン・アソシエイツ・インコ−ポレイテツド | Planer magnetron sputtering apparatus wherein circular motion and radial motion of magnetic field are combined |
DE3619194A1 (en) * | 1986-06-06 | 1987-12-10 | Leybold Heraeus Gmbh & Co Kg | MAGNETRON SPRAYING CATODE FOR VACUUM COATING SYSTEMS |
-
1989
- 1989-04-27 GB GB898909747A patent/GB8909747D0/en active Pending
-
1990
- 1990-04-25 WO PCT/GB1990/000633 patent/WO1990013137A1/en unknown
Also Published As
Publication number | Publication date |
---|---|
WO1990013137A1 (en) | 1990-11-01 |
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