NO994804L - Frembringelse av lysbueplasma i en krumlinjet plasmaleder og substratbelegg - Google Patents

Frembringelse av lysbueplasma i en krumlinjet plasmaleder og substratbelegg

Info

Publication number
NO994804L
NO994804L NO994804A NO994804A NO994804L NO 994804 L NO994804 L NO 994804L NO 994804 A NO994804 A NO 994804A NO 994804 A NO994804 A NO 994804A NO 994804 L NO994804 L NO 994804L
Authority
NO
Norway
Prior art keywords
plasma
generation
curvilinear
conductor
substrate coating
Prior art date
Application number
NO994804A
Other languages
English (en)
Other versions
NO994804D0 (no
Inventor
Alexander Igorevich Dodonov
Valery Mikhaylovich Bashkov
Original Assignee
Alexander Igorevich Dodonov
Valery Mikhaylovich Bashkov
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to EP97930908A priority Critical patent/EP0972298A1/en
Priority claimed from PCT/RU1997/000106 external-priority patent/WO1998045871A1/en
Priority to CA002284368A priority patent/CA2284368A1/en
Application filed by Alexander Igorevich Dodonov, Valery Mikhaylovich Bashkov filed Critical Alexander Igorevich Dodonov
Priority to NO994804A priority patent/NO994804L/no
Publication of NO994804D0 publication Critical patent/NO994804D0/no
Priority to US09/381,971 priority patent/US6635156B1/en
Publication of NO994804L publication Critical patent/NO994804L/no

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055—Arc discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3266—Magnetic control means

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
NO994804A 1997-04-04 1999-10-01 Frembringelse av lysbueplasma i en krumlinjet plasmaleder og substratbelegg NO994804L (no)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP97930908A EP0972298A1 (en) 1997-04-04 1997-04-04 Producing electric arc plasma in a curvilinear plasmaguide and substrate coating
CA002284368A CA2284368A1 (en) 1997-04-04 1999-09-30 Producing electric arc plasma in a curvilinear plasmaguide and substrate coating
NO994804A NO994804L (no) 1997-04-04 1999-10-01 Frembringelse av lysbueplasma i en krumlinjet plasmaleder og substratbelegg
US09/381,971 US6635156B1 (en) 1997-04-04 1999-10-04 Producing electric arc plasma in a curvilinear plasmaguide and substrate coating

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
PCT/RU1997/000106 WO1998045871A1 (en) 1997-04-04 1997-04-04 Producing electric arc plasma in a curvilinear plasmaguide and substrate coating
CA002284368A CA2284368A1 (en) 1997-04-04 1999-09-30 Producing electric arc plasma in a curvilinear plasmaguide and substrate coating
NO994804A NO994804L (no) 1997-04-04 1999-10-01 Frembringelse av lysbueplasma i en krumlinjet plasmaleder og substratbelegg
US09/381,971 US6635156B1 (en) 1997-04-04 1999-10-04 Producing electric arc plasma in a curvilinear plasmaguide and substrate coating

Publications (2)

Publication Number Publication Date
NO994804D0 NO994804D0 (no) 1999-10-01
NO994804L true NO994804L (no) 1999-12-03

Family

ID=30119161

Family Applications (1)

Application Number Title Priority Date Filing Date
NO994804A NO994804L (no) 1997-04-04 1999-10-01 Frembringelse av lysbueplasma i en krumlinjet plasmaleder og substratbelegg

Country Status (2)

Country Link
EP (1) EP0972298A1 (no)
NO (1) NO994804L (no)

Also Published As

Publication number Publication date
NO994804D0 (no) 1999-10-01
EP0972298A1 (en) 2000-01-19

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Legal Events

Date Code Title Description
FC2A Withdrawal, rejection or dismissal of laid open patent application