NO994804D0 - Frembringelse av lysbueplasma i en krumlinjet plasmaleder og substratbelegg - Google Patents
Frembringelse av lysbueplasma i en krumlinjet plasmaleder og substratbeleggInfo
- Publication number
- NO994804D0 NO994804D0 NO994804A NO994804A NO994804D0 NO 994804 D0 NO994804 D0 NO 994804D0 NO 994804 A NO994804 A NO 994804A NO 994804 A NO994804 A NO 994804A NO 994804 D0 NO994804 D0 NO 994804D0
- Authority
- NO
- Norway
- Prior art keywords
- plasma
- generation
- curvilinear
- conductor
- substrate coating
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32055—Arc discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3266—Magnetic control means
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP97930908A EP0972298A1 (en) | 1997-04-04 | 1997-04-04 | Producing electric arc plasma in a curvilinear plasmaguide and substrate coating |
CA002284368A CA2284368A1 (en) | 1997-04-04 | 1999-09-30 | Producing electric arc plasma in a curvilinear plasmaguide and substrate coating |
NO994804A NO994804L (no) | 1997-04-04 | 1999-10-01 | Frembringelse av lysbueplasma i en krumlinjet plasmaleder og substratbelegg |
US09/381,971 US6635156B1 (en) | 1997-04-04 | 1999-10-04 | Producing electric arc plasma in a curvilinear plasmaguide and substrate coating |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/RU1997/000106 WO1998045871A1 (en) | 1997-04-04 | 1997-04-04 | Producing electric arc plasma in a curvilinear plasmaguide and substrate coating |
CA002284368A CA2284368A1 (en) | 1997-04-04 | 1999-09-30 | Producing electric arc plasma in a curvilinear plasmaguide and substrate coating |
NO994804A NO994804L (no) | 1997-04-04 | 1999-10-01 | Frembringelse av lysbueplasma i en krumlinjet plasmaleder og substratbelegg |
US09/381,971 US6635156B1 (en) | 1997-04-04 | 1999-10-04 | Producing electric arc plasma in a curvilinear plasmaguide and substrate coating |
Publications (2)
Publication Number | Publication Date |
---|---|
NO994804D0 true NO994804D0 (no) | 1999-10-01 |
NO994804L NO994804L (no) | 1999-12-03 |
Family
ID=30119161
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NO994804A NO994804L (no) | 1997-04-04 | 1999-10-01 | Frembringelse av lysbueplasma i en krumlinjet plasmaleder og substratbelegg |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP0972298A1 (no) |
NO (1) | NO994804L (no) |
-
1997
- 1997-04-04 EP EP97930908A patent/EP0972298A1/en not_active Withdrawn
-
1999
- 1999-10-01 NO NO994804A patent/NO994804L/no not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
NO994804L (no) | 1999-12-03 |
EP0972298A1 (en) | 2000-01-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FC2A | Withdrawal, rejection or dismissal of laid open patent application |