NO884189L - PROCEDURE FOR AA THEN RESIST PATTERNS. - Google Patents

PROCEDURE FOR AA THEN RESIST PATTERNS.

Info

Publication number
NO884189L
NO884189L NO884189A NO884189A NO884189L NO 884189 L NO884189 L NO 884189L NO 884189 A NO884189 A NO 884189A NO 884189 A NO884189 A NO 884189A NO 884189 L NO884189 L NO 884189L
Authority
NO
Norway
Prior art keywords
procedure
resist patterns
resist
patterns
Prior art date
Application number
NO884189A
Other languages
Norwegian (no)
Other versions
NO884189D0 (en
Inventor
Paul E Grandmont
Harold Lake
Original Assignee
Foxboro Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from PCT/US1988/000112 external-priority patent/WO1988005559A1/en
Application filed by Foxboro Co filed Critical Foxboro Co
Publication of NO884189D0 publication Critical patent/NO884189D0/en
Publication of NO884189L publication Critical patent/NO884189L/en

Links

NO884189A 1987-01-22 1988-09-21 PROCEDURE FOR AA THEN RESIST PATTERNS. NO884189L (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US662487A 1987-01-22 1987-01-22
PCT/US1988/000112 WO1988005559A1 (en) 1987-01-22 1988-01-19 Method of patterning resist

Publications (2)

Publication Number Publication Date
NO884189D0 NO884189D0 (en) 1988-09-21
NO884189L true NO884189L (en) 1988-11-21

Family

ID=26675861

Family Applications (1)

Application Number Title Priority Date Filing Date
NO884189A NO884189L (en) 1987-01-22 1988-09-21 PROCEDURE FOR AA THEN RESIST PATTERNS.

Country Status (1)

Country Link
NO (1) NO884189L (en)

Also Published As

Publication number Publication date
NO884189D0 (en) 1988-09-21

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