NO874390L - Piezoelelektriske sensorelementer. - Google Patents

Piezoelelektriske sensorelementer.

Info

Publication number
NO874390L
NO874390L NO87874390A NO874390A NO874390L NO 874390 L NO874390 L NO 874390L NO 87874390 A NO87874390 A NO 87874390A NO 874390 A NO874390 A NO 874390A NO 874390 L NO874390 L NO 874390L
Authority
NO
Norway
Prior art keywords
piezoel
sensor elements
electrical sensor
electrical
elements
Prior art date
Application number
NO87874390A
Other languages
English (en)
Other versions
NO178317C (no
NO178317B (no
NO874390D0 (no
Inventor
Carol Z Rosen
Ernest C Wittke
Original Assignee
Singer Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Singer Co filed Critical Singer Co
Publication of NO874390D0 publication Critical patent/NO874390D0/no
Publication of NO874390L publication Critical patent/NO874390L/no
Publication of NO178317B publication Critical patent/NO178317B/no
Publication of NO178317C publication Critical patent/NO178317C/no

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/16Measuring force or stress, in general using properties of piezoelectric devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/01Manufacture or treatment
    • H10N30/06Forming electrodes or interconnections, e.g. leads or terminals
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/30Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H10N30/302Sensors
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/42Piezoelectric device making

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Gyroscopes (AREA)
  • Measuring Fluid Pressure (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
NO874390A 1986-10-22 1987-10-21 Piezoelektriske sensorelementer NO178317C (no)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/921,520 US4769882A (en) 1986-10-22 1986-10-22 Method for making piezoelectric sensing elements with gold-germanium bonding layers

Publications (4)

Publication Number Publication Date
NO874390D0 NO874390D0 (no) 1987-10-21
NO874390L true NO874390L (no) 1988-04-25
NO178317B NO178317B (no) 1995-11-20
NO178317C NO178317C (no) 1996-02-28

Family

ID=25445555

Family Applications (1)

Application Number Title Priority Date Filing Date
NO874390A NO178317C (no) 1986-10-22 1987-10-21 Piezoelektriske sensorelementer

Country Status (8)

Country Link
US (1) US4769882A (no)
EP (1) EP0265090B1 (no)
JP (1) JPS63190391A (no)
AU (1) AU595071B2 (no)
CA (1) CA1317478C (no)
DE (1) DE3771831D1 (no)
IL (1) IL83901A (no)
NO (1) NO178317C (no)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU1642962A3 (ru) * 1989-06-16 1991-04-15 Е.И.Новиков Пьезочастотный датчик силы
JP3039971B2 (ja) * 1989-09-19 2000-05-08 株式会社日立製作所 接合型圧電装置及び製造方法並びに接合型圧電素子
FR2693795B1 (fr) * 1992-07-15 1994-08-19 Commissariat Energie Atomique Jauge de contrainte sur support souple et capteur muni de ladite jauge.
US6484585B1 (en) 1995-02-28 2002-11-26 Rosemount Inc. Pressure sensor for a pressure transmitter
US5755909A (en) * 1996-06-26 1998-05-26 Spectra, Inc. Electroding of ceramic piezoelectric transducers
US6164140A (en) * 1998-10-09 2000-12-26 Kalinoski; Richard W. Solid state transducer for Coriolis flowmeter
US6520020B1 (en) 2000-01-06 2003-02-18 Rosemount Inc. Method and apparatus for a direct bonded isolated pressure sensor
US6505516B1 (en) 2000-01-06 2003-01-14 Rosemount Inc. Capacitive pressure sensing with moving dielectric
US6561038B2 (en) 2000-01-06 2003-05-13 Rosemount Inc. Sensor with fluid isolation barrier
WO2001050106A1 (en) 2000-01-06 2001-07-12 Rosemount Inc. Grain growth of electrical interconnection for microelectromechanical systems (mems)
US6508129B1 (en) 2000-01-06 2003-01-21 Rosemount Inc. Pressure sensor capsule with improved isolation
JP2002144239A (ja) * 2000-11-08 2002-05-21 Alps Engineering:Kk ノズル
US6672168B2 (en) 2001-09-24 2004-01-06 Andrew Braugh Multi-level machine vibration tester marker pen
US6848316B2 (en) 2002-05-08 2005-02-01 Rosemount Inc. Pressure sensor assembly
WO2004023572A1 (en) * 2002-08-30 2004-03-18 Usc Corporation Piezoelectric generator
US7548012B2 (en) * 2003-09-17 2009-06-16 Kistler Holding, Ag Multi-layer piezoelectric measuring element, and pressure sensor or force sensor comprising such a measuring element
JP3866258B2 (ja) * 2004-08-24 2007-01-10 太平洋セメント株式会社 圧電デバイスおよびこれを備える圧電スイッチ
WO2007123537A1 (en) * 2006-04-20 2007-11-01 Dover Electronics, Inc. (Dba Vectron International) Electro acoustic sensor for high pressure environments
US8073640B2 (en) * 2009-09-18 2011-12-06 Delaware Capital Formation Inc. Controlled compressional wave components of thickness shear mode multi-measurand sensors
CN110379916B (zh) * 2019-07-05 2020-10-27 中国科学院物理研究所 压电陶瓷元件的制备方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2709147A (en) * 1951-09-12 1955-05-24 Bell Telephone Labor Inc Methods for bonding silica bodies
US3179826A (en) * 1961-09-14 1965-04-20 Trott Winfield James Piezolelectric assembly
AT237930B (de) * 1962-09-12 1965-01-11 Hans Dipl Ing Dr Techn List Piezoelektrische Einrichtung, insbesondere zur Kraftmessung, und Verfahren zu ihrer Herstellung
US3590467A (en) * 1968-11-15 1971-07-06 Corning Glass Works Method for bonding a crystal to a solid delay medium
FR2182295A5 (no) * 1972-04-25 1973-12-07 Thomson Csf
US3897628A (en) * 1973-11-19 1975-08-05 Rca Corp Method of forming a thin piezoelectric body metallically bonded to a propagation medium crystal
US3986251A (en) * 1974-10-03 1976-10-19 Motorola, Inc. Germanium doped light emitting diode bonding process
US4042951A (en) * 1975-09-25 1977-08-16 Texas Instruments Incorporated Gold-germanium alloy contacts for a semiconductor device
US4109031A (en) * 1976-12-27 1978-08-22 United Technologies Corporation Stress relief of metal-ceramic gas turbine seals
US4078711A (en) * 1977-04-14 1978-03-14 Rockwell International Corporation Metallurgical method for die attaching silicon on sapphire devices to obtain heat resistant bond
US4295373A (en) * 1980-04-03 1981-10-20 United Technologies Corporation Fluidic angular rate sensor with integrated impulse jet pump assembly
JPS5899100A (ja) * 1981-12-08 1983-06-13 Murata Mfg Co Ltd 接着型圧電部品とその製造方法
JPS59145583A (ja) * 1983-02-09 1984-08-21 Matsushita Electric Ind Co Ltd 積層型圧電変位素子
JPS59168712A (ja) * 1983-03-14 1984-09-22 Nippon Dempa Kogyo Co Ltd 水晶振動子の端子接着方法

Also Published As

Publication number Publication date
NO178317C (no) 1996-02-28
NO178317B (no) 1995-11-20
JPH0346991B2 (no) 1991-07-17
DE3771831D1 (de) 1991-09-05
CA1317478C (en) 1993-05-11
IL83901A (en) 1994-08-26
EP0265090A3 (en) 1988-09-21
EP0265090A2 (en) 1988-04-27
US4769882A (en) 1988-09-13
EP0265090B1 (en) 1991-07-31
NO874390D0 (no) 1987-10-21
AU7944087A (en) 1988-04-28
JPS63190391A (ja) 1988-08-05
AU595071B2 (en) 1990-03-22

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