NO328737B1 - Fremgangsmate og innretning for inspeksjon av gjenstander - Google Patents
Fremgangsmate og innretning for inspeksjon av gjenstander Download PDFInfo
- Publication number
- NO328737B1 NO328737B1 NO20074444A NO20074444A NO328737B1 NO 328737 B1 NO328737 B1 NO 328737B1 NO 20074444 A NO20074444 A NO 20074444A NO 20074444 A NO20074444 A NO 20074444A NO 328737 B1 NO328737 B1 NO 328737B1
- Authority
- NO
- Norway
- Prior art keywords
- shadow
- image
- location
- edges
- processing unit
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims abstract description 23
- 238000010606 normalization Methods 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims description 6
- 238000007689 inspection Methods 0.000 abstract description 3
- 238000005259 measurement Methods 0.000 description 8
- 229910052736 halogen Inorganic materials 0.000 description 4
- 150000002367 halogens Chemical class 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- 239000002184 metal Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- -1 timber Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0608—Height gauges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NO20074444A NO328737B1 (no) | 2007-08-31 | 2007-08-31 | Fremgangsmate og innretning for inspeksjon av gjenstander |
KR1020107006556A KR20100052546A (ko) | 2007-08-31 | 2008-09-01 | 물체 표면 조사 방법 및 장치 |
PCT/NO2008/000307 WO2009028956A1 (en) | 2007-08-31 | 2008-09-01 | Method and device for inspection of object surfaces |
CN200880111202A CN101821581A (zh) | 2007-08-31 | 2008-09-01 | 用于检查物体表面的方法和装置 |
EP08828608A EP2191230A1 (en) | 2007-08-31 | 2008-09-01 | Method and device for inspection of object surfaces |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NO20074444A NO328737B1 (no) | 2007-08-31 | 2007-08-31 | Fremgangsmate og innretning for inspeksjon av gjenstander |
Publications (2)
Publication Number | Publication Date |
---|---|
NO20074444L NO20074444L (no) | 2009-03-02 |
NO328737B1 true NO328737B1 (no) | 2010-05-03 |
Family
ID=40219505
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NO20074444A NO328737B1 (no) | 2007-08-31 | 2007-08-31 | Fremgangsmate og innretning for inspeksjon av gjenstander |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP2191230A1 (zh) |
KR (1) | KR20100052546A (zh) |
CN (1) | CN101821581A (zh) |
NO (1) | NO328737B1 (zh) |
WO (1) | WO2009028956A1 (zh) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8369603B2 (en) * | 2009-07-03 | 2013-02-05 | Koh Young Technology Inc. | Method for inspecting measurement object |
KR101311255B1 (ko) * | 2012-08-20 | 2013-09-25 | 주식회사 고영테크놀러지 | 측정대상물 검사방법 |
CN103673934A (zh) * | 2013-12-31 | 2014-03-26 | 中国矿业大学 | 一种基于网格投影的pcb板平整度检测方法 |
US10636140B2 (en) * | 2017-05-18 | 2020-04-28 | Applied Materials Israel Ltd. | Technique for inspecting semiconductor wafers |
DE102017208485A1 (de) * | 2017-05-19 | 2018-11-22 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Anordnung und Verfahren zur berührungslosen Entfernungsbestimmung nach Art des Lichtschnittverfahrens |
US11412650B2 (en) | 2017-09-28 | 2022-08-09 | Universal Instruments Corporation | Lead tip illumination device, system, and method |
CN108107051B (zh) * | 2017-12-19 | 2020-03-31 | 无锡先导智能装备股份有限公司 | 基于机器视觉的锂电池缺陷检测系统及方法 |
FI128443B (en) * | 2018-12-21 | 2020-05-15 | Valmet Automation Oy | Contactless thickness measurement |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4980763A (en) | 1989-06-12 | 1990-12-25 | Welch Allyn, Inc. | System for measuring objects viewed through a borescope |
US6219063B1 (en) | 1997-05-30 | 2001-04-17 | California Institute Of Technology | 3D rendering |
US6246788B1 (en) * | 1997-05-30 | 2001-06-12 | Isoa, Inc. | System and method of optically inspecting manufactured devices |
JP2005221288A (ja) | 2004-02-04 | 2005-08-18 | Chiaki Tanaka | 投影法による加工面性状の測定方法及びその装置 |
JP2006292617A (ja) | 2005-04-13 | 2006-10-26 | Nec Electronics Corp | 欠陥検査装置及び基板表面の検査方法 |
-
2007
- 2007-08-31 NO NO20074444A patent/NO328737B1/no not_active IP Right Cessation
-
2008
- 2008-09-01 EP EP08828608A patent/EP2191230A1/en not_active Withdrawn
- 2008-09-01 CN CN200880111202A patent/CN101821581A/zh active Pending
- 2008-09-01 WO PCT/NO2008/000307 patent/WO2009028956A1/en active Application Filing
- 2008-09-01 KR KR1020107006556A patent/KR20100052546A/ko not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
CN101821581A (zh) | 2010-09-01 |
WO2009028956A1 (en) | 2009-03-05 |
NO20074444L (no) | 2009-03-02 |
EP2191230A1 (en) | 2010-06-02 |
KR20100052546A (ko) | 2010-05-19 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
NO328737B1 (no) | Fremgangsmate og innretning for inspeksjon av gjenstander | |
KR101477014B1 (ko) | 스캐닝 전자 현미경 이미지들을 사용하는 3차원 맵핑 | |
US9116134B2 (en) | Inspection apparatus for tubular product and inspection method therefor | |
JP5014003B2 (ja) | 検査装置および方法 | |
JP2010071782A (ja) | 3次元計測装置およびその方法 | |
JP2007248086A5 (zh) | ||
JP2013534312A (ja) | ウェハのソーマークの三次元検査のための装置および方法 | |
CN107271445B (zh) | 一种缺陷检测方法及装置 | |
US9091633B2 (en) | Apparatus and method for locating the centre of a beam profile | |
KR102409084B1 (ko) | 원통체 표면 검사 장치 및 원통체 표면 검사 방법 | |
JP2021056182A (ja) | ワークの表面欠陥検出装置及び検出方法、ワークの表面検査システム並びにプログラム | |
JP4783650B2 (ja) | Ptpシール検査装置 | |
JP6782449B2 (ja) | 表面検査方法及びその装置 | |
JP2008175604A (ja) | 光変位センサー及びそれを用いた変位測定装置 | |
US20210310799A1 (en) | Apparatus, measurement system and method for capturing an at least partially reflective surface using two reflection patterns | |
US8208713B2 (en) | Method and system for inspecting a diced wafer | |
US6876459B2 (en) | Method and apparatus for optical measurement of the leading edge position of an airfoil | |
JP5391172B2 (ja) | 異物検査装置及びアライメント調整方法 | |
JPH0792111A (ja) | 欠陥深さ位置検出装置及びその方法 | |
JPWO2020183958A1 (ja) | 化成処理膜検査方法、化成処理膜検査装置、表面処理鋼板の製造方法、表面処理鋼板の品質管理方法及び表面処理鋼板の製造設備 | |
JP2008164338A (ja) | 位置検出装置 | |
JP2019070619A5 (zh) | ||
JP2005322748A5 (zh) | ||
TWI263773B (en) | Method of inspecting a broad article | |
KR20130002760A (ko) | 중간시점 영상 생성기를 갖는 표면 거칠기 측정 장치 및 방법 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM1K | Lapsed by not paying the annual fees |