NO20065598L - Tunnel crossings for long-haul VCSELs. - Google Patents

Tunnel crossings for long-haul VCSELs.

Info

Publication number
NO20065598L
NO20065598L NO20065598A NO20065598A NO20065598L NO 20065598 L NO20065598 L NO 20065598L NO 20065598 A NO20065598 A NO 20065598A NO 20065598 A NO20065598 A NO 20065598A NO 20065598 L NO20065598 L NO 20065598L
Authority
NO
Norway
Prior art keywords
tunnel
type
transition
vcsels
haul
Prior art date
Application number
NO20065598A
Other languages
Norwegian (no)
Inventor
Rajarm Bhat
Nobuhiko Nishiyama
Original Assignee
Corning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corning Inc filed Critical Corning Inc
Publication of NO20065598L publication Critical patent/NO20065598L/en

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/10Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/18Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
    • H01S5/183Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/10Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/18Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
    • H01S5/183Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
    • H01S5/18308Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL] having a special structure for lateral current or light confinement
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/02Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/12Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
    • H01L29/20Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
    • H01L29/201Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds including two or more compounds, e.g. alloys
    • H01L29/205Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds including two or more compounds, e.g. alloys in different semiconductor regions, e.g. heterojunctions
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S2304/00Special growth methods for semiconductor lasers
    • H01S2304/04MOCVD or MOVPE
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/10Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/18Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
    • H01S5/183Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
    • H01S5/18358Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL] containing spacer layers to adjust the phase of the light wave in the cavity
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/30Structure or shape of the active region; Materials used for the active region
    • H01S5/305Structure or shape of the active region; Materials used for the active region characterised by the doping materials used in the laser structure
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/30Structure or shape of the active region; Materials used for the active region
    • H01S5/305Structure or shape of the active region; Materials used for the active region characterised by the doping materials used in the laser structure
    • H01S5/3054Structure or shape of the active region; Materials used for the active region characterised by the doping materials used in the laser structure p-doping
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/30Structure or shape of the active region; Materials used for the active region
    • H01S5/305Structure or shape of the active region; Materials used for the active region characterised by the doping materials used in the laser structure
    • H01S5/3095Tunnel junction
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/30Structure or shape of the active region; Materials used for the active region
    • H01S5/32Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures
    • H01S5/323Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
    • H01S5/3235Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser emitting light at a wavelength longer than 1000 nm, e.g. InP-based 1300 nm and 1500 nm lasers

Abstract

En tunnelovergangsanordning (102) med minimal hydrogenpassivering av akseptorer omfatter et p-type tunnelovergangslag (106) av et første halvleder- materiale som er dopet med karbon. Det første halvledermaterialet omfatter aluminium, gallium, arsen og antimon. Et n-type tunnelovergangslag (104) av et andre halvledermateriale omfatter indium, gallium, arsen og én av aluminium og fosfor. Overgangen mellom p-type og n-type tuimelovergangslagene danner en tunnelovergang (110).A tunnel transition device (102) with minimal hydrogen passivation of acceptors comprises a β-type tunnel transition layer (106) of a first semiconductor material doped with carbon. The first semiconductor material includes aluminum, gallium, arsenic and antimony. An n-type tunnel transition layer (104) of a second semiconductor material comprises indium, gallium, arsenic and one of aluminum and phosphorus. The transition between p-type and n-type tumble transition layers forms a tunnel transition (110).

NO20065598A 2004-05-17 2006-12-05 Tunnel crossings for long-haul VCSELs. NO20065598L (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/848,456 US6933539B1 (en) 2004-05-17 2004-05-17 Tunnel junctions for long-wavelength VCSELs
PCT/US2005/017288 WO2005117135A1 (en) 2004-05-17 2005-05-17 Tunnel junctions for long-wavelength vcsels

Publications (1)

Publication Number Publication Date
NO20065598L true NO20065598L (en) 2006-12-05

Family

ID=34839014

Family Applications (1)

Application Number Title Priority Date Filing Date
NO20065598A NO20065598L (en) 2004-05-17 2006-12-05 Tunnel crossings for long-haul VCSELs.

Country Status (9)

Country Link
US (2) US6933539B1 (en)
EP (1) EP1766689A4 (en)
JP (1) JP2007538410A (en)
KR (1) KR20070012550A (en)
CN (1) CN1973378A (en)
AU (1) AU2005330578A1 (en)
CA (1) CA2567028A1 (en)
NO (1) NO20065598L (en)
WO (1) WO2005117135A1 (en)

Families Citing this family (21)

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US7085298B2 (en) * 2003-10-31 2006-08-01 Finisar Corporation Tunnel junction utilizing GaPSb, AlGaPSb
US7072376B2 (en) * 2004-09-16 2006-07-04 Corning Incorporated Method of manufacturing an InP based vertical cavity surface emitting laser and device produced therefrom
US7319386B2 (en) 2004-08-02 2008-01-15 Hill-Rom Services, Inc. Configurable system for alerting caregivers
JP2007304472A (en) * 2006-05-15 2007-11-22 Nippon Telegr & Teleph Corp <Ntt> Semiconductor optical modulator
US7817691B2 (en) * 2006-05-19 2010-10-19 Nec Corporation Light emitting device
JP2008235574A (en) * 2007-03-20 2008-10-02 Sumitomo Electric Ind Ltd Surface-emitting semiconductor laser
TWM324049U (en) * 2007-05-21 2007-12-21 Universal Scient Ind Co Ltd Packaging structure of wireless communication module
CN101803035B (en) * 2007-06-19 2016-08-24 昆南诺股份有限公司 Solar battery structure based on nano wire
JP2009059918A (en) * 2007-08-31 2009-03-19 Sumitomo Electric Ind Ltd Optical semiconductor device
JP5649157B2 (en) * 2009-08-01 2015-01-07 住友電気工業株式会社 Semiconductor device and manufacturing method thereof
CN102832538A (en) * 2012-09-10 2012-12-19 中国科学院半导体研究所 Active area broadband gain structure with layers of quantum dot tunnel junction connected in series
JP2013157645A (en) * 2013-05-22 2013-08-15 Nippon Telegr & Teleph Corp <Ntt> Semiconductor laser and distributed feedback laser integrated with electroabsorption modulator
JP2016092175A (en) * 2014-11-04 2016-05-23 三菱電機株式会社 Semiconductor optical element
US20160349456A1 (en) * 2015-04-21 2016-12-01 Infineon Technologies Austria Ag Plasmonic and photonic wavelength separation filters
US20170084771A1 (en) * 2015-09-21 2017-03-23 The Boeing Company Antimonide-based high bandgap tunnel junction for semiconductor devices
DE102017005950A1 (en) * 2017-06-21 2018-12-27 Azur Space Solar Power Gmbh solar cell stack
DE102019003068A1 (en) * 2019-04-30 2020-11-05 3-5 Power Electronics GmbH InGaAS stacked high-blocking semiconductor power diode
US11616343B2 (en) 2020-05-21 2023-03-28 Lumentum Operations Llc Vertical-cavity surface-emitting laser with a tunnel junction
US11855413B2 (en) 2020-06-22 2023-12-26 Lumentum Operations Llc Vertical-cavity surface-emitting laser array with isolated cathodes and a common anode
JPWO2022113194A1 (en) * 2020-11-25 2022-06-02
CN114744484B (en) * 2022-04-08 2024-03-26 青岛科技大学 high-power laser structure based on GaAs-based high-band-gap tunnel junction

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0715357A1 (en) 1994-11-30 1996-06-05 Rockwell International Corporation Carbon-doped GaAsSb semiconductor
US7295586B2 (en) 2002-02-21 2007-11-13 Finisar Corporation Carbon doped GaAsSb suitable for use in tunnel junctions of long-wavelength VCSELs
US6765238B2 (en) 2002-09-12 2004-07-20 Agilent Technologies, Inc. Material systems for semiconductor tunnel-junction structures

Also Published As

Publication number Publication date
US6933539B1 (en) 2005-08-23
JP2007538410A (en) 2007-12-27
AU2005330578A8 (en) 2008-08-14
CN1973378A (en) 2007-05-30
US6982439B2 (en) 2006-01-03
WO2005117135A1 (en) 2005-12-08
EP1766689A4 (en) 2008-01-09
US20050253164A1 (en) 2005-11-17
EP1766689A1 (en) 2007-03-28
KR20070012550A (en) 2007-01-25
CA2567028A1 (en) 2005-12-08
AU2005330578A1 (en) 2006-12-14

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