NO163653C - Laser-radiometer. - Google Patents

Laser-radiometer.

Info

Publication number
NO163653C
NO163653C NO820237A NO820237A NO163653C NO 163653 C NO163653 C NO 163653C NO 820237 A NO820237 A NO 820237A NO 820237 A NO820237 A NO 820237A NO 163653 C NO163653 C NO 163653C
Authority
NO
Norway
Prior art keywords
radiometer
laser
laser radiometer
Prior art date
Application number
NO820237A
Other languages
English (en)
Norwegian (no)
Other versions
NO820237L (no
NO163653B (no
Inventor
Alexander Stein
Paul Rabinowitz
Andrew Kaldor
Original Assignee
Exxon Research Engineering Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Exxon Research Engineering Co filed Critical Exxon Research Engineering Co
Publication of NO820237L publication Critical patent/NO820237L/no
Publication of NO163653B publication Critical patent/NO163653B/no
Publication of NO163653C publication Critical patent/NO163653C/no

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B62—LAND VEHICLES FOR TRAVELLING OTHERWISE THAN ON RAILS
    • B62B—HAND-PROPELLED VEHICLES, e.g. HAND CARTS OR PERAMBULATORS; SLEDGES
    • B62B13/00—Sledges with runners
    • B62B13/02—Sledges with runners characterised by arrangement of runners
    • B62B13/06—Sledges with runners characterised by arrangement of runners arranged in two or more parallel lines
    • B62B13/08—Sledges with runners characterised by arrangement of runners arranged in two or more parallel lines with steering devices
    • B62B13/10—Sledges with runners characterised by arrangement of runners arranged in two or more parallel lines with steering devices with swivelling portions of the runners; with a swivelling middle runner
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0044—Furnaces, ovens, kilns
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0801—Means for wavelength selection or discrimination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0801—Means for wavelength selection or discrimination
    • G01J5/0802—Optical filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0803—Arrangements for time-dependent attenuation of radiation signals
    • G01J5/0804—Shutters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0803—Arrangements for time-dependent attenuation of radiation signals
    • G01J5/0805—Means for chopping radiation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0806—Focusing or collimating elements, e.g. lenses or concave mirrors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0846—Optical arrangements having multiple detectors for performing different types of detection, e.g. using radiometry and reflectometry channels
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0871—Beam switching arrangements; Photodetection involving different fields of view for a single detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0896—Optical arrangements using a light source, e.g. for illuminating a surface
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/52—Radiation pyrometry, e.g. infrared or optical thermometry using comparison with reference sources, e.g. disappearing-filament pyrometer
    • G01J5/53—Reference sources, e.g. standard lamps; Black bodies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J2005/0074—Radiation pyrometry, e.g. infrared or optical thermometry having separate detection of emissivity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/58—Radiation pyrometry, e.g. infrared or optical thermometry using absorption; using extinction effect
    • G01J2005/583—Interferences, i.e. fringe variation with temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/80—Calibration
    • G01J5/802—Calibration by correcting for emissivity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/04—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by beating two waves of a same source but of different frequency and measuring the phase shift of the lower frequency obtained

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Transportation (AREA)
  • Mechanical Engineering (AREA)
  • Radiation Pyrometers (AREA)
  • Laser Surgery Devices (AREA)
NO820237A 1981-01-28 1982-01-27 Laser-radiometer. NO163653C (no)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US22917281A 1981-01-28 1981-01-28
US06/319,244 US4417822A (en) 1981-01-28 1981-11-09 Laser radiometer

Publications (3)

Publication Number Publication Date
NO820237L NO820237L (no) 1982-07-29
NO163653B NO163653B (no) 1990-03-19
NO163653C true NO163653C (no) 1990-06-27

Family

ID=26923017

Family Applications (1)

Application Number Title Priority Date Filing Date
NO820237A NO163653C (no) 1981-01-28 1982-01-27 Laser-radiometer.

Country Status (7)

Country Link
US (1) US4417822A (da)
EP (1) EP0057568B1 (da)
AU (1) AU548002B2 (da)
CA (1) CA1174075A (da)
DE (1) DE3275946D1 (da)
DK (1) DK37082A (da)
NO (1) NO163653C (da)

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US4553854A (en) * 1982-12-17 1985-11-19 Nippon Kokan Kabushiki Kaisha Method for continuously measuring surface temperature of heated steel strip
DE3476584D1 (en) * 1983-11-28 1989-03-09 Deutsche Forsch Luft Raumfahrt Method for the contactless, emissivity-independent radiation measurement of the temperature of an object
US4657169A (en) * 1984-06-11 1987-04-14 Vanzetti Systems, Inc. Non-contact detection of liquefaction in meltable materials
US4647220A (en) * 1984-07-09 1987-03-03 Lockheed Corporation Method of and apparatus for detecting corrosion utilizing infrared analysis
DD253741A3 (de) * 1985-07-30 1988-02-03 Univ Dresden Tech Verfahren zur beruehrungslosen temperaturmessung mit einem mehrkanalpyrometer
US4708493A (en) * 1986-05-19 1987-11-24 Quantum Logic Corporation Apparatus for remote measurement of temperatures
US4818102A (en) * 1986-12-22 1989-04-04 United Technologies Corporation Active optical pyrometer
US4814870A (en) * 1987-08-05 1989-03-21 Compix Incorporated Portable infrared imaging apparatus
US4840496A (en) * 1988-02-23 1989-06-20 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Noncontact temperature pattern measuring device
US4956538A (en) * 1988-09-09 1990-09-11 Texas Instruments, Incorporated Method and apparatus for real-time wafer temperature measurement using infrared pyrometry in advanced lamp-heated rapid thermal processors
JPH02116259A (ja) * 1988-10-26 1990-04-27 Toshiba Corp 画像形成装置
US5029117A (en) * 1989-04-24 1991-07-02 Tektronix, Inc. Method and apparatus for active pyrometry
US5106201A (en) * 1989-05-30 1992-04-21 Deutsche Forschungsanstalt Fur Luft Und Raumfahrt E.V. Device for measuring the radiation temperature of a melt in vacuum
US5011295A (en) * 1989-10-17 1991-04-30 Houston Advanced Research Center Method and apparatus to simultaneously measure emissivities and thermodynamic temperatures of remote objects
US5769540A (en) * 1990-04-10 1998-06-23 Luxtron Corporation Non-contact optical techniques for measuring surface conditions
US5154512A (en) * 1990-04-10 1992-10-13 Luxtron Corporation Non-contact techniques for measuring temperature or radiation-heated objects
US5310260A (en) * 1990-04-10 1994-05-10 Luxtron Corporation Non-contact optical techniques for measuring surface conditions
US5508934A (en) * 1991-05-17 1996-04-16 Texas Instruments Incorporated Multi-point semiconductor wafer fabrication process temperature control system
US5156461A (en) * 1991-05-17 1992-10-20 Texas Instruments Incorporated Multi-point pyrometry with real-time surface emissivity compensation
US5317656A (en) * 1991-05-17 1994-05-31 Texas Instruments Incorporated Fiber optic network for multi-point emissivity-compensated semiconductor wafer pyrometry
US5314249A (en) * 1991-11-19 1994-05-24 Kawasaki Steel Corporation Surface condition measurement apparatus
IT1263111B (it) * 1992-03-24 1996-07-30 Comau Spa Dispositivo laser, in particolare robot-laser, con testa focalizzatrice provvista di mezzi sensori per il controllo della qualita' di un processo in un sistema di produzione automatizzato
AU4689293A (en) * 1992-07-15 1994-02-14 On-Line Technologies, Inc. Method and apparatus for monitoring layer processing
US5326172A (en) * 1992-12-14 1994-07-05 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Multiwavelength pyrometer for gray and non-gray surfaces in the presence of interfering radiation
US5365876A (en) * 1993-02-01 1994-11-22 The United States Of America As Represented By The United States Department Of Energy Crystal face temperature determination means
US5305417A (en) * 1993-03-26 1994-04-19 Texas Instruments Incorporated Apparatus and method for determining wafer temperature using pyrometry
US5564830A (en) * 1993-06-03 1996-10-15 Fraunhofer Gesellschaft Zur Forderung Der Angewandten Forschung E.V. Method and arrangement for determining the layer-thickness and the substrate temperature during coating
US5738440A (en) * 1994-12-23 1998-04-14 International Business Machines Corp. Combined emissivity and radiance measurement for the determination of the temperature of a radiant object
US5683538A (en) * 1994-12-23 1997-11-04 International Business Machines Corporation Control of etch selectivity
US5620254A (en) * 1995-03-08 1997-04-15 Servo Corporation Of America Thermal detector modulation scheme
GB2300476A (en) * 1995-04-12 1996-11-06 Otter Controls Ltd Pyrometer with laser emissivity measurement
FR2773214B1 (fr) * 1996-12-11 2002-05-31 Omega Engineering Procede et dispositif pour la mesure par infrarouge de la temperature d'une surface
JP3516922B2 (ja) 1999-03-08 2004-04-05 シィー．アイ．システムズ リミテッド 放射率が波長により変化する物体の温度のアクティブパイロメトリーのための方法および装置
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US6682216B1 (en) * 1999-12-16 2004-01-27 The Regents Of The University Of California Single-fiber multi-color pyrometry
US7044386B2 (en) * 2002-02-05 2006-05-16 William Berson Information encoding on surfaces by varying spectral emissivity
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US7407195B2 (en) 2004-04-14 2008-08-05 William Berson Label for receiving indicia having variable spectral emissivity values
US7651031B2 (en) 2004-10-25 2010-01-26 William Berson Systems and methods for reading indicium
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US7931413B2 (en) 2005-01-14 2011-04-26 William Berson Printing system ribbon including print transferable circuitry and elements
US7621451B2 (en) 2005-01-14 2009-11-24 William Berson Radio frequency identification labels and systems and methods for making the same
US7619520B2 (en) 2005-01-14 2009-11-17 William Berson Radio frequency identification labels and systems and methods for making the same
US7728726B2 (en) 2005-01-14 2010-06-01 William Berson Radio frequency identification labels
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US8293544B2 (en) 2008-07-28 2012-10-23 Globalfoundries Singapore Pte. Ltd. Method and apparatus to reduce thermal variations within an integrated circuit die using thermal proximity correction
CN103913237B (zh) * 2014-01-28 2017-01-04 中国人民解放军海军工程大学 三波段红外辐射精确测温方法
CN111028466B (zh) * 2019-12-02 2022-03-04 广州中国科学院先进技术研究所 一种双通道全息成像火焰探测系统
CN113447137B (zh) * 2021-07-05 2023-04-07 电子科技大学 一种面向无人机宽波段热像仪的地表温度反演方法

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Also Published As

Publication number Publication date
NO820237L (no) 1982-07-29
EP0057568A3 (en) 1982-09-08
EP0057568B1 (en) 1987-04-01
DK37082A (da) 1982-07-29
US4417822A (en) 1983-11-29
AU548002B2 (en) 1985-11-14
AU7989082A (en) 1982-08-05
CA1174075A (en) 1984-09-11
DE3275946D1 (en) 1987-05-07
EP0057568A2 (en) 1982-08-11
NO163653B (no) 1990-03-19

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