NO131392B - - Google Patents
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- Publication number
- NO131392B NO131392B NO151172A NO151172A NO131392B NO 131392 B NO131392 B NO 131392B NO 151172 A NO151172 A NO 151172A NO 151172 A NO151172 A NO 151172A NO 131392 B NO131392 B NO 131392B
- Authority
- NO
- Norway
- Prior art keywords
- chambers
- electrode
- electrodes
- walls
- separate
- Prior art date
Links
- 238000004804 winding Methods 0.000 claims description 7
- 238000004544 sputter deposition Methods 0.000 claims description 6
- 230000005684 electric field Effects 0.000 claims description 3
- 239000000758 substrate Substances 0.000 description 6
- 238000009826 distribution Methods 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- 239000013077 target material Substances 0.000 description 5
- 239000000498 cooling water Substances 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 239000004020 conductor Substances 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NO151172A NO131392C (ja) | 1972-04-28 | 1972-04-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NO151172A NO131392C (ja) | 1972-04-28 | 1972-04-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| NO131392B true NO131392B (ja) | 1975-02-10 |
| NO131392C NO131392C (ja) | 1975-05-21 |
Family
ID=19878244
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NO151172A NO131392C (ja) | 1972-04-28 | 1972-04-28 |
Country Status (1)
| Country | Link |
|---|---|
| NO (1) | NO131392C (ja) |
-
1972
- 1972-04-28 NO NO151172A patent/NO131392C/no unknown
Also Published As
| Publication number | Publication date |
|---|---|
| NO131392C (ja) | 1975-05-21 |
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