NL8602406A - Werkwijze voor het verbeteren van de uniformiteit van afgegeven verlichting in een optische inrichting, apparaat voor het uitvoeren van de werkwijze en optische verlichtingsinrichting. - Google Patents

Werkwijze voor het verbeteren van de uniformiteit van afgegeven verlichting in een optische inrichting, apparaat voor het uitvoeren van de werkwijze en optische verlichtingsinrichting. Download PDF

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Publication number
NL8602406A
NL8602406A NL8602406A NL8602406A NL8602406A NL 8602406 A NL8602406 A NL 8602406A NL 8602406 A NL8602406 A NL 8602406A NL 8602406 A NL8602406 A NL 8602406A NL 8602406 A NL8602406 A NL 8602406A
Authority
NL
Netherlands
Prior art keywords
optical
lens
lenses
illumination
lens array
Prior art date
Application number
NL8602406A
Other languages
English (en)
Dutch (nl)
Original Assignee
American Semiconductor Equip
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by American Semiconductor Equip filed Critical American Semiconductor Equip
Publication of NL8602406A publication Critical patent/NL8602406A/nl

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
    • G02B19/0028—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed refractive and reflective surfaces, e.g. non-imaging catadioptric systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/02—Diffusing elements; Afocal elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Light Sources And Details Of Projection-Printing Devices (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Microscoopes, Condenser (AREA)
NL8602406A 1985-09-24 1986-09-24 Werkwijze voor het verbeteren van de uniformiteit van afgegeven verlichting in een optische inrichting, apparaat voor het uitvoeren van de werkwijze en optische verlichtingsinrichting. NL8602406A (nl)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US77943085A 1985-09-24 1985-09-24
US77943085 1985-09-24

Publications (1)

Publication Number Publication Date
NL8602406A true NL8602406A (nl) 1987-04-16

Family

ID=25116420

Family Applications (1)

Application Number Title Priority Date Filing Date
NL8602406A NL8602406A (nl) 1985-09-24 1986-09-24 Werkwijze voor het verbeteren van de uniformiteit van afgegeven verlichting in een optische inrichting, apparaat voor het uitvoeren van de werkwijze en optische verlichtingsinrichting.

Country Status (2)

Country Link
JP (1) JPS62115119A (ja)
NL (1) NL8602406A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7016572B2 (en) * 2003-09-03 2006-03-21 United Microelectronics Corp. Optically integrated device
US7050679B2 (en) * 2003-09-03 2006-05-23 United Microelectronics Corp. Optically integrated device

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6363028A (ja) * 1986-09-04 1988-03-19 Nikon Corp 照明光学装置
JP3440458B2 (ja) * 1993-06-18 2003-08-25 株式会社ニコン 照明装置、パターン投影方法及び半導体素子の製造方法
CN105589302A (zh) * 2016-03-14 2016-05-18 东莞王氏港建机械有限公司 一种平行出光紫外光曝光系统及曝光机

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7016572B2 (en) * 2003-09-03 2006-03-21 United Microelectronics Corp. Optically integrated device
US7050679B2 (en) * 2003-09-03 2006-05-23 United Microelectronics Corp. Optically integrated device

Also Published As

Publication number Publication date
JPS62115119A (ja) 1987-05-26

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