NL8104478A - Massastroming-regelaar. - Google Patents

Massastroming-regelaar. Download PDF

Info

Publication number
NL8104478A
NL8104478A NL8104478A NL8104478A NL8104478A NL 8104478 A NL8104478 A NL 8104478A NL 8104478 A NL8104478 A NL 8104478A NL 8104478 A NL8104478 A NL 8104478A NL 8104478 A NL8104478 A NL 8104478A
Authority
NL
Netherlands
Prior art keywords
signal
amplifier
resistor
gas
operational amplifier
Prior art date
Application number
NL8104478A
Other languages
English (en)
Dutch (nl)
Original Assignee
Thermco Products Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thermco Products Corp filed Critical Thermco Products Corp
Publication of NL8104478A publication Critical patent/NL8104478A/nl

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7737—Thermal responsive
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7759—Responsive to change in rate of fluid flow
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7761—Electrically actuated valve

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Measuring Volume Flow (AREA)
NL8104478A 1980-10-03 1981-10-01 Massastroming-regelaar. NL8104478A (nl)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/193,876 US4658855A (en) 1980-10-03 1980-10-03 Mass flow controller
US19387680 1980-10-03

Publications (1)

Publication Number Publication Date
NL8104478A true NL8104478A (nl) 1982-05-03

Family

ID=22715372

Family Applications (1)

Application Number Title Priority Date Filing Date
NL8104478A NL8104478A (nl) 1980-10-03 1981-10-01 Massastroming-regelaar.

Country Status (3)

Country Link
US (1) US4658855A (de)
DE (1) DE3139023A1 (de)
NL (1) NL8104478A (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4685331A (en) * 1985-04-10 1987-08-11 Innovus Thermal mass flowmeter and controller
US4777383A (en) * 1987-06-01 1988-10-11 Ldi Pneutronics Corp. Electrically controlled variable pressure pneumatic circuit
FI79407C (fi) * 1987-06-18 1989-12-11 Halton Oy Foerfarande och anordning foer reglering av volymstroemmen i ventilationsanlaeggningar.
US4909078A (en) * 1987-10-14 1990-03-20 Rosemount Inc. Fluid flow detector
US5141021A (en) * 1991-09-06 1992-08-25 Stec Inc. Mass flow meter and mass flow controller
US5203537A (en) * 1992-03-09 1993-04-20 Teledyne Industries, Inc. Piezoceramic valve actuator sandwich assembly and valve incorporating such an assembly
EP0711430A1 (de) * 1992-06-12 1996-05-15 Unit Instruments, Inc. Vorrichtung zur massenstromsteuerung
US5768883A (en) * 1996-01-25 1998-06-23 Ametek Aerospace Products Inc. Flowrate control sytem and method
US6799603B1 (en) * 1999-09-20 2004-10-05 Moore Epitaxial, Inc. Gas flow controller system
US6247493B1 (en) 2000-03-09 2001-06-19 Richard C. Henderson Miniature pulsatile flow controller
JP4864280B2 (ja) * 2001-04-24 2012-02-01 ブルックス・インストルメント・エルエルシー 質量流量コントローラのシステムおよび方法
CN1688948B (zh) * 2002-07-19 2010-05-26 布鲁克斯器具有限公司 在质量流动控制器中用于压力补偿的方法和装置
US7216019B2 (en) * 2004-07-08 2007-05-08 Celerity, Inc. Method and system for a mass flow controller with reduced pressure sensitivity
US7651263B2 (en) * 2007-03-01 2010-01-26 Advanced Energy Industries, Inc. Method and apparatus for measuring the temperature of a gas in a mass flow controller
US8056579B2 (en) * 2007-06-04 2011-11-15 Horiba Stec, Co., Ltd. Mass flow controller
US7826986B2 (en) * 2008-09-26 2010-11-02 Advanced Energy Industries, Inc. Method and system for operating a mass flow controller
US7971480B2 (en) * 2008-10-13 2011-07-05 Hitachi Metals, Ltd. Mass flow controller having a first pair of thermal sensing elements opposing a second pair of thermal sensing elements
US11608618B2 (en) 2011-01-03 2023-03-21 Sentinel Hydrosolutions, Llc Thermal dispersion flow meter with fluid leak detection and freeze burst prevention
US9146172B2 (en) * 2011-01-03 2015-09-29 Sentinel Hydrosolutions, Llc Non-invasive thermal dispersion flow meter with chronometric monitor for fluid leak detection
US11814821B2 (en) 2011-01-03 2023-11-14 Sentinel Hydrosolutions, Llc Non-invasive thermal dispersion flow meter with fluid leak detection and geo-fencing control
CN106233209B (zh) * 2014-02-17 2019-08-09 株式会社岛津制作所 反馈控制装置
US20150309521A1 (en) * 2014-04-29 2015-10-29 Yang Pan Cloud Based Power Management System
CN104545827B (zh) * 2014-12-23 2017-05-03 金陵科技学院 体温检测电路和包含该体温检测电路的体温计
EP3176667B1 (de) * 2015-12-04 2019-05-15 Asco Numatics GmbH Vorsteuereinheit, ventilanordnung und verfahren zur geregelten bereitstellung eines fluids
JP7344012B2 (ja) * 2019-06-07 2023-09-13 株式会社堀場エステック 流体制御バルブ、流量制御装置、及び、駆動回路

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE858777C (de) * 1941-07-13 1952-12-08 Basf Ag Vorrichtung zur Gasanalyse durch Messung des Waermeleitvermoegens
DE876484C (de) * 1942-10-18 1953-05-15 Basf Ag Hitzdrahtstroemungsmesser
US3372590A (en) * 1965-10-01 1968-03-12 Technology Inc Thermal flowmeter
US3552428A (en) * 1968-06-20 1971-01-05 Phillips Petroleum Co Automatically tuned process controller
US3559480A (en) * 1968-12-20 1971-02-02 Leeds & Northrup Co Multirange flowmeter with automatic meter sequencing
US3650505A (en) * 1970-03-02 1972-03-21 Tylan Corp Thermal valve
US3650151A (en) * 1970-11-18 1972-03-21 Tylan Corp Fluid flow measuring system
US3792609A (en) * 1971-05-10 1974-02-19 Tylan Corp Flow splitter
US3805610A (en) * 1972-06-23 1974-04-23 Emerson Electric Co Flow dividing means, particularly for thermal flowmeter
US3757808A (en) * 1972-07-21 1973-09-11 Garrett Corp Electronic mass airflow sensing and control system
US3938384A (en) * 1972-10-13 1976-02-17 Tylan Corporation Mass flow meter with reduced attitude sensitivity
US3851526A (en) * 1973-04-09 1974-12-03 Tylan Corp Fluid flowmeter
US3939858A (en) * 1974-09-13 1976-02-24 Tylan Corporation Assembly and method of obtaining a controlled gas mixture
US4056975A (en) * 1976-02-09 1977-11-08 Tylan Corporation Mass flow sensor system
US4100801A (en) * 1976-02-09 1978-07-18 Tylan Corporation Mass flow sensing system
US4255968A (en) * 1979-06-08 1981-03-17 Intek, Inc. Flow indicator

Also Published As

Publication number Publication date
DE3139023A1 (de) 1982-06-24
US4658855A (en) 1987-04-21

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Legal Events

Date Code Title Description
A85 Still pending on 85-01-01
BA A request for search or an international-type search has been filed
DNT Communications of changes of names of applicants whose applications have been laid open to public inspection

Free format text: THERMCO SYSTEMS, INC.

BV The patent application has lapsed