NL7902620A - Ionenbron. - Google Patents

Ionenbron.

Info

Publication number
NL7902620A
NL7902620A NL7902620A NL7902620A NL7902620A NL 7902620 A NL7902620 A NL 7902620A NL 7902620 A NL7902620 A NL 7902620A NL 7902620 A NL7902620 A NL 7902620A NL 7902620 A NL7902620 A NL 7902620A
Authority
NL
Netherlands
Prior art keywords
ion source
ion
source
Prior art date
Application number
NL7902620A
Other languages
English (en)
Dutch (nl)
Original Assignee
Atomic Energy Authority Uk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Atomic Energy Authority Uk filed Critical Atomic Energy Authority Uk
Publication of NL7902620A publication Critical patent/NL7902620A/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Particle Accelerators (AREA)
NL7902620A 1978-04-05 1979-04-03 Ionenbron. NL7902620A (nl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1331078 1978-04-05

Publications (1)

Publication Number Publication Date
NL7902620A true NL7902620A (nl) 1979-10-09

Family

ID=10020642

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7902620A NL7902620A (nl) 1978-04-05 1979-04-03 Ionenbron.

Country Status (5)

Country Link
US (1) US4354113A (cs)
JP (1) JPS54139000A (cs)
DE (1) DE2913769A1 (cs)
FR (1) FR2422253A1 (cs)
NL (1) NL7902620A (cs)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2837023B2 (ja) * 1991-05-14 1998-12-14 アプライド マテリアルズ インコーポレイテッド イオン源の寿命を向上させたイオン打ち込み装置
DE4334357A1 (de) * 1993-10-08 1995-04-13 Zeiss Carl Fa Sattelfeldquelle
US7041984B2 (en) * 2004-05-20 2006-05-09 Inficon, Inc. Replaceable anode liner for ion source
JP5925084B2 (ja) * 2012-08-28 2016-05-25 住友重機械イオンテクノロジー株式会社 イオン生成方法およびイオン源

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1126466A (fr) * 1955-03-26 1956-11-23 Commissariat Energie Atomique Nouvelle source productrice d'ions d'éléments réfractaires ou non
GB1158782A (en) * 1965-05-14 1969-07-16 Nat Res Dev Improvements in or relating to Oscillation Generators
US3411035A (en) * 1966-05-31 1968-11-12 Gen Electric Multi-chamber hollow cathode low voltage electron beam apparatus
GB1414626A (en) 1971-11-24 1975-11-19 Franks J Ion sources
US3784858A (en) * 1972-11-24 1974-01-08 J Franks Ion sources
US3831052A (en) * 1973-05-25 1974-08-20 Hughes Aircraft Co Hollow cathode gas discharge device
GB1488657A (en) * 1973-09-24 1977-10-12 Ion Tech Ltd Ion sources

Also Published As

Publication number Publication date
DE2913769C2 (cs) 1990-04-05
US4354113A (en) 1982-10-12
DE2913769A1 (de) 1979-11-08
FR2422253B1 (cs) 1984-02-10
FR2422253A1 (fr) 1979-11-02
JPS6229862B2 (cs) 1987-06-29
JPS54139000A (en) 1979-10-27

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Legal Events

Date Code Title Description
A85 Still pending on 85-01-01
BA A request for search or an international-type search has been filed
BB A search report has been drawn up
BC A request for examination has been filed
BV The patent application has lapsed