NL7610373A - PARTICLE JETTING DEVICE WITH A GONIOMETER. - Google Patents

PARTICLE JETTING DEVICE WITH A GONIOMETER.

Info

Publication number
NL7610373A
NL7610373A NL7610373A NL7610373A NL7610373A NL 7610373 A NL7610373 A NL 7610373A NL 7610373 A NL7610373 A NL 7610373A NL 7610373 A NL7610373 A NL 7610373A NL 7610373 A NL7610373 A NL 7610373A
Authority
NL
Netherlands
Prior art keywords
goniometer
jetting device
particle jetting
particle
jetting
Prior art date
Application number
NL7610373A
Other languages
Dutch (nl)
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of NL7610373A publication Critical patent/NL7610373A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Control Of Position Or Direction (AREA)
NL7610373A 1975-09-19 1976-09-17 PARTICLE JETTING DEVICE WITH A GONIOMETER. NL7610373A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19752542360 DE2542360C2 (en) 1975-09-19 1975-09-19 Corpuscular beam device with a goniometer

Publications (1)

Publication Number Publication Date
NL7610373A true NL7610373A (en) 1977-03-22

Family

ID=5957171

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7610373A NL7610373A (en) 1975-09-19 1976-09-17 PARTICLE JETTING DEVICE WITH A GONIOMETER.

Country Status (5)

Country Link
US (1) US4058731A (en)
JP (1) JPS5238879A (en)
DE (1) DE2542360C2 (en)
GB (1) GB1518051A (en)
NL (1) NL7610373A (en)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2744680C2 (en) * 1977-09-30 1979-11-22 Siemens Ag, 1000 Berlin Und 8000 Muenchen Corpuscular beam optical device with an object holder seated in at least one bearing
US4170737A (en) * 1978-07-06 1979-10-09 Spetsialnoe Konstruktorskoe Bjuro Biologicheskogo Priborotroenia Akademii Nauk SSSR Top-entry transmission electron microscope
US4587431A (en) * 1983-04-22 1986-05-06 Jeol Ltd. Specimen manipulating mechanism for charged-particle beam instrument
DE3546095A1 (en) * 1985-12-24 1987-06-25 Zeiss Carl Fa GONIOMETER TABLE
DE3628170A1 (en) * 1986-08-20 1988-02-25 Max Planck Gesellschaft ADJUSTABLE PREPARATION BRACKET FOR A CARPULAR RAY MICROSCOPE
DE4140710A1 (en) * 1991-12-10 1993-06-17 Integrated Circuit Testing POSITIONING SYSTEM
US5481111A (en) * 1994-01-03 1996-01-02 Philips Electronics North America Corporation Electron microscope having a goniometer controlled from the image frame of reference
JP3014274B2 (en) * 1994-06-29 2000-02-28 株式会社日立製作所 Biaxial tilt sample fine-movement device and image relief correction method
FR2737785B1 (en) * 1995-08-11 1997-10-17 Matra Mhs METHOD AND DEVICE FOR POSITIONING AN OBJECT IN RELATION TO THE FOCUSING POINT OF A MICROSCOPE
DE19839871C2 (en) * 1998-09-02 2000-06-15 Dresden Ev Inst Festkoerper Manipulator for positioning samples in equipment and chambers
US6740889B1 (en) * 1998-09-28 2004-05-25 Applied Materials, Inc. Charged particle beam microscope with minicolumn
US6690763B2 (en) 2001-04-28 2004-02-10 Oceaneering International, Inc. Device for micro-manipulation of small samples
FI20041538A (en) * 2004-11-29 2006-05-30 Stresstech Oy goniometer
JP4185062B2 (en) * 2005-03-04 2008-11-19 エスアイアイ・ナノテクノロジー株式会社 Processing stage, focused beam processing apparatus, and focused beam processing method

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1950320A1 (en) * 1969-09-30 1971-04-01 Siemens Ag Method for identifying positions of a part that is adjustably arranged in the vacuum space of a corpuscular beam device
US3648048A (en) * 1969-10-15 1972-03-07 Thomson Houston Comp Francaise System and method for positioning a wafer coated with photoresist and for controlling the displacements of said wafer in a scanning electron apparatus
JPS4830860A (en) * 1971-08-25 1973-04-23
US3952203A (en) * 1972-07-21 1976-04-20 Max-Planck-Gesellschaft Zur Forderung Der Wissenschaften E.V. Object adjustment device for a charged particle beam apparatus

Also Published As

Publication number Publication date
GB1518051A (en) 1978-07-19
DE2542360C2 (en) 1977-11-17
US4058731A (en) 1977-11-15
JPS5238879A (en) 1977-03-25
DE2542360B1 (en) 1977-03-24

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Legal Events

Date Code Title Description
BV The patent application has lapsed