NL7605956A - Met corpusculaire stralen werkende rastermi- croscoop. - Google Patents

Met corpusculaire stralen werkende rastermi- croscoop.

Info

Publication number
NL7605956A
NL7605956A NL7605956A NL7605956A NL7605956A NL 7605956 A NL7605956 A NL 7605956A NL 7605956 A NL7605956 A NL 7605956A NL 7605956 A NL7605956 A NL 7605956A NL 7605956 A NL7605956 A NL 7605956A
Authority
NL
Netherlands
Prior art keywords
mixer working
corpuscular rays
grid mixer
grid
corpuscular
Prior art date
Application number
NL7605956A
Other languages
English (en)
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of NL7605956A publication Critical patent/NL7605956A/nl

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Microscoopes, Condenser (AREA)
NL7605956A 1975-09-12 1976-06-02 Met corpusculaire stralen werkende rastermi- croscoop. NL7605956A (nl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19752541245 DE2541245A1 (de) 1975-09-12 1975-09-12 Korpuskularstrahl-rastermikroskop

Publications (1)

Publication Number Publication Date
NL7605956A true NL7605956A (nl) 1977-03-15

Family

ID=5956594

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7605956A NL7605956A (nl) 1975-09-12 1976-06-02 Met corpusculaire stralen werkende rastermi- croscoop.

Country Status (5)

Country Link
US (1) US4097739A (nl)
JP (1) JPS5235977A (nl)
DE (1) DE2541245A1 (nl)
GB (1) GB1557800A (nl)
NL (1) NL7605956A (nl)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5412211A (en) * 1993-07-30 1995-05-02 Electroscan Corporation Environmental scanning electron microscope
JP3785458B2 (ja) * 2002-11-20 2006-06-14 国立大学法人名古屋大学 透過型電子顕微鏡及び立体観察法
WO2012014870A1 (ja) * 2010-07-27 2012-02-02 株式会社日立ハイテクノロジーズ 収差補正装置およびそれを用いた荷電粒子線装置
JP6718782B2 (ja) * 2016-09-21 2020-07-08 日本電子株式会社 対物レンズおよび透過電子顕微鏡
US10557793B1 (en) 2017-08-16 2020-02-11 United States Of America As Represented By The Secretary Of The Air Force Scanning microscope using a probe beam deflection technique (PBDT)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3188465A (en) * 1959-12-29 1965-06-08 Kabushikikaisha Nihondenshi Ka Two stage electron beam magnification device comprising plural adjustable magnetic lens system
GB1238889A (nl) * 1968-11-26 1971-07-14
DE2213208C3 (de) * 1972-03-16 1975-11-13 Max Planck Gesellschaft Rotationssymetrisches, sphärisch korrigiertes korpuskularstrahloptisches Abbildungssystem

Also Published As

Publication number Publication date
US4097739A (en) 1978-06-27
JPS5235977A (en) 1977-03-18
GB1557800A (en) 1979-12-12
DE2541245A1 (de) 1977-03-24

Similar Documents

Publication Publication Date Title
NL7511536A (nl) Voorgefabriceerde wegbebakeningsstrook.
NO139153C (no) Absorbsjonsmiddel.
NL7504077A (nl) Bevestigingsmiddel.
NL7613175A (nl) Kernreaktor.
NL7416243A (nl) Montagebouw.
NL7415505A (nl) Bevestigingsorgaan.
NL7407198A (nl) Schootlier.
NL7510857A (nl) Celvormige roosterconstructie.
SE419410B (sv) Spannmalskvarn, serskilt for hushallsbruk
NL7607242A (nl) Plafondophangrooster.
NL7505091A (nl) Bodemschimmels-bestrijdende middelen.
NL7603734A (nl) Gekromd raster.
SE7504274L (sv) Dialysatorcell.
NL7607274A (nl) Radioactieve steroiden.
NL162161C (nl) Heiblok.
NL7605956A (nl) Met corpusculaire stralen werkende rastermi- croscoop.
NL175339C (nl) Roostoven.
NL7606817A (nl) Grillrooster.
NL7506461A (nl) Herbicide middelen.
NL7513115A (nl) Anode-eenheid.
NL7500151A (nl) Ringtwist samenstel.
NL164348C (nl) Heiblok.
NL7506982A (nl) Gemengde hydroxymethyl-hydroxyalkylisocyanuraten.
SE7504813L (sv) Positioneringsapparat.
SE7506692L (sv) Djupdragningsforfarande.

Legal Events

Date Code Title Description
BV The patent application has lapsed