Classifications

• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
  • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
  • H01L21/76—Making of isolation regions between components
  • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
  • H01L21/76297—Dielectric isolation using EPIC techniques, i.e. epitaxial passivated integrated circuit
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate

Landscapes

• Engineering & Computer Science (AREA)
• Power Engineering (AREA)
• Physics & Mathematics (AREA)
• Condensed Matter Physics & Semiconductors (AREA)
• General Physics & Mathematics (AREA)
• Computer Hardware Design (AREA)
• Microelectronics & Electronic Packaging (AREA)
• Manufacturing & Machinery (AREA)
• Element Separation (AREA)
• Weting (AREA)
• Recrystallisation Techniques (AREA)

Applications Claiming Priority (1)

Publications (1)

Family

ID=9135457

Family Applications (1)

Country Status (7)

Families Citing this family (1)

• 1974
  • 1974-02-26 FR FR7406492A patent/FR2262406B1/fr not_active Expired
• 1975
  • 1975-02-22 JP JP2235775A patent/JPS50126181A/ja active Pending
  • 1975-02-24 NL NL7502154A patent/NL7502154A/en not_active Application Discontinuation
  • 1975-02-24 BE BE1006473A patent/BE825855A/en not_active IP Right Cessation
  • 1975-02-24 GB GB768975A patent/GB1480129A/en not_active Expired
  • 1975-02-25 IT IT6748275A patent/IT1030218B/en active
  • 1975-02-25 DE DE19752508091 patent/DE2508091A1/en active Pending

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