NL7408820A - Veldemissie-elektronenkanonsysteem. - Google Patents

Veldemissie-elektronenkanonsysteem.

Info

Publication number
NL7408820A
NL7408820A NL7408820A NL7408820A NL7408820A NL 7408820 A NL7408820 A NL 7408820A NL 7408820 A NL7408820 A NL 7408820A NL 7408820 A NL7408820 A NL 7408820A NL 7408820 A NL7408820 A NL 7408820A
Authority
NL
Netherlands
Prior art keywords
field emission
gun system
electronic gun
emission electronic
field
Prior art date
Application number
NL7408820A
Other languages
English (en)
Dutch (nl)
Original Assignee
Radiant Energy Systems
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US448283A external-priority patent/US3922546A/en
Application filed by Radiant Energy Systems filed Critical Radiant Energy Systems
Publication of NL7408820A publication Critical patent/NL7408820A/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302—Controlling tubes by external information, e.g. programme control

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
NL7408820A 1974-03-05 1974-07-01 Veldemissie-elektronenkanonsysteem. NL7408820A (nl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US448283A US3922546A (en) 1972-04-14 1974-03-05 Electron beam pattern generator

Publications (1)

Publication Number Publication Date
NL7408820A true NL7408820A (nl) 1975-09-09

Family

ID=23779689

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7408820A NL7408820A (nl) 1974-03-05 1974-07-01 Veldemissie-elektronenkanonsysteem.

Country Status (7)

Country Link
JP (1) JPS50120095A (it)
DE (1) DE2431496A1 (it)
FR (1) FR2263600A1 (it)
IT (1) IT1015575B (it)
NL (1) NL7408820A (it)
SE (1) SE7408231L (it)
ZA (1) ZA744165B (it)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4084095A (en) * 1977-02-14 1978-04-11 Burroughs Corporation Electron beam column generator for the fabrication of semiconductor devices

Also Published As

Publication number Publication date
FR2263600A1 (en) 1975-10-03
IT1015575B (it) 1977-05-20
SE7408231L (it) 1975-09-08
JPS50120095A (it) 1975-09-19
DE2431496A1 (de) 1975-09-11
FR2263600B3 (it) 1977-05-06
ZA744165B (en) 1975-07-30

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