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Priority claimed from DE19722238896external-prioritypatent/DE2238896C3/de
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Publication of NL7310660ApublicationCriticalpatent/NL7310660A/xx
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/02—Details
H01J37/16—Vessels; Containers
H01J37/165—Means associated with the vessel for preventing the generation of or for shielding unwanted radiation, e.g. X-rays
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Chemical & Material Sciences
(AREA)
Analytical Chemistry
(AREA)
Analysing Materials By The Use Of Radiation
(AREA)