NL7301164A - - Google Patents
Info
- Publication number
- NL7301164A NL7301164A NL7301164A NL7301164A NL7301164A NL 7301164 A NL7301164 A NL 7301164A NL 7301164 A NL7301164 A NL 7301164A NL 7301164 A NL7301164 A NL 7301164A NL 7301164 A NL7301164 A NL 7301164A
- Authority
- NL
- Netherlands
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Microscoopes, Condenser (AREA)
- Sampling And Sample Adjustment (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US22167072A | 1972-01-28 | 1972-01-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL7301164A true NL7301164A (ja�@�@) | 1973-07-31 |
Family
ID=22828815
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL7301164A NL7301164A (ja�@�@) | 1972-01-28 | 1973-01-26 |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JPS4885069A (ja�@�@) |
| CA (1) | CA982705A (ja�@�@) |
| DE (1) | DE2302121A1 (ja�@�@) |
| FR (1) | FR2169232B1 (ja�@�@) |
| GB (1) | GB1416043A (ja�@�@) |
| NL (1) | NL7301164A (ja�@�@) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54143579U (ja�@�@) * | 1978-03-27 | 1979-10-05 | ||
| JP3987276B2 (ja) | 2000-10-12 | 2007-10-03 | 株式会社日立製作所 | 試料像形成方法 |
| NL1025500C2 (nl) * | 2004-02-17 | 2005-08-19 | Fei Co | Deeltjesbron met selecteerbare bundelstroom en energiespreiding. |
| EP2128885A1 (en) | 2008-05-26 | 2009-12-02 | FEI Company | Charged particle source with integrated energy filter |
| DE102009016861A1 (de) * | 2009-04-08 | 2010-10-21 | Carl Zeiss Nts Gmbh | Teilchenstrahlmikroskop |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL285301A (ja�@�@) * | 1961-11-15 |
-
1973
- 1973-01-15 GB GB194173A patent/GB1416043A/en not_active Expired
- 1973-01-16 CA CA161,333A patent/CA982705A/en not_active Expired
- 1973-01-17 DE DE19732302121 patent/DE2302121A1/de active Pending
- 1973-01-25 FR FR7302594A patent/FR2169232B1/fr not_active Expired
- 1973-01-26 NL NL7301164A patent/NL7301164A/xx unknown
- 1973-01-27 JP JP48010704A patent/JPS4885069A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| FR2169232A1 (ja�@�@) | 1973-09-07 |
| DE2302121A1 (de) | 1973-08-09 |
| FR2169232B1 (ja�@�@) | 1978-08-04 |
| GB1416043A (en) | 1975-12-03 |
| JPS4885069A (ja�@�@) | 1973-11-12 |
| CA982705A (en) | 1976-01-27 |