NL7300628A - - Google Patents

Info

Publication number
NL7300628A
NL7300628A NL7300628A NL7300628A NL7300628A NL 7300628 A NL7300628 A NL 7300628A NL 7300628 A NL7300628 A NL 7300628A NL 7300628 A NL7300628 A NL 7300628A NL 7300628 A NL7300628 A NL 7300628A
Authority
NL
Netherlands
Application number
NL7300628A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19722202055 external-priority patent/DE2202055A1/de
Priority claimed from DE19722221432 external-priority patent/DE2221432A1/de
Application filed filed Critical
Publication of NL7300628A publication Critical patent/NL7300628A/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/01—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
NL7300628A 1972-01-17 1973-01-16 NL7300628A (enrdf_load_stackoverflow)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19722202055 DE2202055A1 (de) 1972-01-17 1972-01-17 Anordnung zum herstellen eines rohres aus halbleitermaterial
DE19722221432 DE2221432A1 (de) 1972-05-02 1972-05-02 Verfahren und vorrichtung zum herstellen von mit ausnehmungen versehenen gegenstaenden aus halbleitermaterial

Publications (1)

Publication Number Publication Date
NL7300628A true NL7300628A (enrdf_load_stackoverflow) 1973-07-19

Family

ID=25762580

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7300628A NL7300628A (enrdf_load_stackoverflow) 1972-01-17 1973-01-16

Country Status (5)

Country Link
JP (1) JPS4883776A (enrdf_load_stackoverflow)
BE (1) BE794138A (enrdf_load_stackoverflow)
FR (1) FR2168398A1 (enrdf_load_stackoverflow)
IT (1) IT978151B (enrdf_load_stackoverflow)
NL (1) NL7300628A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5391463U (enrdf_load_stackoverflow) * 1976-12-27 1978-07-26

Also Published As

Publication number Publication date
IT978151B (it) 1974-09-20
FR2168398B3 (enrdf_load_stackoverflow) 1976-01-16
JPS4883776A (enrdf_load_stackoverflow) 1973-11-08
FR2168398A1 (en) 1973-08-31
BE794138A (fr) 1973-07-17

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