NL7215178A - - Google Patents

Info

Publication number
NL7215178A
NL7215178A NL7215178A NL7215178A NL7215178A NL 7215178 A NL7215178 A NL 7215178A NL 7215178 A NL7215178 A NL 7215178A NL 7215178 A NL7215178 A NL 7215178A NL 7215178 A NL7215178 A NL 7215178A
Authority
NL
Netherlands
Application number
NL7215178A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19712157571 external-priority patent/DE2157571C3/de
Application filed filed Critical
Publication of NL7215178A publication Critical patent/NL7215178A/xx

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
NL7215178A 1971-11-19 1972-11-09 NL7215178A (cs)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19712157571 DE2157571C3 (de) 1971-11-19 Vorrichtung zum Beschichten von Schüttgut unter Vakuum

Publications (1)

Publication Number Publication Date
NL7215178A true NL7215178A (cs) 1973-05-22

Family

ID=5825622

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7215178A NL7215178A (cs) 1971-11-19 1972-11-09

Country Status (6)

Country Link
JP (1) JPS4862680A (cs)
BE (1) BE791563A (cs)
FR (1) FR2160604B3 (cs)
GB (1) GB1365793A (cs)
IT (1) IT970857B (cs)
NL (1) NL7215178A (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58695Y2 (ja) * 1978-04-17 1983-01-07 日本真空技術株式会社 ドライプレ−テイング装置

Also Published As

Publication number Publication date
GB1365793A (en) 1974-09-04
FR2160604B3 (cs) 1976-01-09
BE791563A (fr) 1973-03-16
DE2157571B2 (de) 1976-01-29
FR2160604A1 (cs) 1973-06-29
JPS4862680A (cs) 1973-09-01
DE2157571A1 (de) 1973-05-30
IT970857B (it) 1974-04-20

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