NL7213557A - - Google Patents
Info
- Publication number
- NL7213557A NL7213557A NL7213557A NL7213557A NL7213557A NL 7213557 A NL7213557 A NL 7213557A NL 7213557 A NL7213557 A NL 7213557A NL 7213557 A NL7213557 A NL 7213557A NL 7213557 A NL7213557 A NL 7213557A
- Authority
- NL
- Netherlands
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B19/00—Liquid-phase epitaxial-layer growth
- C30B19/06—Reaction chambers; Boats for supporting the melt; Substrate holders
- C30B19/064—Rotating sliding boat system
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B19/00—Liquid-phase epitaxial-layer growth
- C30B19/06—Reaction chambers; Boats for supporting the melt; Substrate holders
- C30B19/061—Tipping system, e.g. by rotation
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B19/00—Liquid-phase epitaxial-layer growth
- C30B19/06—Reaction chambers; Boats for supporting the melt; Substrate holders
- C30B19/065—Multiple stacked slider system
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7905271A JPS5137142B2 (fr) | 1971-10-06 | 1971-10-06 | |
JP46100523A JPS5137144B2 (fr) | 1971-12-10 | 1971-12-10 | |
JP9153672A JPS531036B2 (fr) | 1972-09-11 | 1972-09-11 |
Publications (1)
Publication Number | Publication Date |
---|---|
NL7213557A true NL7213557A (fr) | 1973-04-10 |
Family
ID=27302910
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NL7213557A NL7213557A (fr) | 1971-10-06 | 1972-10-06 |
Country Status (3)
Country | Link |
---|---|
US (1) | US3896765A (fr) |
DE (1) | DE2249144C3 (fr) |
NL (1) | NL7213557A (fr) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5120081A (en) * | 1974-08-12 | 1976-02-17 | Hitachi Ltd | Ketsushoseichohoho oyobi sochi |
US4028148A (en) * | 1974-12-20 | 1977-06-07 | Nippon Telegraph And Telephone Public Corporation | Method of epitaxially growing a laminate semiconductor layer in liquid phase |
US4160682A (en) * | 1978-03-30 | 1979-07-10 | Western Electric Co., Inc. | Depositing materials on stacked semiconductor wafers |
US4235191A (en) * | 1979-03-02 | 1980-11-25 | Western Electric Company, Inc. | Apparatus for depositing materials on stacked semiconductor wafers |
US20020114741A1 (en) * | 2001-02-16 | 2002-08-22 | Brandeis University | Adhesive label for microcentrifuge tube |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3115146A (en) * | 1960-12-01 | 1963-12-24 | Weldon C Erwin | Contact lens holder |
US3765959A (en) * | 1971-07-30 | 1973-10-16 | Tokyo Shibaura Electric Co | Method for the liquid phase epitaxial growth of semiconductor crystals |
BE791927A (fr) * | 1971-11-29 | 1973-03-16 | Western Electric Co | Procede de depot par croissance epitaxiale de couches de cristaux semi-conducteurs |
-
1972
- 1972-10-06 DE DE2249144A patent/DE2249144C3/de not_active Expired
- 1972-10-06 NL NL7213557A patent/NL7213557A/xx not_active Application Discontinuation
- 1972-10-06 US US295554A patent/US3896765A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US3896765A (en) | 1975-07-29 |
DE2249144A1 (de) | 1973-04-12 |
DE2249144B2 (de) | 1975-01-23 |
DE2249144C3 (de) | 1975-09-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
BV | The patent application has lapsed |