NL7211495A - - Google Patents

Info

Publication number
NL7211495A
NL7211495A NL7211495A NL7211495A NL7211495A NL 7211495 A NL7211495 A NL 7211495A NL 7211495 A NL7211495 A NL 7211495A NL 7211495 A NL7211495 A NL 7211495A NL 7211495 A NL7211495 A NL 7211495A
Authority
NL
Netherlands
Application number
NL7211495A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL7211495A publication Critical patent/NL7211495A/xx

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/20Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Details Of Measuring And Other Instruments (AREA)
NL7211495A 1971-08-25 1972-08-23 NL7211495A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP46064441A JPS4830860A (en) 1971-08-25 1971-08-25

Publications (1)

Publication Number Publication Date
NL7211495A true NL7211495A (en) 1973-02-27

Family

ID=13258355

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7211495A NL7211495A (en) 1971-08-25 1972-08-23

Country Status (3)

Country Link
US (1) US3745341A (en)
JP (1) JPS4830860A (en)
NL (1) NL7211495A (en)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2542360C2 (en) * 1975-09-19 1977-11-17 Siemens AG, 1000 Berlin und 8000 München Corpuscular beam device with a goniometer
DE2825417C2 (en) * 1978-06-09 1980-08-07 Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften E.V., 3400 Goettingen Method and object setting device for setting a specimen slide with respect to the device axis of a corpuscular beam device
JPS55104057A (en) * 1979-02-02 1980-08-09 Hitachi Ltd Ion implantation device
JP2561699B2 (en) * 1988-04-28 1996-12-11 日本電子株式会社 Electron microscope sample device
US4954712A (en) * 1989-10-16 1990-09-04 Wilcox Harry P Specimen retaining ring system for an electron microscope
NL8902568A (en) * 1989-10-17 1991-05-16 Philips Nv VACUUM SYSTEM EQUIPPED WITH AN EVACUABLE HOUSING, AN OBJECT HOLDER AND A REMOVABLE OBJECT CARRIER.
DE69128104T2 (en) * 1990-05-18 1998-04-09 Hitachi Ltd Electron microscope, sample actuator for an electron microscope and method for observing microscopic images
US5323012A (en) * 1991-08-16 1994-06-21 The Regents Of The University Of California Apparatus for positioning a stage
US5289005A (en) * 1992-05-29 1994-02-22 Jeol Ltd. Electron microscope
US6252705B1 (en) * 1999-05-25 2001-06-26 Schlumberger Technologies, Inc. Stage for charged particle microscopy system
JP4534273B2 (en) * 1999-08-31 2010-09-01 株式会社日立製作所 Sample preparation device
CN1981243A (en) * 2004-06-21 2007-06-13 日本先锋公司 Electron beam drawing device
JP5403560B2 (en) 2010-11-17 2014-01-29 コリア ベイシック サイエンス インスティテュート Specimen holder capable of 3-axis drive for observing and analyzing specimens from more than three directions in a transmission electron microscope
JP2015195123A (en) * 2014-03-31 2015-11-05 株式会社メルビル Specimen holder

Also Published As

Publication number Publication date
JPS4830860A (en) 1973-04-23
US3745341A (en) 1973-07-10

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