NL7209294A - - Google Patents

Info

Publication number
NL7209294A
NL7209294A NL7209294A NL7209294A NL7209294A NL 7209294 A NL7209294 A NL 7209294A NL 7209294 A NL7209294 A NL 7209294A NL 7209294 A NL7209294 A NL 7209294A NL 7209294 A NL7209294 A NL 7209294A
Authority
NL
Netherlands
Application number
NL7209294A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to NL7209294A priority Critical patent/NL7209294A/xx
Priority to DE19732330720 priority patent/DE2330720C3/de
Priority to AU57405/73A priority patent/AU5740573A/en
Priority to JP48072325A priority patent/JPS4943880A/ja
Priority to IT2604673A priority patent/IT990832B/it
Priority to FR7323681A priority patent/FR2190946B1/fr
Priority to BR477273A priority patent/BR7304772D0/pt
Priority to GB3080973A priority patent/GB1420526A/en
Priority to SE7309131A priority patent/SE384537B/xx
Priority to BE132987A priority patent/BE801747A/xx
Publication of NL7209294A publication Critical patent/NL7209294A/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34—Nitrides
    • C23C16/345—Silicon nitride

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Ceramic Products (AREA)
NL7209294A 1972-07-01 1972-07-01 NL7209294A (en:Method)

Priority Applications (10)

Application Number Priority Date Filing Date Title
NL7209294A NL7209294A (en:Method) 1972-07-01 1972-07-01
DE19732330720 DE2330720C3 (de) 1972-07-01 1973-06-16 Verfahren zur Herstellung gasdichter Rohre und Behälter
AU57405/73A AU5740573A (en) 1972-07-01 1973-06-27 Tube lined with silicon nitride
JP48072325A JPS4943880A (en:Method) 1972-07-01 1973-06-28
IT2604673A IT990832B (it) 1972-07-01 1973-06-28 Procedimento di fabbricazione di tubi e di serbatoi a tenuta di gas
FR7323681A FR2190946B1 (en:Method) 1972-07-01 1973-06-28
BR477273A BR7304772D0 (pt) 1972-07-01 1973-06-28 corrosao e estanques a gas processo para fabricar tubos e reservatorios resistentes
GB3080973A GB1420526A (en) 1972-07-01 1973-06-28 Method of manufacturing gas-tight tubes or reservoirs
SE7309131A SE384537B (sv) 1972-07-01 1973-06-28 Sett att framstella ror och behallare av metall eller metallegering som er korrosionsherdiga och gasteta vid temperaturer upp till ca +1000cc
BE132987A BE801747A (fr) 1972-07-01 1973-06-29 Procede permettant de realiser des u s et reservoirs etanches au gaz

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7209294A NL7209294A (en:Method) 1972-07-01 1972-07-01

Publications (1)

Publication Number Publication Date
NL7209294A true NL7209294A (en:Method) 1974-01-03

Family

ID=19816451

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7209294A NL7209294A (en:Method) 1972-07-01 1972-07-01

Country Status (10)

Country Link
JP (1) JPS4943880A (en:Method)
AU (1) AU5740573A (en:Method)
BE (1) BE801747A (en:Method)
BR (1) BR7304772D0 (en:Method)
DE (1) DE2330720C3 (en:Method)
FR (1) FR2190946B1 (en:Method)
GB (1) GB1420526A (en:Method)
IT (1) IT990832B (en:Method)
NL (1) NL7209294A (en:Method)
SE (1) SE384537B (en:Method)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3070578D1 (en) * 1979-08-16 1985-06-05 Ibm Process for applying sio2 films by chemical vapour deposition
DE3441056A1 (de) * 1984-11-09 1986-05-22 Siemens AG, 1000 Berlin und 8000 München Verfahren zur verminderung des verschleisses von bei der gasphasenabscheidung von silizium verwendeten quarzteilen

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3200015A (en) * 1962-09-10 1965-08-10 United Aircraft Corp Process for coating high temperature alloys
FR1524841A (fr) * 1966-06-01 1968-05-10 Siemens Ag Procédé pour la préparation de nitrure de silicium attaquable chimiquement sous forme de couches minces
US3637423A (en) * 1969-02-10 1972-01-25 Westinghouse Electric Corp Pyrolytic deposition of silicon nitride films
DE1957952A1 (de) * 1969-11-18 1971-05-27 Siemens Ag Siliciumnitridbeschichtung an Quarzwaenden fuer Diffusions- und Oxydationsreaktoren

Also Published As

Publication number Publication date
DE2330720A1 (de) 1974-01-10
DE2330720C3 (de) 1979-01-18
DE2330720B2 (de) 1978-05-24
BR7304772D0 (pt) 1974-08-15
BE801747A (fr) 1974-01-02
GB1420526A (en) 1976-01-07
IT990832B (it) 1975-07-10
FR2190946A1 (en:Method) 1974-02-01
AU5740573A (en) 1975-01-09
FR2190946B1 (en:Method) 1977-05-13
JPS4943880A (en:Method) 1974-04-25
SE384537B (sv) 1976-05-10

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Legal Events

Date Code Title Description
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