Classifications

• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
  • H01J3/02—Electron guns
  • H01J3/026—Eliminating deleterious effects due to thermal effects, electric or magnetic field
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
  • H01J37/02—Details
  • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
  • H01J37/06—Electron sources; Electron guns
  • H01J37/065—Construction of guns or parts thereof
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
  • H01J37/02—Details
  • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
  • H01J37/06—Electron sources; Electron guns
  • H01J37/07—Eliminating deleterious effects due to thermal effects or electric or magnetic fields
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
  • H01J37/02—Details
  • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
  • H01J37/241—High voltage power supply or regulation circuits

Landscapes

• Chemical & Material Sciences (AREA)
• Analytical Chemistry (AREA)
• Electron Sources, Ion Sources (AREA)
• Particle Accelerators (AREA)

Applications Claiming Priority (3)

Publications (1)

Family

ID=27287479

Family Applications (1)

Country Status (3)

• 1972
  • 1972-04-28 DE DE19722221139 patent/DE2221139B2/de active Pending
  • 1972-05-10 GB GB2196072A patent/GB1396038A/en not_active Expired
  • 1972-05-10 NL NL7206289A patent/NL7206289A/xx not_active Application Discontinuation

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