NL7206289A - - Google Patents

Info

Publication number
NL7206289A
NL7206289A NL7206289A NL7206289A NL7206289A NL 7206289 A NL7206289 A NL 7206289A NL 7206289 A NL7206289 A NL 7206289A NL 7206289 A NL7206289 A NL 7206289A NL 7206289 A NL7206289 A NL 7206289A
Authority
NL
Netherlands
Application number
NL7206289A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP46031815A external-priority patent/JPS5248434B1/ja
Priority claimed from JP46092063A external-priority patent/JPS5247660B2/ja
Application filed filed Critical
Publication of NL7206289A publication Critical patent/NL7206289A/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/026—Eliminating deleterious effects due to thermal effects, electric or magnetic field
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/065—Construction of guns or parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/07—Eliminating deleterious effects due to thermal effects or electric or magnetic fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/241—High voltage power supply or regulation circuits

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Particle Accelerators (AREA)
NL7206289A 1971-05-12 1972-05-10 NL7206289A (enrdf_load_html_response)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP46031815A JPS5248434B1 (enrdf_load_html_response) 1971-05-12 1971-05-12
JP5007471 1971-07-07
JP46092063A JPS5247660B2 (enrdf_load_html_response) 1971-11-17 1971-11-17

Publications (1)

Publication Number Publication Date
NL7206289A true NL7206289A (enrdf_load_html_response) 1972-11-14

Family

ID=27287479

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7206289A NL7206289A (enrdf_load_html_response) 1971-05-12 1972-05-10

Country Status (3)

Country Link
DE (1) DE2221139B2 (enrdf_load_html_response)
GB (1) GB1396038A (enrdf_load_html_response)
NL (1) NL7206289A (enrdf_load_html_response)

Also Published As

Publication number Publication date
DE2221139B2 (de) 1974-06-12
DE2221139A1 (de) 1972-11-23
GB1396038A (en) 1975-05-29

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Legal Events

Date Code Title Description
BV The patent application has lapsed