NL7203264A - - Google Patents

Info

Publication number
NL7203264A
NL7203264A NL7203264A NL7203264A NL7203264A NL 7203264 A NL7203264 A NL 7203264A NL 7203264 A NL7203264 A NL 7203264A NL 7203264 A NL7203264 A NL 7203264A NL 7203264 A NL7203264 A NL 7203264A
Authority
NL
Netherlands
Application number
NL7203264A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to NL7203264A priority Critical patent/NL7203264A/xx
Priority to DE2311578A priority patent/DE2311578A1/de
Priority to GB1133073A priority patent/GB1426243A/en
Priority to US00339881A priority patent/US3812365A/en
Priority to JP48028449A priority patent/JPS48103270A/ja
Publication of NL7203264A publication Critical patent/NL7203264A/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/143—Permanent magnetic lenses

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
NL7203264A 1972-03-10 1972-03-10 NL7203264A (zh)

Priority Applications (5)

Application Number Priority Date Filing Date Title
NL7203264A NL7203264A (zh) 1972-03-10 1972-03-10
DE2311578A DE2311578A1 (de) 1972-03-10 1973-03-08 Permanentmagnet-linsensystem
GB1133073A GB1426243A (en) 1972-03-10 1973-03-08 Permanent magnet lens
US00339881A US3812365A (en) 1972-03-10 1973-03-09 Permanent magnet lens system
JP48028449A JPS48103270A (zh) 1972-03-10 1973-03-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7203264A NL7203264A (zh) 1972-03-10 1972-03-10

Publications (1)

Publication Number Publication Date
NL7203264A true NL7203264A (zh) 1973-09-12

Family

ID=19815571

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7203264A NL7203264A (zh) 1972-03-10 1972-03-10

Country Status (5)

Country Link
US (1) US3812365A (zh)
JP (1) JPS48103270A (zh)
DE (1) DE2311578A1 (zh)
GB (1) GB1426243A (zh)
NL (1) NL7203264A (zh)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3984687A (en) * 1975-03-17 1976-10-05 International Business Machines Corporation Shielded magnetic lens and deflection yoke structure for electron beam column
GB1594465A (en) * 1977-03-23 1981-07-30 Nat Res Dev Electron beam apparatus
JPS5953658B2 (ja) * 1980-01-30 1984-12-26 株式会社日立製作所 電子レンズ
GB2192092A (en) * 1986-06-25 1987-12-31 Philips Electronic Associated Magnetic lens system
US6201251B1 (en) * 1998-08-28 2001-03-13 Nikon Corporation Compensation of space charge in a particle beam system
CN101461026B (zh) 2006-06-07 2012-01-18 Fei公司 与包含真空室的装置一起使用的滑动轴承
GB201000952D0 (en) * 2010-01-21 2010-03-10 Nfab Ltd A sub miniature low energy scanned beam microscope
JP6323943B2 (ja) * 2013-02-27 2018-05-16 株式会社Ｐａｒａｍ 電子レンズおよび電子ビーム装置

Also Published As

Publication number Publication date
US3812365A (en) 1974-05-21
GB1426243A (en) 1976-02-25
JPS48103270A (zh) 1973-12-25
DE2311578A1 (de) 1973-09-20

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