NL7110830A - - Google Patents
Info
- Publication number
- NL7110830A NL7110830A NL7110830A NL7110830A NL7110830A NL 7110830 A NL7110830 A NL 7110830A NL 7110830 A NL7110830 A NL 7110830A NL 7110830 A NL7110830 A NL 7110830A NL 7110830 A NL7110830 A NL 7110830A
- Authority
- NL
- Netherlands
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7029257A FR2105305A5 (enExample) | 1970-08-07 | 1970-08-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL7110830A true NL7110830A (enExample) | 1972-02-09 |
Family
ID=9059980
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL7110830A NL7110830A (enExample) | 1970-08-07 | 1971-08-05 |
Country Status (3)
| Country | Link |
|---|---|
| DE (1) | DE2139534A1 (enExample) |
| FR (1) | FR2105305A5 (enExample) |
| NL (1) | NL7110830A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4587432A (en) * | 1984-08-03 | 1986-05-06 | Applied Materials, Inc. | Apparatus for ion implantation |
-
1970
- 1970-08-07 FR FR7029257A patent/FR2105305A5/fr not_active Expired
-
1971
- 1971-08-05 NL NL7110830A patent/NL7110830A/xx unknown
- 1971-08-06 DE DE19712139534 patent/DE2139534A1/de active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| FR2105305A5 (enExample) | 1972-04-28 |
| DE2139534A1 (de) | 1972-02-10 |