DE2139534A1 - Ionenimplantationsvorrichtung - Google Patents

Ionenimplantationsvorrichtung

Info

Publication number
DE2139534A1
DE2139534A1 DE19712139534 DE2139534A DE2139534A1 DE 2139534 A1 DE2139534 A1 DE 2139534A1 DE 19712139534 DE19712139534 DE 19712139534 DE 2139534 A DE2139534 A DE 2139534A DE 2139534 A1 DE2139534 A1 DE 2139534A1
Authority
DE
Germany
Prior art keywords
ion
chamber
ion implantation
vacuum
ion source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19712139534
Other languages
German (de)
English (en)
Inventor
Jacques Palaiseau Trotel (Frank reich)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales SA
Original Assignee
Thomson CSF SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thomson CSF SA filed Critical Thomson CSF SA
Publication of DE2139534A1 publication Critical patent/DE2139534A1/de
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
DE19712139534 1970-08-07 1971-08-06 Ionenimplantationsvorrichtung Pending DE2139534A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7029257A FR2105305A5 (enExample) 1970-08-07 1970-08-07

Publications (1)

Publication Number Publication Date
DE2139534A1 true DE2139534A1 (de) 1972-02-10

Family

ID=9059980

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19712139534 Pending DE2139534A1 (de) 1970-08-07 1971-08-06 Ionenimplantationsvorrichtung

Country Status (3)

Country Link
DE (1) DE2139534A1 (enExample)
FR (1) FR2105305A5 (enExample)
NL (1) NL7110830A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0172675A1 (en) * 1984-08-03 1986-02-26 Applied Materials, Inc. Apparatus for ion implantation

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0172675A1 (en) * 1984-08-03 1986-02-26 Applied Materials, Inc. Apparatus for ion implantation

Also Published As

Publication number Publication date
FR2105305A5 (enExample) 1972-04-28
NL7110830A (enExample) 1972-02-09

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