NL7107593A - - Google Patents

Info

Publication number
NL7107593A
NL7107593A NL7107593A NL7107593A NL7107593A NL 7107593 A NL7107593 A NL 7107593A NL 7107593 A NL7107593 A NL 7107593A NL 7107593 A NL7107593 A NL 7107593A NL 7107593 A NL7107593 A NL 7107593A
Authority
NL
Netherlands
Application number
NL7107593A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL7107593A publication Critical patent/NL7107593A/xx

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • G01B9/02Interferometers
    • G01B9/02055Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056Passive reduction of errors
    • G01B9/02061Reduction or prevention of effects of tilts or misalignment
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • G01B9/02Interferometers
    • G01B9/02055Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02078Caused by ambiguity
    • G01B9/02079Quadrature detection, i.e. detecting relatively phase-shifted signals
    • G01B9/02081Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
NL7107593A 1970-08-10 1971-06-02 NL7107593A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US6247970A 1970-08-10 1970-08-10

Publications (1)

Publication Number Publication Date
NL7107593A true NL7107593A (de) 1972-02-14

Family

ID=22042773

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7107593A NL7107593A (de) 1970-08-10 1971-06-02

Country Status (4)

Country Link
BE (1) BE765248A (de)
DE (1) DE2123667A1 (de)
FR (1) FR2117014A5 (de)
NL (1) NL7107593A (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0611438B1 (de) * 1991-11-08 1996-07-03 British Technology Group Ltd Optische Messgeräte

Also Published As

Publication number Publication date
FR2117014A5 (de) 1972-07-21
BE765248A (fr) 1971-08-30
DE2123667A1 (de) 1972-02-17

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