NL7101804A - - Google Patents
Info
- Publication number
- NL7101804A NL7101804A NL7101804A NL7101804A NL7101804A NL 7101804 A NL7101804 A NL 7101804A NL 7101804 A NL7101804 A NL 7101804A NL 7101804 A NL7101804 A NL 7101804A NL 7101804 A NL7101804 A NL 7101804A
- Authority
- NL
- Netherlands
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/246—Replenishment of source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB678970 | 1970-02-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL7101804A true NL7101804A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1971-08-16 |
Family
ID=9820788
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL7101804A NL7101804A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1970-02-12 | 1971-02-11 |
Country Status (6)
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2916080C2 (de) * | 1979-04-20 | 1984-12-06 | Kišinevskij Gosudarstvennyj universitet imeni V.I. Lenina, Kišinev | Verfahren zum Molekular-Aufdampfen von Halbleiterschichten und Vorrichtung zur Durchführung dieses Verfahrens |
| GB2101638B (en) * | 1981-07-16 | 1985-07-24 | Ampex | Moveable cathodes/targets for high rate sputtering system |
| GB8425917D0 (en) * | 1984-10-13 | 1984-11-21 | Metal Box Plc | Evaporating metal |
| DE102015112135B4 (de) | 2015-07-24 | 2023-04-06 | Kennametal Inc. | Verdampferkörper mit Titanhydridbeschichtung, Verfahren zu dessen Herstellung und Verwendung |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2930879A (en) * | 1957-12-16 | 1960-03-29 | New York Air Brake Co | Vaporization of metals |
| NL6713713A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1967-10-10 | 1969-04-14 |
-
1970
- 1970-02-12 GB GB1354702D patent/GB1354702A/en not_active Expired
-
1971
- 1971-02-08 CA CA104,703A patent/CA947584A/en not_active Expired
- 1971-02-11 NL NL7101804A patent/NL7101804A/xx unknown
- 1971-02-11 DE DE19712106543 patent/DE2106543A1/de active Pending
- 1971-02-11 BE BE762825A patent/BE762825A/xx unknown
- 1971-02-11 FR FR7104673A patent/FR2079384B1/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| FR2079384B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1974-10-11 |
| DE2106543A1 (de) | 1971-08-26 |
| CA947584A (en) | 1974-05-21 |
| GB1354702A (en) | 1974-06-05 |
| FR2079384A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1971-11-12 |
| BE762825A (fr) | 1971-07-16 |