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Publication date
Priority claimed from JP45010810Aexternal-prioritypatent/JPS491062B1/ja
Priority claimed from JP45010809Aexternal-prioritypatent/JPS4830181B1/ja
Application filedfiledCritical
Publication of NL7100846ApublicationCriticalpatent/NL7100846A/xx
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
H—ELECTRICITY
H01—ELECTRIC ELEMENTS
H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/02—Details
H01J37/22—Optical, image processing or photographic arrangements associated with the tube
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Chemical & Material Sciences
(AREA)
Analytical Chemistry
(AREA)
Analysing Materials By The Use Of Radiation
(AREA)