NL7100105A - - Google Patents
Info
- Publication number
- NL7100105A NL7100105A NL7100105A NL7100105A NL7100105A NL 7100105 A NL7100105 A NL 7100105A NL 7100105 A NL7100105 A NL 7100105A NL 7100105 A NL7100105 A NL 7100105A NL 7100105 A NL7100105 A NL 7100105A
- Authority
- NL
- Netherlands
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0675—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating using interferometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02027—Two or more interferometric channels or interferometers
- G01B9/02028—Two or more reference or object arms in one interferometer
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7000386A FR2076237A5 (enExample) | 1970-01-07 | 1970-01-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL7100105A true NL7100105A (enExample) | 1971-07-09 |
Family
ID=9048677
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL7100105A NL7100105A (enExample) | 1970-01-07 | 1971-01-06 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US3708229A (enExample) |
| DE (1) | DE2100236A1 (enExample) |
| FR (1) | FR2076237A5 (enExample) |
| NL (1) | NL7100105A (enExample) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3804532A (en) * | 1972-08-03 | 1974-04-16 | Us Navy | Transparent film uniformity gauge |
| US4289403A (en) * | 1977-03-04 | 1981-09-15 | Isco, Inc. | Optical phase modulation instruments |
| US4147435A (en) * | 1977-06-30 | 1979-04-03 | International Business Machines Corporation | Interferometric process and apparatus for the measurement of the etch rate of opaque surfaces |
| US4310245A (en) * | 1980-03-19 | 1982-01-12 | Pritchard James L | Interferometer system |
| US4526471A (en) * | 1982-06-17 | 1985-07-02 | Bykov Anatoly P | Method for sensing spatial coordinate of article point and apparatus therefor |
| US4999014A (en) * | 1989-05-04 | 1991-03-12 | Therma-Wave, Inc. | Method and apparatus for measuring thickness of thin films |
| US5451480A (en) * | 1990-02-26 | 1995-09-19 | At&T Corp. | Artical fabrication utilizing lithographic processes |
| AU1557392A (en) * | 1991-03-04 | 1992-10-06 | Site Services, Inc. | Methods for photolithography and development analysis |
| US5216487A (en) * | 1991-05-22 | 1993-06-01 | Site Services, Inc. | Transmissive system for characterizing materials containing photoreactive constituents |
| US5830611A (en) * | 1992-03-05 | 1998-11-03 | Bishop; Kenneth P. | Use of diffracted light from latent images in photoresist for optimizing image contrast |
| US7030995B2 (en) * | 2001-12-10 | 2006-04-18 | Zygo Corporation | Apparatus and method for mechanical phase shifting interferometry |
| DE102015007054A1 (de) | 2015-06-02 | 2016-12-08 | Thomas Huth-Fehre | Verfahren und Vorrichtung zur Bestimmung der Dicke von dünnen organischen Schichten |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2718811A (en) * | 1952-07-31 | 1955-09-27 | Leitz Ernst Gmbh | Apparatus for determining the thickness of adsorbed supporting liquid layers |
-
1970
- 1970-01-07 FR FR7000386A patent/FR2076237A5/fr not_active Expired
- 1970-12-29 US US00102434A patent/US3708229A/en not_active Expired - Lifetime
-
1971
- 1971-01-05 DE DE19712100236 patent/DE2100236A1/de active Pending
- 1971-01-06 NL NL7100105A patent/NL7100105A/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| US3708229A (en) | 1973-01-02 |
| FR2076237A5 (enExample) | 1971-10-15 |
| DE2100236A1 (de) | 1971-07-22 |