FR2076237A5 - - Google Patents

Info

Publication number
FR2076237A5
FR2076237A5 FR7000386A FR7000386A FR2076237A5 FR 2076237 A5 FR2076237 A5 FR 2076237A5 FR 7000386 A FR7000386 A FR 7000386A FR 7000386 A FR7000386 A FR 7000386A FR 2076237 A5 FR2076237 A5 FR 2076237A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7000386A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales SA
Original Assignee
Thomson CSF SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thomson CSF SA filed Critical Thomson CSF SA
Priority to FR7000386A priority Critical patent/FR2076237A5/fr
Priority to US00102434A priority patent/US3708229A/en
Priority to DE19712100236 priority patent/DE2100236A1/de
Priority to NL7100105A priority patent/NL7100105A/xx
Application granted granted Critical
Publication of FR2076237A5 publication Critical patent/FR2076237A5/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0675—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02027—Two or more interferometric channels or interferometers
    • G01B9/02028—Two or more reference or object arms in one interferometer
FR7000386A 1970-01-07 1970-01-07 Expired FR2076237A5 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR7000386A FR2076237A5 (fr) 1970-01-07 1970-01-07
US00102434A US3708229A (en) 1970-01-07 1970-12-29 System for measuring optical path length across layers of small thickness
DE19712100236 DE2100236A1 (de) 1970-01-07 1971-01-05 Anordnung zur Messung von optischen Weglangen unter Anwendung lnterferometn scher Verfahren
NL7100105A NL7100105A (fr) 1970-01-07 1971-01-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7000386A FR2076237A5 (fr) 1970-01-07 1970-01-07

Publications (1)

Publication Number Publication Date
FR2076237A5 true FR2076237A5 (fr) 1971-10-15

Family

ID=9048677

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7000386A Expired FR2076237A5 (fr) 1970-01-07 1970-01-07

Country Status (4)

Country Link
US (1) US3708229A (fr)
DE (1) DE2100236A1 (fr)
FR (1) FR2076237A5 (fr)
NL (1) NL7100105A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2396286A1 (fr) * 1977-06-30 1979-01-26 Ibm Procede et systeme interferometriques pour la mesure de la vitesse de decapage de surfaces opaques

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3804532A (en) * 1972-08-03 1974-04-16 Us Navy Transparent film uniformity gauge
US4289403A (en) * 1977-03-04 1981-09-15 Isco, Inc. Optical phase modulation instruments
US4310245A (en) * 1980-03-19 1982-01-12 Pritchard James L Interferometer system
US4526471A (en) * 1982-06-17 1985-07-02 Bykov Anatoly P Method for sensing spatial coordinate of article point and apparatus therefor
US4999014A (en) * 1989-05-04 1991-03-12 Therma-Wave, Inc. Method and apparatus for measuring thickness of thin films
US5451480A (en) * 1990-02-26 1995-09-19 At&T Corp. Artical fabrication utilizing lithographic processes
WO1992015924A1 (fr) * 1991-03-04 1992-09-17 Site Services, Inc. Procedes de photolithographie et d'analyse de developpement
US5216487A (en) * 1991-05-22 1993-06-01 Site Services, Inc. Transmissive system for characterizing materials containing photoreactive constituents
US5830611A (en) * 1992-03-05 1998-11-03 Bishop; Kenneth P. Use of diffracted light from latent images in photoresist for optimizing image contrast
US7030995B2 (en) * 2001-12-10 2006-04-18 Zygo Corporation Apparatus and method for mechanical phase shifting interferometry
DE102015007054A1 (de) 2015-06-02 2016-12-08 Thomas Huth-Fehre Verfahren und Vorrichtung zur Bestimmung der Dicke von dünnen organischen Schichten

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2718811A (en) * 1952-07-31 1955-09-27 Leitz Ernst Gmbh Apparatus for determining the thickness of adsorbed supporting liquid layers

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2396286A1 (fr) * 1977-06-30 1979-01-26 Ibm Procede et systeme interferometriques pour la mesure de la vitesse de decapage de surfaces opaques

Also Published As

Publication number Publication date
US3708229A (en) 1973-01-02
NL7100105A (fr) 1971-07-09
DE2100236A1 (de) 1971-07-22

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Legal Events

Date Code Title Description
ST Notification of lapse