NL6818076A - - Google Patents

Info

Publication number
NL6818076A
NL6818076A NL6818076A NL6818076A NL6818076A NL 6818076 A NL6818076 A NL 6818076A NL 6818076 A NL6818076 A NL 6818076A NL 6818076 A NL6818076 A NL 6818076A NL 6818076 A NL6818076 A NL 6818076A
Authority
NL
Netherlands
Application number
NL6818076A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to NL6818076A priority Critical patent/NL6818076A/xx
Priority to DE19691959963 priority patent/DE1959963A1/de
Priority to GB1297128D priority patent/GB1297128A/en
Priority to FR6943740A priority patent/FR2026366A1/fr
Publication of NL6818076A publication Critical patent/NL6818076A/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Physical Vapour Deposition (AREA)
NL6818076A 1968-12-17 1968-12-17 NL6818076A (enExample)

Priority Applications (4)

Application Number Priority Date Filing Date Title
NL6818076A NL6818076A (enExample) 1968-12-17 1968-12-17
DE19691959963 DE1959963A1 (de) 1968-12-17 1969-11-28 Elektronenmikroskop
GB1297128D GB1297128A (enExample) 1968-12-17 1969-12-12
FR6943740A FR2026366A1 (enExample) 1968-12-17 1969-12-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL6818076A NL6818076A (enExample) 1968-12-17 1968-12-17

Publications (1)

Publication Number Publication Date
NL6818076A true NL6818076A (enExample) 1970-06-19

Family

ID=19805419

Family Applications (1)

Application Number Title Priority Date Filing Date
NL6818076A NL6818076A (enExample) 1968-12-17 1968-12-17

Country Status (4)

Country Link
DE (1) DE1959963A1 (enExample)
FR (1) FR2026366A1 (enExample)
GB (1) GB1297128A (enExample)
NL (1) NL6818076A (enExample)

Also Published As

Publication number Publication date
DE1959963A1 (de) 1970-07-09
GB1297128A (enExample) 1972-11-22
DE1959963B2 (enExample) 1979-03-15
FR2026366A1 (enExample) 1970-09-18

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Legal Events

Date Code Title Description
BI The patent application has been withdrawn