FR2026366A1 - - Google Patents
Info
- Publication number
- FR2026366A1 FR2026366A1 FR6943740A FR6943740A FR2026366A1 FR 2026366 A1 FR2026366 A1 FR 2026366A1 FR 6943740 A FR6943740 A FR 6943740A FR 6943740 A FR6943740 A FR 6943740A FR 2026366 A1 FR2026366 A1 FR 2026366A1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL6818076A NL6818076A (enExample) | 1968-12-17 | 1968-12-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| FR2026366A1 true FR2026366A1 (enExample) | 1970-09-18 |
Family
ID=19805419
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR6943740A Withdrawn FR2026366A1 (enExample) | 1968-12-17 | 1969-12-17 |
Country Status (4)
| Country | Link |
|---|---|
| DE (1) | DE1959963A1 (enExample) |
| FR (1) | FR2026366A1 (enExample) |
| GB (1) | GB1297128A (enExample) |
| NL (1) | NL6818076A (enExample) |
-
1968
- 1968-12-17 NL NL6818076A patent/NL6818076A/xx not_active Application Discontinuation
-
1969
- 1969-11-28 DE DE19691959963 patent/DE1959963A1/de not_active Withdrawn
- 1969-12-12 GB GB1297128D patent/GB1297128A/en not_active Expired
- 1969-12-17 FR FR6943740A patent/FR2026366A1/fr not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| NL6818076A (enExample) | 1970-06-19 |
| DE1959963A1 (de) | 1970-07-09 |
| GB1297128A (enExample) | 1972-11-22 |
| DE1959963B2 (enExample) | 1979-03-15 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |