NL6811056A - - Google Patents
Info
- Publication number
- NL6811056A NL6811056A NL6811056A NL6811056A NL6811056A NL 6811056 A NL6811056 A NL 6811056A NL 6811056 A NL6811056 A NL 6811056A NL 6811056 A NL6811056 A NL 6811056A NL 6811056 A NL6811056 A NL 6811056A
- Authority
- NL
- Netherlands
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
- B24B37/102—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being able to rotate freely due to a frictional contact with the lapping tool
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US65978067A | 1967-08-10 | 1967-08-10 |
Publications (1)
Publication Number | Publication Date |
---|---|
NL6811056A true NL6811056A (xx) | 1969-02-12 |
Family
ID=24646812
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NL6811056A NL6811056A (xx) | 1967-08-10 | 1968-08-02 |
Country Status (5)
Country | Link |
---|---|
US (1) | US3518798A (xx) |
DE (1) | DE1752940A1 (xx) |
FR (1) | FR1576184A (xx) |
GB (1) | GB1196875A (xx) |
NL (1) | NL6811056A (xx) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3708921A (en) * | 1970-08-17 | 1973-01-09 | Monsanto Co | Apparatus and process for polishing semiconductor or similar materials |
US3680265A (en) * | 1970-12-10 | 1972-08-01 | Corning Glass Works | Lapping machine |
US3731435A (en) * | 1971-02-09 | 1973-05-08 | Speedfam Corp | Polishing machine load plate |
US4020600A (en) * | 1976-08-13 | 1977-05-03 | Spitfire Tool & Machine Co., Inc. | Polishing fixture |
US4165584A (en) * | 1977-01-27 | 1979-08-28 | International Telephone And Telegraph Corporation | Apparatus for lapping or polishing materials |
US5123218A (en) * | 1990-02-02 | 1992-06-23 | Speedfam Corporation | Circumferential pattern finishing method |
US5187901A (en) * | 1990-02-02 | 1993-02-23 | Speedfam Corporation | Circumferential pattern finishing machine |
US5267418A (en) * | 1992-05-27 | 1993-12-07 | International Business Machines Corporation | Confined water fixture for holding wafers undergoing chemical-mechanical polishing |
US5908530A (en) * | 1995-05-18 | 1999-06-01 | Obsidian, Inc. | Apparatus for chemical mechanical polishing |
US5951373A (en) * | 1995-10-27 | 1999-09-14 | Applied Materials, Inc. | Circumferentially oscillating carousel apparatus for sequentially processing substrates for polishing and cleaning |
US5738574A (en) * | 1995-10-27 | 1998-04-14 | Applied Materials, Inc. | Continuous processing system for chemical mechanical polishing |
US5804507A (en) * | 1995-10-27 | 1998-09-08 | Applied Materials, Inc. | Radially oscillating carousel processing system for chemical mechanical polishing |
US7097544B1 (en) | 1995-10-27 | 2006-08-29 | Applied Materials Inc. | Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion |
US6110025A (en) * | 1997-05-07 | 2000-08-29 | Obsidian, Inc. | Containment ring for substrate carrier apparatus |
US6116990A (en) * | 1997-07-25 | 2000-09-12 | Applied Materials, Inc. | Adjustable low profile gimbal system for chemical mechanical polishing |
US6488565B1 (en) | 2000-08-29 | 2002-12-03 | Applied Materials, Inc. | Apparatus for chemical mechanical planarization having nested load cups |
US6709322B2 (en) * | 2001-03-29 | 2004-03-23 | Lam Research Corporation | Apparatus for aligning a surface of an active retainer ring with a wafer surface for chemical mechanical polishing |
US6942545B2 (en) * | 2001-04-20 | 2005-09-13 | Oriol, Inc. | Apparatus and method for sequentially polishing and loading/unloading semiconductor wafers |
CN105751059A (zh) * | 2016-04-29 | 2016-07-13 | 新昌县羽林街道宏博机械厂 | 一种轴承加工用端面研磨机 |
CN108203927A (zh) * | 2018-01-12 | 2018-06-26 | 佛山诗勤智能科技有限公司 | 一种新型桥梁施工装置 |
US11705354B2 (en) | 2020-07-10 | 2023-07-18 | Applied Materials, Inc. | Substrate handling systems |
CN116394140B (zh) * | 2023-05-30 | 2023-08-08 | 山西建邦集团铸造有限公司 | 一种金属铸造的表面处理装置及处理方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1100845A (en) * | 1913-04-08 | 1914-06-23 | Corp Of Ges Des Aechten Naxos Schmirgels Naxos Union Schmirgel Dampfwerk Frankfurt A M Julius Pfungs | Manufacture of grinding apparatus. |
FR863711A (fr) * | 1939-03-07 | 1941-04-08 | Perfectionnements apportés aux dispositifs pour le polissage automatique de matériaux industriels (métaux, minerais, roches, etc.) pour l'étude microscopique | |
US2968135A (en) * | 1958-04-07 | 1961-01-17 | Abrading Systems Company | Lapping machine |
US3090169A (en) * | 1961-05-11 | 1963-05-21 | Stephen A Boettcher | Lapping machine fixture |
US3377750A (en) * | 1965-08-16 | 1968-04-16 | Spitfire Tool & Machine Co Inc | Self-positioning combination work holder and dressing ring for flat lapping machines |
-
1967
- 1967-08-10 US US659780A patent/US3518798A/en not_active Expired - Lifetime
-
1968
- 1968-07-25 GB GB35587/68A patent/GB1196875A/en not_active Expired
- 1968-08-02 NL NL6811056A patent/NL6811056A/xx unknown
- 1968-08-09 DE DE19681752940 patent/DE1752940A1/de active Pending
- 1968-08-09 FR FR1576184D patent/FR1576184A/fr not_active Expired
Also Published As
Publication number | Publication date |
---|---|
GB1196875A (en) | 1970-07-01 |
DE1752940A1 (de) | 1971-04-15 |
US3518798A (en) | 1970-07-07 |
FR1576184A (xx) | 1969-07-25 |