NL6615531A - - Google Patents

Info

Publication number
NL6615531A
NL6615531A NL6615531A NL6615531A NL6615531A NL 6615531 A NL6615531 A NL 6615531A NL 6615531 A NL6615531 A NL 6615531A NL 6615531 A NL6615531 A NL 6615531A NL 6615531 A NL6615531 A NL 6615531A
Authority
NL
Netherlands
Application number
NL6615531A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL6615531A publication Critical patent/NL6615531A/xx

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/24Generating plasma
    • H05H1/46Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
NL6615531A 1965-12-22 1966-11-03 NL6615531A (en:Method)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEJ29683A DE1261608B (de) 1965-12-22 1965-12-22 Hochfrequenz-Plasmagenerator

Publications (1)

Publication Number Publication Date
NL6615531A true NL6615531A (en:Method) 1967-06-23

Family

ID=7203674

Family Applications (1)

Application Number Title Priority Date Filing Date
NL6615531A NL6615531A (en:Method) 1965-12-22 1966-11-03

Country Status (5)

Country Link
BE (1) BE688340A (en:Method)
DE (1) DE1261608B (en:Method)
FR (1) FR1499554A (en:Method)
LU (1) LU52055A1 (en:Method)
NL (1) NL6615531A (en:Method)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1256686A (en:Method) * 1969-08-22 1971-12-15
BE758571A (fr) * 1969-11-06 1971-04-16 Euratom Generateur de plasma a haute frequence
CA1159012A (en) * 1980-05-02 1983-12-20 Seitaro Matsuo Plasma deposition apparatus
FR2715019B1 (fr) * 1994-01-13 1996-04-05 Plasmion Dispositif pour former un plasma par application de micro-ondes afin de produire un faisceau d'ions.

Also Published As

Publication number Publication date
DE1261608B (de) 1968-02-22
LU52055A1 (en:Method) 1966-11-28
BE688340A (en:Method) 1967-03-31
FR1499554A (fr) 1967-10-27

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