LU52055A1 - - Google Patents
Info
- Publication number
- LU52055A1 LU52055A1 LU52055A LU52055A LU52055A1 LU 52055 A1 LU52055 A1 LU 52055A1 LU 52055 A LU52055 A LU 52055A LU 52055 A LU52055 A LU 52055A LU 52055 A1 LU52055 A1 LU 52055A1
- Authority
- LU
- Luxembourg
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Electromagnetism (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Plasma Technology (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DEJ29683A DE1261608B (de) | 1965-12-22 | 1965-12-22 | Hochfrequenz-Plasmagenerator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| LU52055A1 true LU52055A1 (en:Method) | 1966-11-28 |
Family
ID=7203674
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| LU52055A LU52055A1 (en:Method) | 1965-12-22 | 1966-09-28 |
Country Status (5)
| Country | Link |
|---|---|
| BE (1) | BE688340A (en:Method) |
| DE (1) | DE1261608B (en:Method) |
| FR (1) | FR1499554A (en:Method) |
| LU (1) | LU52055A1 (en:Method) |
| NL (1) | NL6615531A (en:Method) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1256686A (en:Method) * | 1969-08-22 | 1971-12-15 | ||
| BE758571A (fr) * | 1969-11-06 | 1971-04-16 | Euratom | Generateur de plasma a haute frequence |
| CA1159012A (en) * | 1980-05-02 | 1983-12-20 | Seitaro Matsuo | Plasma deposition apparatus |
| FR2715019B1 (fr) * | 1994-01-13 | 1996-04-05 | Plasmion | Dispositif pour former un plasma par application de micro-ondes afin de produire un faisceau d'ions. |
-
1965
- 1965-12-22 DE DEJ29683A patent/DE1261608B/de active Pending
-
1966
- 1966-09-28 LU LU52055A patent/LU52055A1/xx unknown
- 1966-10-17 BE BE688340D patent/BE688340A/xx unknown
- 1966-10-27 FR FR81761A patent/FR1499554A/fr not_active Expired
- 1966-11-03 NL NL6615531A patent/NL6615531A/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| DE1261608B (de) | 1968-02-22 |
| FR1499554A (fr) | 1967-10-27 |
| BE688340A (en:Method) | 1967-03-31 |
| NL6615531A (en:Method) | 1967-06-23 |