NL6605144A - - Google Patents
Info
- Publication number
- NL6605144A NL6605144A NL6605144A NL6605144A NL6605144A NL 6605144 A NL6605144 A NL 6605144A NL 6605144 A NL6605144 A NL 6605144A NL 6605144 A NL6605144 A NL 6605144A NL 6605144 A NL6605144 A NL 6605144A
- Authority
- NL
- Netherlands
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/32055—Deposition of semiconductive layers, e.g. poly - or amorphous silicon layers
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL6605144A NL6605144A (en) | 1966-04-16 | 1966-04-16 | |
DE1967N0030327 DE1619981B2 (en) | 1966-04-16 | 1967-04-12 | METHOD OF APPLYING POLYCRYSTALLINE COATINGS OF ELEMENTS TO SUBSTRATES |
GB1701867A GB1186892A (en) | 1966-04-16 | 1967-04-13 | Improvements in and relating to Methods of Providing Polycrystalline Layers |
FR102978A FR1519260A (en) | 1966-04-16 | 1967-04-17 | Process for applying polycrystalline layers of elementary substances to substrates |
US298624A US3930067A (en) | 1966-04-16 | 1972-10-18 | Method of providing polycrystalline layers of elementtary substances on substrates |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL6605144A NL6605144A (en) | 1966-04-16 | 1966-04-16 |
Publications (1)
Publication Number | Publication Date |
---|---|
NL6605144A true NL6605144A (en) | 1967-10-17 |
Family
ID=19796312
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NL6605144A NL6605144A (en) | 1966-04-16 | 1966-04-16 |
Country Status (3)
Country | Link |
---|---|
DE (1) | DE1619981B2 (en) |
GB (1) | GB1186892A (en) |
NL (1) | NL6605144A (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2204065A (en) * | 1987-02-10 | 1988-11-02 | Plessey Co Plc | Vapour deposited metal films for integrated circuit manufacture |
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1966
- 1966-04-16 NL NL6605144A patent/NL6605144A/xx unknown
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1967
- 1967-04-12 DE DE1967N0030327 patent/DE1619981B2/en active Granted
- 1967-04-13 GB GB1701867A patent/GB1186892A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
DE1619981A1 (en) | 1970-03-26 |
GB1186892A (en) | 1970-04-08 |
DE1619981B2 (en) | 1976-04-29 |