NL6504158A - - Google Patents

Info

Publication number
NL6504158A
NL6504158A NL6504158A NL6504158A NL6504158A NL 6504158 A NL6504158 A NL 6504158A NL 6504158 A NL6504158 A NL 6504158A NL 6504158 A NL6504158 A NL 6504158A NL 6504158 A NL6504158 A NL 6504158A
Authority
NL
Netherlands
Application number
NL6504158A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL6504158A publication Critical patent/NL6504158A/xx

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/07—Investigating materials by wave or particle radiation secondary emission
    • G01N2223/076—X-ray fluorescence

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
NL6504158A 1964-04-01 1965-04-01 NL6504158A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
BE646014A BE646014A (fr) 1964-04-01 1964-04-01

Publications (1)

Publication Number Publication Date
NL6504158A true NL6504158A (fr) 1965-10-04

Family

ID=3846261

Family Applications (1)

Application Number Title Priority Date Filing Date
NL6504158A NL6504158A (fr) 1964-04-01 1965-04-01

Country Status (6)

Country Link
US (1) US3400265A (fr)
BE (1) BE646014A (fr)
DE (1) DE1960083U (fr)
LU (1) LU48050A1 (fr)
NL (1) NL6504158A (fr)
SE (1) SE306436B (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4008683A (en) * 1973-07-16 1977-02-22 Varian Associates Machine for treating wafer-form items
US4033904A (en) * 1974-03-22 1977-07-05 Varian Associates, Inc. Interchangeable specimen trays and apparatus for a vacuum type testing system
DK135257B (da) * 1975-07-09 1977-03-21 Danfysik As Apparat til ion-implantation i emner, især skiver af halvledermateriale.

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3073951A (en) * 1960-07-28 1963-01-15 Combustion Eng Vacuum lock
US3099743A (en) * 1961-07-07 1963-07-30 Ichinokawa Takeo Combined electron probe microanalyzer and x-ray diffraction instrument

Also Published As

Publication number Publication date
BE646014A (fr) 1964-10-01
US3400265A (en) 1968-09-03
DE1960083U (de) 1967-05-11
LU48050A1 (fr) 1965-04-23
SE306436B (fr) 1968-11-25

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