NL294272A - - Google Patents
Info
- Publication number
- NL294272A NL294272A NL294272DA NL294272A NL 294272 A NL294272 A NL 294272A NL 294272D A NL294272D A NL 294272DA NL 294272 A NL294272 A NL 294272A
- Authority
- NL
- Netherlands
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/10—Lenses
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
- H01J29/58—Arrangements for focusing or reflecting ray or beam
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
- H01J29/58—Arrangements for focusing or reflecting ray or beam
- H01J29/64—Magnetic lenses
- H01J29/66—Magnetic lenses using electromagnetic means only
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Electron Beam Exposure (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL294272 | 1963-06-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL294272A true NL294272A (nl) |
Family
ID=19754796
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL294272D NL294272A (nl) | 1963-06-19 |
Country Status (4)
| Country | Link |
|---|---|
| BE (1) | BE649408A (nl) |
| DE (1) | DE1489163A1 (nl) |
| GB (1) | GB1006389A (nl) |
| NL (1) | NL294272A (nl) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5842935B2 (ja) * | 1978-04-07 | 1983-09-22 | 日本電子株式会社 | 走査電子顕微鏡等の対物レンズ |
| GB2140196A (en) * | 1983-05-05 | 1984-11-21 | Cambridge Instr Ltd | Particle beam lenses |
-
0
- NL NL294272D patent/NL294272A/xx unknown
-
1964
- 1964-06-16 DE DE19641489163 patent/DE1489163A1/de active Pending
- 1964-06-16 GB GB2491464A patent/GB1006389A/en not_active Expired
- 1964-06-17 BE BE649408A patent/BE649408A/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| GB1006389A (en) | 1965-09-29 |
| BE649408A (nl) | 1964-12-17 |
| DE1489163A1 (de) | 1969-03-13 |