NL293887A - - Google Patents

Info

Publication number
NL293887A
NL293887A NL293887DA NL293887A NL 293887 A NL293887 A NL 293887A NL 293887D A NL293887D A NL 293887DA NL 293887 A NL293887 A NL 293887A
Authority
NL
Netherlands
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Publication of NL293887A publication Critical patent/NL293887A/xx

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40Oxides
    • C23C16/401Oxides containing silicon
    • C23C16/402Silicon dioxide
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01Manufacture or treatment
    • H10D84/02Manufacture or treatment characterised by using material-based technologies
    • H10D84/03Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
    • H10P14/24
    • H10P14/274
    • H10P14/2905
    • H10P14/3411
    • H10P14/3442
    • H10P14/3444
    • H10P14/6309
    • H10P14/6322
    • H10P14/6334
    • H10P14/6682
    • H10P14/69215
    • H10P50/242
    • H10P95/00

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Drying Of Semiconductors (AREA)
NL293887D 1962-06-11 NL293887A (enExample)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US20155662A 1962-06-11 1962-06-11

Publications (1)

Publication Number Publication Date
NL293887A true NL293887A (enExample)

Family

ID=22746310

Family Applications (2)

Application Number Title Priority Date Filing Date
NL293887D NL293887A (enExample) 1962-06-11
NL63293887A NL142525B (nl) 1962-06-11 1963-06-11 Werkwijze ter vervaardiging van halfgeleiderlichamen, alsmede met deze werkwijze verkregen halfgeleiderlichamen.

Family Applications After (1)

Application Number Title Priority Date Filing Date
NL63293887A NL142525B (nl) 1962-06-11 1963-06-11 Werkwijze ter vervaardiging van halfgeleiderlichamen, alsmede met deze werkwijze verkregen halfgeleiderlichamen.

Country Status (4)

Country Link
BE (1) BE631658A (enExample)
DE (1) DE1521834B2 (enExample)
GB (1) GB1047942A (enExample)
NL (2) NL142525B (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2218567A (en) * 1988-05-13 1989-11-15 Philips Electronic Associated A method of forming an epitaxial layer of silicon
JPH06232099A (ja) * 1992-09-10 1994-08-19 Mitsubishi Electric Corp 半導体装置の製造方法,半導体装置の製造装置,半導体レーザの製造方法,量子細線構造の製造方法,及び結晶成長方法
GB2299894B (en) * 1992-09-10 1997-01-22 Mitsubishi Electric Corp Method for producing a semiconductor laser device
EP1001458A1 (en) * 1998-11-09 2000-05-17 STMicroelectronics S.r.l. Isotropic etching of silicon using hydrogen chloride

Also Published As

Publication number Publication date
GB1047942A (en) 1966-11-09
NL142525B (nl) 1974-06-17
BE631658A (enExample)
DE1521834B2 (de) 1971-10-07
DE1521834A1 (de) 1970-01-08

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