NL278654A - - Google Patents

Info

Publication number
NL278654A
NL278654A NL278654DA NL278654A NL 278654 A NL278654 A NL 278654A NL 278654D A NL278654D A NL 278654DA NL 278654 A NL278654 A NL 278654A
Authority
NL
Netherlands
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Publication of NL278654A publication Critical patent/NL278654A/xx

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04Coating on selected surface areas, e.g. using masks
    • C23C14/042Coating on selected surface areas, e.g. using masks using masks
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C21/00Alloys based on aluminium
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14Metallic material, boron or silicon
    • C23C14/16Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58After-treatment
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58After-treatment
    • C23C14/5806Thermal treatment
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Thermal Sciences (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Bipolar Transistors (AREA)
NL278654D 1961-06-08 NL278654A (US20080293856A1-20081127-C00150.png)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US115663A US3167462A (en) 1961-06-08 1961-06-08 Method of forming alloyed regions in semiconductor bodies

Publications (1)

Publication Number Publication Date
NL278654A true NL278654A (US20080293856A1-20081127-C00150.png)

Family

ID=22362724

Family Applications (1)

Application Number Title Priority Date Filing Date
NL278654D NL278654A (US20080293856A1-20081127-C00150.png) 1961-06-08

Country Status (6)

Country Link
US (1) US3167462A (US20080293856A1-20081127-C00150.png)
BE (1) BE618421A (US20080293856A1-20081127-C00150.png)
DE (1) DE1236082B (US20080293856A1-20081127-C00150.png)
GB (1) GB1009355A (US20080293856A1-20081127-C00150.png)
NL (1) NL278654A (US20080293856A1-20081127-C00150.png)
SE (1) SE305262B (US20080293856A1-20081127-C00150.png)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0915501B1 (en) * 1994-08-05 2003-02-26 International Business Machines Corporation Method of forming a damascene structure with WGe polishing stop

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA537909A (en) * 1957-03-05 Westinghouse Electric Corporation Method of producing junctions in semi-conductors
US2629672A (en) * 1949-07-07 1953-02-24 Bell Telephone Labor Inc Method of making semiconductive translating devices
NL98697C (US20080293856A1-20081127-C00150.png) * 1952-08-20
US2765245A (en) * 1952-08-22 1956-10-02 Gen Electric Method of making p-n junction semiconductor units
BE523638A (US20080293856A1-20081127-C00150.png) * 1952-10-20
NL191674A (US20080293856A1-20081127-C00150.png) * 1953-10-26
DE1057845B (de) * 1954-03-10 1959-05-21 Licentia Gmbh Verfahren zur Herstellung von einkristallinen halbleitenden Verbindungen
BE547665A (US20080293856A1-20081127-C00150.png) * 1955-06-28
BE549320A (US20080293856A1-20081127-C00150.png) * 1955-09-02
BE562490A (US20080293856A1-20081127-C00150.png) * 1956-03-05 1900-01-01
DE1075223B (de) * 1957-05-03 1960-02-11 Telefunken GmbH Berlin Verfahren zum Auflegicren ^mcs eutektischen Legierungsmatenals auf einen Halbleiterkörper
DE1062823B (de) * 1957-07-13 1959-08-06 Telefunken Gmbh Verfahren zur Herstellung von Kristalloden des Legierungstyps

Also Published As

Publication number Publication date
DE1236082B (de) 1967-03-09
GB1009355A (en) 1965-11-10
US3167462A (en) 1965-01-26
SE305262B (US20080293856A1-20081127-C00150.png) 1968-10-21
BE618421A (fr) 1962-10-01

Similar Documents

Publication Publication Date Title
BE601846A (US20080293856A1-20081127-C00150.png)
BE601970A (US20080293856A1-20081127-C00150.png)
BE664794A (US20080293856A1-20081127-C00150.png)
BE638379A (US20080293856A1-20081127-C00150.png)
NL278654A (US20080293856A1-20081127-C00150.png)
BE632612A (US20080293856A1-20081127-C00150.png)
BE626676A (US20080293856A1-20081127-C00150.png)
BE626509A (US20080293856A1-20081127-C00150.png)
BE626462A (US20080293856A1-20081127-C00150.png)
BE626119A (US20080293856A1-20081127-C00150.png)
BE625651A (US20080293856A1-20081127-C00150.png)
BE625340A (US20080293856A1-20081127-C00150.png)
BE625142A (US20080293856A1-20081127-C00150.png)
BE624246A (US20080293856A1-20081127-C00150.png)
BE624060A (US20080293856A1-20081127-C00150.png)
BE623075A (US20080293856A1-20081127-C00150.png)
BE622503A (US20080293856A1-20081127-C00150.png)
BE622210A (US20080293856A1-20081127-C00150.png)
BE622181A (US20080293856A1-20081127-C00150.png)
BE620244A (US20080293856A1-20081127-C00150.png)
BE602240A (US20080293856A1-20081127-C00150.png)
BE602153A (US20080293856A1-20081127-C00150.png)
BE602045A (US20080293856A1-20081127-C00150.png)
BE601847A (US20080293856A1-20081127-C00150.png)
BE601844A (US20080293856A1-20081127-C00150.png)