NL249198A - - Google Patents

Info

Publication number: NL249198A
Authority: NL; Netherlands

Application number

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1959-03-09

Publication of NL249198A publication Critical patent/NL249198A/xx

Classifications

- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5806—Thermal treatment
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5893—Mixing of deposited material
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Landscapes

Chemical & Material Sciences (AREA)
Engineering & Computer Science (AREA)
Organic Chemistry (AREA)
Metallurgy (AREA)
Mechanical Engineering (AREA)
Materials Engineering (AREA)
Chemical Kinetics & Catalysis (AREA)
Physics & Mathematics (AREA)
Manufacturing & Machinery (AREA)
Thermal Sciences (AREA)
Power Engineering (AREA)
Microelectronics & Electronic Packaging (AREA)
Computer Hardware Design (AREA)
General Physics & Mathematics (AREA)
Condensed Matter Physics & Semiconductors (AREA)
Electrodes Of Semiconductors (AREA)
Contacts (AREA)
Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)

NL249198D 1959-03-09 NL249198A (lt)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
DEL32663A DE1152865B (de)	1959-03-09	1959-03-09	Verfahren zum Herstellen von Legierungs-kontakten durch Anlegieren von Gold oder ueberwiegend Gold enthaltenden Legierungen an Siliziumkoerper

Publications (1)

Publication Number	Publication Date
NL249198A true NL249198A (lt)

Family

ID=7265998

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
NL249198D NL249198A (lt)	1959-03-09

Country Status (3)

Country	Link
DE (1)	DE1152865B (lt)
GB (1)	GB925042A (lt)
NL (1)	NL249198A (lt)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE1281035B (de) *	1965-01-22	1968-10-24	Itt Ind Ges Mit Beschraenkter	Verfahren zum Anbringen einer Kontaktschicht auf einem Siliziumhalbleiterkoerper
DE1287400C2 (de) *	1965-03-02	1973-09-13	Siemens AG, Berlin und München, 8000 München	Verfahren zum vakuumaufdampfen einer metallschicht, insbesondere aus gold

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
BE544843A (lt) *	1955-02-25
BE547665A (lt) *	1955-06-28

0
- NL NL249198D patent/NL249198A/xx unknown
1959
- 1959-03-09 DE DEL32663A patent/DE1152865B/de active Pending
1960
- 1960-03-09 GB GB831760A patent/GB925042A/en not_active Expired

Also Published As

Publication number	Publication date
GB925042A (en)	1963-05-01
DE1152865B (de)	1963-08-14

Publication	Publication Date	Title
BE584924A (lt)	1960-05-23
CS97860B5 (lt)	1960-12-15
AT222246B (lt)	1962-07-10
DE1253063C2 (lt)	1968-05-02
BE578879A (lt)
BE576542A (lt)
NL248375A (lt)
NL243051A (lt)
NL128899C (lt)
NL126966C (lt)
NL108654C (lt)
NL256428A (lt)
NL249198A (lt)
BE620398A (lt)	1963-01-18
BE589014A (lt)
BE586035A (lt)
BE584079A (lt)
BE585897A (lt)
BE585827A (lt)
BE585394A (lt)	1960-04-01
BE583407A (lt)
BE585191A (lt)
BE585093A (lt)
BE584331A (lt)
BE585940A (lt)