NL239786A - - Google Patents

Info

Publication number
NL239786A
NL239786A NL239786DA NL239786A NL 239786 A NL239786 A NL 239786A NL 239786D A NL239786D A NL 239786DA NL 239786 A NL239786 A NL 239786A
Authority
NL
Netherlands
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Publication of NL239786A publication Critical patent/NL239786A/xx

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02365Forming inorganic semiconducting materials on a substrate
    • H01L21/02518Deposited layers
    • H01L21/02521Materials
    • H01L21/02524Group 14 semiconducting materials
    • H01L21/02532Silicon, silicon germanium, germanium
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/34Gas-filled discharge tubes operating with cathodic sputtering
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02365Forming inorganic semiconducting materials on a substrate
    • H01L21/02612Formation types
    • H01L21/02617Deposition types
    • H01L21/02631Physical deposition at reduced pressure, e.g. MBE, sputtering, evaporation

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
NL239786D 1959-06-02 NL239786A (enrdf_load_html_response)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL1276208X 1959-06-02

Publications (1)

Publication Number Publication Date
NL239786A true NL239786A (enrdf_load_html_response)

Family

ID=19872811

Family Applications (2)

Application Number Title Priority Date Filing Date
NL239786D NL239786A (enrdf_load_html_response) 1959-06-02
NL110479D NL110479C (enrdf_load_html_response) 1959-06-02

Family Applications After (1)

Application Number Title Priority Date Filing Date
NL110479D NL110479C (enrdf_load_html_response) 1959-06-02

Country Status (2)

Country Link
DE (1) DE1276208B (enrdf_load_html_response)
NL (2) NL110479C (enrdf_load_html_response)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE764927C (de) * 1939-02-22 1951-08-06 Bosch Gmbh Robert Verfahren zur Verdampfung im Vakuum
DE860973C (de) * 1944-08-21 1952-12-29 Siemens Ag Detektor
DE896827C (de) * 1951-09-08 1953-11-16 Licentia Gmbh Verfahren zur formgebenden Bearbeitung von kristallenen Halbleiterkoerpern
DE1011528B (de) * 1954-05-17 1957-07-04 Licentia Gmbh Verfahren zur Oberflaechenbehandlung eines Kristalles aus einer halbleitenden Verbindung
DE1030463B (de) * 1954-07-31 1958-05-22 Licentia Gmbh Verfahren zur Herstellung von Halbleiterkristallen mit p-n-UEbergaengen

Also Published As

Publication number Publication date
DE1276208B (de) 1968-08-29
NL110479C (enrdf_load_html_response)

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