NL2030459B1 - MEMS Electromagnetic Motor and Manufacturing Method Thereof - Google Patents
MEMS Electromagnetic Motor and Manufacturing Method Thereof Download PDFInfo
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- NL2030459B1 NL2030459B1 NL2030459A NL2030459A NL2030459B1 NL 2030459 B1 NL2030459 B1 NL 2030459B1 NL 2030459 A NL2030459 A NL 2030459A NL 2030459 A NL2030459 A NL 2030459A NL 2030459 B1 NL2030459 B1 NL 2030459B1
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K99/00—Subject matter not provided for in other groups of this subclass
- H02K99/20—Motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K1/00—Details of the magnetic circuit
- H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
- H02K1/12—Stationary parts of the magnetic circuit
- H02K1/14—Stator cores with salient poles
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K1/00—Details of the magnetic circuit
- H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
- H02K1/22—Rotating parts of the magnetic circuit
- H02K1/27—Rotor cores with permanent magnets
- H02K1/2706—Inner rotors
- H02K1/272—Inner rotors the magnetisation axis of the magnets being perpendicular to the rotor axis
- H02K1/274—Inner rotors the magnetisation axis of the magnets being perpendicular to the rotor axis the rotor consisting of two or more circumferentially positioned magnets
- H02K1/2753—Inner rotors the magnetisation axis of the magnets being perpendicular to the rotor axis the rotor consisting of two or more circumferentially positioned magnets the rotor consisting of magnets or groups of magnets arranged with alternating polarity
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K15/00—Methods or apparatus specially adapted for manufacturing, assembling, maintaining or repairing of dynamo-electric machines
- H02K15/02—Methods or apparatus specially adapted for manufacturing, assembling, maintaining or repairing of dynamo-electric machines of stator or rotor bodies
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K15/00—Methods or apparatus specially adapted for manufacturing, assembling, maintaining or repairing of dynamo-electric machines
- H02K15/02—Methods or apparatus specially adapted for manufacturing, assembling, maintaining or repairing of dynamo-electric machines of stator or rotor bodies
- H02K15/03—Methods or apparatus specially adapted for manufacturing, assembling, maintaining or repairing of dynamo-electric machines of stator or rotor bodies having permanent magnets
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K3/00—Details of windings
- H02K3/04—Windings characterised by the conductor shape, form or construction, e.g. with bar conductors
- H02K3/18—Windings for salient poles
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- Manufacturing & Machinery (AREA)
- Micromachines (AREA)
Abstract
Disclosed is a MEMS electromagnetic motor and a manufacturing method thereof, which comprises a stator and a rotor, wherein the centre of the stator is provided with a first through hole for installing the rotor, and the rotor is rotatably connected with the stator, wherein the stator comprises a first silicon substrate, a soft magnetic core and a plurality of solenoids and the rotor comprises a second silicon substrate, a rotating shaft and a plurality of permanent magnets. By radially arranging the windings of the stator and rotors of the electromagnetic motor, the electromagnetic motor has the advantages of high winding coil density and large cross-sectional area, and can obtain higher inductance value in the same plane area, and the driving current required by the same output torque is smaller and the overall efficiency is higher. At the same time, the silicon substrate can radiate and protect the soft magnetic core and solenoids, so that the electromagnetic motor has good heat dissipation and impact resistance.
Description
MEMS Electromagnetic Motor and Manufacturing Method Thereof
TECHNICAL FIELD The invention relates to the technical field of micro-electromechanical systems (MEMS), more specifically, to a MEMS electromagnetic motor and a manufacturing method thereof.
BACKGROUND With the development of all kinds of complex electromechanical systems towards high integration and complexity, it is necessary to integrate more components in a smaller volume. In addition to developing high-density integration technology, it is also a necessary way to develop miniaturized devices to reduce the overall volume and weight of the system.
As a kind of micro power component, micromotor has the characteristics of small size, light weight and low power consumption, so it is widely used in the information field, medical field, aerospace field and military field. At present, most of the micro-motors in production still adopt the form of micro-precision machining, and the technology is mature, but the requirements for machining equipment are high, which leads to the relatively high price of micro-machining At the same time, the machining form of precision machining also limits the development of micromotor to smaller size. MEMS processing technology is a kind of micron-scale processing technology, which originated from integrated circuit processing technology at the earliest.
Compared with micro-precision processing technology, this technology can make devices smaller in size, more suitable for mass production and lower in cost. It can be seen that the characteristics of MEMS technology just meet the requirements of miniaturization of electromechanical system, and the design and development of micro-motor by using MEMS technology is a research hotspot in recent years.
MEMS micromotors can be divided into electrostatic micromotors, electromagnetic micromotors, piezoelectric micromotors, memory alloy micromotors and magnetostrictive micromotors according to their working principles. Compared with other motor driving principles, electromagnetic micromotor has the characteristics of high rotating speed, large driving torque, low driving voltage, stable and reliable operation, easy control, easy application and so on.
However, at present, the existing miniature electromagnetic motors are generally of axial distribution structure, that is, the rotor and stator are distributed along the axial direction, which is different from the radial distribution of conventional motors. The disadvantage of this axial structure is that the number of cail turns is limited, and the magnetic leakage of the whole structure is serious, which leads to the limited output torque of the motor and the low overall efficiency, which seriously affects its marketability.
SUMMARY The invention provides a MEMS electromagnetic motor which overcomes the above problems or at least partially solves the above problems and a manufacturing method thereof.
On one hand, the invention provides a MEMS electromagnetic motor, which comprises a stator and a rotor, wherein the centre of the stator is provided with a first through hole for installing the rotor, and the rotor is rotatably connected with the stator; among them, the stator comprises a first silicon substrate, a soft magnetic core and a plurality of solenoids, wherein the soft magnetic core is wrapped inside the first silicon substrate, and the soft magnetic core is provided with a plurality of protrusions which are arranged around the first through hole; the first silicon substrate is provided with a plurality of spiral channels, and the protrusions respectively pass through the centres of the spiral channels, and the solenoids are respectively arranged in the spiral channels; The rotor comprises a second silicon substrate, a rotating shaft and a plurality of permanent magnets, wherein, the centre of the second silicon substrate is provided with a second through hole, a plurality of grooves are arranged around the second through hole, a plurality of permanent magnets are arranged in the grooves, and the rotating shaft penetrates into the second through hole.
Further, the first silicon substrate is divided into an upper silicon substrate and a lower silicon substrate, and the soft magnetic core is divided into an upper core and a lower core, and the upper core and the lower core have the same shape; The lower surface of the upper silicon substrate is provided with a ore groove corresponding to the shape of the upper core, the upper surface of the lower silicon substrate is provided with a core groove corresponding to the shape of the lower core, the upper core and the lower core are respectively arranged in the corresponding core grooves, and the lower surface of the upper silicon substrate and the upper surface of the lower silicon substrate are bonded to each other so that the lower surface of the upper core and the upper surface of the lower core are aligned with each other.
Further, the spiral channels include a plurality of first horizontal grooves, a plurality of second horizontal grooves and a plurality of vertical through holes; the first horizontal grooves are arranged on the upper surface of the first silicon substrate, the second horizontal grooves are arranged on the lower surface of the first silicon substrate, and the vertical through holes run through the upper surface and the lower surface of the first silicon substrate; the beginning and end of any first horizontal groove in the spiral channels are respectively communicated with two vertical through holes, and the two vertical through holes are respectively communicated with two adjacent second horizontal grooves.
Furthermore, each solenoid in the stator also includes two pins, and each spiral channel also includes two pin slots;
The two pin slots are arranged on the upper surface of the first silicon substrate, and are respectively communicated with the beginning and the end of the spiral channel, and the two pins are respectively arranged in the two pin slots.
Further, the soft magnetic core is made of iron-nickel alloy material or iron-cobalt alloy material.
Further, the plurality of permanent magnets are made of Neodymium iron boron material, and the rotating shaft is made of iron-nickel alloy material.
On the other hand, the invention provides a manufacturing method of MEMS electromagnetic motor, which comprises the following steps: manufacturing a stator and a rotor respectively, and assembling the stator and the rotor to obtain the MEMS electromagnetic motor; among them, the manufacturing process of the stator includes: step 1, respectively manufacturing an upper silicon substrate and a lower silicon substrate of the first silicon substrate; among them, manufacturing the upper silicon substrate includes: performing a first thermal oxidation on a first silicon wafer with a first pre-set thickness; according to the structure of the spiral channels, a plurality of first horizontal grooves in parallel, upper half parts of a plurality of vertical through holes and core grooves are deeply etched on the upper surface, the inner surface and the lower surface of the first silicon wafer after the first oxidation respectively; performing a second thermal oxidation on the first silicon wafer obtained by deep etching of silicon to obtain the upper silicon substrate; manufacturing the lower silicon substrate includes: performing a first thermal oxidation on a second silicon wafer with a first pre-set thickness; according to the structure of the spiral channels, the core groove, the lower half of a plurality of vertical through holes and a plurality of second horizontal grooves in parallel are deeply etched on the upper surface, the inner surface and the lower surface of the second silicon wafer after the first oxidation, respectively; performing a second thermal oxidation on the second silicon wafer to obtain the lower silicon substrate; step 2, electroplating in the core grooves of the upper silicon substrate and the lower silicon substrate to form an upper core and a lower core respectively; step 3, aligning the upper surface of the upper silicon substrate and the lower surface of the lower silicon substrate with each other, bonding the upper silicon substrate and the lower silicon substrate at low temperature, and forming the spiral channel in the bonded upper silicon substrate and the lower silicon substrate; step 4, electroplating in the spiral channel to form solenoids;
step 5, according to the shape of the second silicon substrate, machining a first through hole in the centre of the bonded upper silicon substrate and lower silicon substrate, thus obtaining the stator; the manufacturing process of the rotor includes: step 1, manufacturing a second silicon substrate: according to the shapes of the rotating shaft and a plurality of permanent magnets, deep etching the second through hole and a plurality of grooves on the third silicon wafer after the first thermal oxidation to obtain the second silicon substrate; step 2, electroplating the plurality of permanent magnets in a plurality of grooves, and magnetizing the plurality of permanent magnets to form permanent magnet characteristics; and step 3, inserting the rotating shaft into the second through hole to obtain the rotor.
Further, in the step 2 of manufacturing the stator, electroplating to form an upper core in the core groove of the upper silicon substrate specifically includes: after aligning the metal mask with the core groove pattern with the core groove on the lower surface of the upper silicon substrate, adhering the metal mask to the lower surface of the upper silicon substrate; magnetically sputtering metal nickel or metal cobalt with a second pre-set thickness on the lower surface of the upper silicon substrate as a seed layer, and electroplating iron-nickel alloy or iron-cobalt alloy with a third pre-set thickness in the core groove of the upper silicon substrate to obtain the upper core; accordingly, electroplating to form a lower core in the core groove of the lower silicon substrate specifically includes: after aligning the metal mask with the core groove pattern with the core groove on the upper surface of the lower silicon substrate, sticking the metal mask to the upper surface of the lower silicon substrate; magnetically sputtering metal nickel or metal cobalt with a second pre-set thickness on the upper surface of the lower silicon substrate as a seed layer, and electroplating iron-nickel alloy or iron-cobalt alloy with a third pre-set thickness in the core groove of the lower silicon substrate to obtain the lower core.
Further, in the step 4 of manufacturing the stator, electroplating in the spiral channel to form solenoids specifically includes: magnetically sputtering metallic titanium with a fourth pre-set thickness on the lower surface of the lower silicon substrate as an intermediate layer, magnetically sputtering metallic copper with a fifth pre-set thickness on the intermediate layer as a seed layer, and electroplating metallic copper in the second groove and the vertical through hole of the rotary channel until the metallic copper is filled to the position of the lower plane of the first groove;
after magnetically sputtering metallic copper on the upper surface of the upper silicon substrate as a seed layer, electroplating metallic copper until the spiral channel is completely filled with metallic copper to obtain the solenoids.
Further, in step 1 of manufacturing the stator, manufacturing the upper silicon substrate 5 further comprises: according to the structure and position of the two pins, deeply etching two pin slots on the upper surface of the first silicon wafer after the first oxidation; accordingly, step 4 of manufacturing the stator further comprises: electroplating in the two pin slots to form the two pins.
According to the MEMS electromagnetic motor and the manufacturing method thereof provided by the invention, by radially arranging the windings of the stator and rotors of the electromagnetic motor, this arrangement brings the advantages of high winding coil density and large cross-sectional area, and can obtain higher inductance value in the same plane area, smaller driving current required by the same output torque and higher overall efficiency. At the same time, the silicon substrate can radiate and protect the soft magnetic core and solenoids, so that the electromagnetic motor has good heat dissipation and impact resistance.
BRIEF DESCRIPTION OF THE FIGURES In order to more clearly explain the embodiments of the present invention or the technical solutions in the prior art, the following will briefly introduce the drawings that need to be used in the description of the embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present invention, and for ordinary technicians in the field, other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a schematic diagram of the three-dimensional structure of the MEMS electromagnetic motor provided by an embodiment of the present invention; Fig. 2 is a schematic diagram of the three-dimensional structure of the stator after removing the first silicon substrate in the embodiment of the present invention; Fig. 3 is a schematic diagram of the three-dimensional structure of the rotor in the embodiment of the present invention; Fig. 4 is a schematic diagram of the three-dimensional structure of the upper silicon substrate in the embodiment of the present invention; Fig. 5 is a schematic diagram of a three-dimensional structure of the lower silicon substrate in an embodiment of the present invention; Fig. 6 is a schematic sectional view of steps (1) to (6) of the manufacturing process of the stator in the example provided by the embodiment of the present invention; Fig. 7 is a schematic sectional view of steps (7) to (12) in the manufacturing process of the stator in the example provided by the embodiment of the present invention;
Fig. 8 is a schematic sectional view of steps (13) to (17) in the manufacturing process of the stator in the example provided by the embodiment of the present invention; Fig. 9 is a schematic sectional view of steps (18) to (20) of the manufacturing process of the stator in the example provided by the embodiment of the present invention; Reference number: 1- stator; 2- rotor; 11- first silicon substrate; 12- soft magnetic core; 13- solenoid; 14- pin; 14'- pin slot; 111-upper silicon substrate; 112-lower silicon substrate; 121-Upper core; 122-lower core; 131'- first horizontal groove; 132'-second horizontal groove; 133'-vertical through hole; 21- second silicon substrate; 22-rotating shaft; 23- permanent magnet.
DESCRIPTION OF THE INVENTION In order to make the purpose, technical scheme and advantages of the embodiments of the present invention clearer, the technical scheme in the embodiments of the present invention will be clearly described below with reference to the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, but not all of them. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technicians in the field without creative work are within the scope of the present invention.
Fig. 1 is a schematic diagram of the three-dimensional structure of the MEMS electromagnetic motor provided by an embodiment of the present invention. As shown in Fig. 1, it comprises the stator 1 and the rotor 2, wherein the centre of the stator 1 is provided with the first through hole for mounting the rotor 2, and the rotor 2 is rotatably connected with the stator
1. Among them: the stator 1 comprises the first silicon substrate 11, the soft magnetic core 12 and a plurality of solenoids 13, wherein the soft magnetic core 12 is wrapped inside the first silicon substrate 11 and the soft magnetic core 12 is provided with a plurality of protrusions which are arranged around the first through hole; the first silicon substrate 11 is provided with a plurality of spiral channels, and the protrusions respectively pass through the centres of the spiral channels, and the solenoids 13 are respectively arranged in the spiral channels; Specifically, the spiral channels are arranged on the first silicon substrate 11, most of the structure of the solenoids 13 arranged in the spiral channels are also wrapped inside the first silicon substrate 11, that is, both the soft magnetic core 12 of the stator 1 and the solenoids 13 are wrapped inside the first silicon substrate 11. A plurality of protrusions respectively pass through the centres of a plurality of spiral channels, and then a plurality of solenoids 13 are wound around the protrusions of a plurality of soft magnetic cores 12 to form a plurality of stator windings, and the formed stator windings are uniformly arranged around the first through holes. Understandably, the number of windings and the number of turns of solenoids 13 on the windings can be set according to actual needs.
As shown in Fig. 2, the rotor 2 includes the second silicon substrate 21, the rotating shaft 22 and a plurality of permanent magnets 23. Among them, the centre of the second silicon substrate 21 is provided with a second through hole, a plurality of grooves are arranged around the second through hole, the plurality of permanent magnets 23 are arranged in the grooves, and the rotating shaft 22 penetrates into the second through hole.
Specifically, the second silicon substrate 21 serves as a bearing structure for the rotating shaft 22 and a plurality of permanent magnets 23 in the rotor 2. A plurality of permanent magnets 23 are arranged in the grooves of the second silicon substrate 21, the grooves are uniformly arranged around the second through hole, and the rotating shaft 22 is inserted in the grooves, that is, a plurality of permanent magnets 23 are uniformly arranged around the rotating shaft 22. The diameter of the first through-hole is adapted to the diameter of the second silicon substrate 21. After the rotor 2 is fitted to the first through-hole, the rotor 2 can rotate around the rotation axis 22 relative to the stator 1, and the windings of the rotor 2 and the stator 1 are arranged in a radial direction.
According to the MEMS electromagnetic motor provided by the embodiment of the invention, by radially arranging the windings of the stator and rotors of the electromagnetic motor, this arrangement brings the advantages of high winding coil density and large cross- sectional area, and can obtain higher inductance value in the same plane area, smaller driving current required by the same output torque and higher overall efficiency. At the same time, the silicon substrate can radiate and protect the soft magnetic core and solenoids, so that the electromagnetic motor has good heat dissipation and impact resistance.
In the above embodiment, as shown in Fig. 1 and Fig. 3, the silicon substrate 11 is divided into the upper silicon substrate 111 and the lower silicon substrate 112, and the soft magnetic core 12 is divided into the upper core 121 and the lower core 122, and the upper core 121 and the lower core 122 have the same shape; The lower surface of the upper silicon substrate 111 is provided with an core groove corresponding to the shape of the upper core 121, the upper surface of the lower silicon substrate 112 is provided with an core groove corresponding to the shape of the lower core 122, the upper core 121 and the lower core 122 are respectively arranged in the corresponding core grooves, and the lower surface of the upper silicon substrate 111 and the upper surface of the lower silicon substrate 112 are bonded to each other so that the lower surface of the upper core 121 and the upper surface of the lower core 122 are aligned with each other.
Among them, the upper iron core 121 and the lower iron core 122 are two iron cores with the same shape, which are divided equally by the soft magnetic core 12 in the vertical direction.
The shapes of the upper iron core 121 and the lower iron core 122 can be polygonal with a plurality of protrusions, and the thickness of the upper iron core 121 is half that of the soft magnetic core 12. Similarly, the upper silicon substrate 111 and the lower silicon substrate 112 are bisected by the first silicon substrate 1 in the vertical direction, and they are symmetrically arranged.
By dividing the silicon substrate and the soft magnetic core into two parts, the stator as a whole is easy to process. At the same time, dividing the soft magnetic core into the upper core and the lower core can reduce the eddy current loss in the core and further improve the efficiency.
In the above embodiment, as shown in Fig. 4 and Fig. 5, the spiral channels include a plurality of first horizontal grooves 131’, a plurality of second horizontal grooves 132' and a plurality of vertical through holes 133; the first horizontal grooves 131’ are arranged on the upper surface of the first silicon substrate 11, the second horizontal grooves 132' are arranged on the lower surface of the first silicon substrate 11, and the vertical through holes 133' run through the upper surface and the lower surface of the first silicon substrate; the beginning and end of any first horizontal groove 131' in the spiral channels are respectively communicated with two vertical through holes 133’, and the two vertical 133' through holes are respectively communicated with two adjacent second horizontal grooves 132". Among them, when the first silicon substrate 11 is divided into the upper silicon substrate 111 and the lower silicon substrate 112, each vertical through hole 133' is also divided into two parts respectively located in the upper silicon substrate 111 and the lower silicon substrate 112.
Specifically, in the spiral channels, a plurality of first horizontal grooves 131' are parallel to each other, and a plurality of second horizontal grooves 132" are parallel to each other and communicate with each other through a plurality of vertical through holes 133’. It can be understood that the vertical through hole 133' can be straight or curved, and the first horizontal grooves 131' and the second horizontal grooves 132' can also be straight or curved.
In the above embodiment, as shown in Fig. 4, each solenoid 13 in the stator 1 also includes two pins 14, and each spiral channel also include two pin slots 14; The two pin slots 14' are arranged on the upper surface of the first silicon substrate 11, and the two pin slots 14' are respectively communicated with the end of the spiral channels, and the two pins 14 are respectively arranged in the two pin slots 14.
Specifically, because the two pin slots 14' communicate with the end of the spiral channels, the two pins 14 are respectively connected with the end of the solenoids 13. When the motor works, the two pins 14 constitute the input and output of each stator winding, respectively.
In the above embodiment, the soft magnetic core 12 is made of iron-nickel alloy material or iron-cobalt alloy material.
In the above embodiment, the solenoids 13 and the solenoid 13 are made of metallic copper.
In the above embodiment, the plurality of permanent magnets 23 are made of Neodymium iron boron material, and the rotating shaft 22 is made of iron-nickel alloy material.
The manufacturing method of the electromagnetic motor provided by the embodiment of the invention comprises the following steps: manufacturing the stator and the rotor respectively, and assembling the stator and the rotor to obtain the MEMS electromagnetic motor.
Among them:
|. The manufacturing process of the stator includes:
step 1, respectively manufacturing the upper silicon substrate and the lower silicon substrate of the first silicon substrate; among them,
manufacturing the upper silicon substrate includes:
performing the first thermal oxidation on the first silicon wafer with the first pre-set thickness;
according to the structure of the spiral channels, a plurality of first horizontal grooves in parallel, upper half parts of a plurality of vertical through holes and core grooves are deeply etched on the upper surface, the inner surface and the lower surface of the first silicon wafer after the first oxidation respectively;
performing the second thermal oxidation on the first silicon wafer obtained by deep etching of silicon to obtain the upper silicon substrate;
manufacturing the lower silicon substrate includes: performing the first thermal oxidation on the second silicon wafer with the first pre-set thickness;
according to the structure of the spiral channels, the core groove, the lower half of a plurality of vertical through holes and a plurality of second horizontal grooves in parallel are deeply etched on the upper surface, the inner surface and the lower surface of the second silicon wafer after the first oxidation, respectively;
performing the second thermal oxidation on the second silicon wafer to obtain the lower silicon substrate; step 2, electroplating in the core grooves of the upper silicon substrate and the lower silicon substrate to form an upper core and a lower core respectively; step 3, aligning the upper surface of the upper silicon substrate and the lower surface of the lower silicon substrate with each other, bonding the upper silicon substrate and the lower silicon substrate at low temperature, and forming the spiral channel in the bonded upper silicon substrate and the lower silicon substrate; step 4, electroplating in the spiral channel to form the solenoids; step 5, according to the shape of the second silicon substrate, machining the first through hole in the centre of the bonded upper silicon substrate and lower silicon substrate, thus obtaining the stator;
Among them, in step 1, the structural difference between the upper silicon substrate and the lower silicon substrate is essentially only that the upper surface of the upper silicon substrate is provided with the first horizontal grooves, and the lower surface of the lower silicon substrate is provided with the second horizontal grooves, and the structures of other parts are the same, and the silicon substrate and the lower silicon substrate are symmetrically arranged, and the processing process before bonding them is basically the same.
In step 2, the upper iron core and the lower iron core are electroplated on the upper silicon substrate and the lower silicon substrate respectively. Because the iron core needs to be completely wrapped in the silicon substrate, this step of iron core electroplating is completed before bonding the upper silicon substrate and the lower silicon substrate.
In step 3, when the upper silicon substrate and the lower silicon substrate are bonded, it is necessary to ensure that the lower surface of the upper iron core and the upper surface of the lower iron core are aligned with each other to ensure the mutual coordination of their magnetic fields. At the same time, after the upper silicon substrate and the lower silicon substrate are bonded, the horizontal grooves and vertical through holes previously respectively arranged on the upper silicon substrate and the lower silicon substrate are combined to form spiral channels.
In step 4, after the spiral channels are formed, the solenoids can be formed only by electroplating related metals in it.
Furthermore, in the step 2 of manufacturing the stator, electroplating to form an upper core in the core groove of the upper silicon substrate specifically includes: after aligning the metal mask with the core groove pattern with the core groove on the lower surface of the upper silicon substrate, adhering the metal mask to the lower surface of the upper silicon substrate; magnetically sputtering metal nickel or metal cobalt with a second pre-set thickness on the lower surface of the upper silicon substrate as a seed layer, and electroplating iron-nickel alloy or iron-cobalt alloy with the third pre-set thickness in the core groove of the upper silicon substrate to obtain the upper core; accordingly, electroplating to form a lower core in the core groove of the lower silicon substrate specifically includes: after aligning the metal mask with the core groove pattern with the core groove on the upper surface of the lower silicon substrate, sticking the metal mask to the upper surface of the lower silicon substrate; magnetically sputtering metal nickel or metal cobalt with the second pre-set thickness on the upper surface of the lower silicon substrate as a seed layer, and electroplating iron-nickel alloy or iron-cobalt alloy with the third pre-set thickness in the core groove of the lower silicon substrate to obtain the lower core.
Furthermore, in the step 4 of manufacturing the stator, electroplating in the spiral channels to form the solenoids specifically includes: magnetically sputtering metallic titanium with a fourth pre-set thickness on the lower surface of the lower silicon substrate as an intermediate layer, magnetically sputtering metallic copper with the fifth pre-set thickness on the intermediate layer as a seed layer, and electroplating metallic copper in the second groove and the vertical through hole of the rotary channel until the metallic copper is filled to the position of the lower plane of the first groove; after magnetically sputtering metallic copper on the upper surface of the upper silicon substrate as a seed layer, electroplating metallic copper until the spiral channel is completely filled with metallic copper to obtain the solenoids. Further, in step 1 of manufacturing the stator, manufacturing the upper silicon substrate further comprises: according to the structure and position of the two pins, deeply etching two pin slots on the upper surface of the first silicon wafer after the first oxidation; accordingly, step 4 of manufacturing the stator further comprises: electroplating in the two pin slots to form the two pins.
Specifically, as shown in Fig. 8- Fig. 9, the stator manufacturing process can be as follows: (1) Using double-polished silicon wafer with thickness of 1000 um. The silicon wafer is thermally oxidized to form a thermal oxide layer with a thickness of 2 um on both sides.
(2) Coating photoresist. The upper surface of the upper silicon substrate exposes the first horizontal groove (covering the position of the vertical through holes) and the contact pattern; the upper surface of the lower silicon substrate exposes the vertical through holes and the second horizontal groove; the lower surfaces of the upper silicon substrate and the lower silicon substrate respectively expose the iron core groove pattern; and the first horizontal groove, the second horizontal groove and the vertical through holes form spiral channels.
(3) Using BOE (Buffered Oxide Etch) solution to remove the exposed silicon dioxide, and patterning. (4) Second coating photoresist, exposing vertical through hole patterns on the upper and lower surfaces of the upper and lower silicon substrates.
(5) deeply etching the upper and lower surfaces with silicon to etch the silicon through hole pattern.
(8) Using piranha solution to remove photoresist.
(7) Etching the upper surface with the oxide layer as the masking layer to etch the vertical through hole and the horizontal groove on the upper surface. Etching the lower surface with the oxide layer as the masking layer to etch the iron core pattern.
(8) Thermal oxidation to form an oxide layer with a thickness of 2 um.
(9) Taking the metal mask with the iron core groove pattern, aligning the upper iron core groove pattern with the iron core groove pattern on the lower surface of No.1 and No.2 silicon wafers, and sticking to the lower surface of silicon wafers.
(10) Magnetically sputtering 100 nm metallic nickel on the lower surface as a seed layer. (11) Electroplating iron-nickel alloy, so that the iron-nickel alloy is filled from the bottom to 100 um from the surface of the silicon wafer.
(12) Getting the lower surfaces of the upper silicon substrate opposite to the lower silicon substrate to perform low-temperature silicon-silicon bonding.
(13) Magnetically sputtering the lower surface with 100 nm metallic titanium as the intermediate layer, and then sputtering with 500 nm metallic copper as the seed layer.
(14) Electroplating metallic copper, so that the electroplated copper is filled from the bottom to the lower plane position of the top horizontal conductor.
(15) Magnetically sputtering 500 nm metallic copper on the upper surface.
(16) Electroplating metallic copper so that the whole structure of the upper surface is completely covered by the electroplated copper.
(17) Using CMP (chemical mechanical polishing machine) to thin the metal copper on the upper and lower surfaces until the metal copper is thinned to the same height as the surface of the thermal oxide layer of the silicon wafer, and then polishing the surface by CMP.
(18) Carrying out PECVD process on the upper and lower surfaces, and depositing 2 um thick oxide layers respectively.
(19) Double-sided spin coating photoresist, double-sided exposure of the first through hole pattern of the rotor.
(20) Etching the oxide layer of the first through hole pattern via pattern with BOE solution; etching the first through hole pattern on the upper surface by ICP until the depth reaches half of the thickness of the silicon wafer, and then etching the first through hole pattern on the lower surface by ICP until the through hole is obtained, thus finishing the machining of the MEMS electromagnetic motor stator.
II. The manufacturing process of the rotor includes: step 1, manufacturing the second silicon substrate: according to the shapes of the rotating shaft and a plurality of permanent magnets, deep etching the second through hole and a plurality of grooves on the third silicon wafer after the first thermal oxidation to obtain the second silicon substrate; step 2, electroplating the plurality of permanent magnets in the grooves, and magnetizing the plurality of permanent magnets to form permanent magnet characteristics; and step 3, inserting the rotating shaft into the second through hole to obtain the rotor.
Specifically, the specific manufacturing process of the rotor can be as follows: (1) taking a silicon wafer with double-sided polishing and double-sided oxidation; (2) double-sided spin coating photoresist, exposing the rotating shaft hole pattern and the permanent magnet groove pattern on the upper surface, exposing the permanent magnet groove pattern on the lower surface, developing, and peeling off the photoresist at the above patterns; (3) etching the silicon dioxide at the above pattern with BOE solution;
(4) using ICP (Inductively Coupled plasma etching machine) to etch all patterns on the upper surface to a certain depth, and using ICP (Inductively Coupled plasma etching machine) to etch patterns on the lower surface until it is completely etched; (5) removing photoresist, and using diluted HF solution to remove the oxide layer on the surface of the silicon wafer; (6) electroplating Neodymium iron boron permanent magnets in the permanent magnet groove and magnetizing permanent magnets; (7) inserting an iron-nickel alloy rotating shaft into the rotating shaft hole; (8) cutting to obtain a plurality of rotors of the micromotor.
According to the manufacturing method of MEMS electromagnetic motor provided by the embodiment of the invention, the silicon substrate is divided into two symmetrical parts to be manufactured separately, the core electroplating is completed before bonding, and the solenoids are formed by electroplating after bonding, so that the whole manufacturing process does not need to adopt multilayer silicon deep etching, the machining fault tolerance rate is improved, the repeatability is very good, and the windings and rotors of the electromagnetic motor stator are radially arranged. This arrangement brings the advantages of high winding density and large cross-sectional area. It can get higher inductance value on the same plane area, lower driving current required by the same output torque, higher overall efficiency, compatibility with IC semiconductor technology and suitability for large-scale production.
Finally, it should be noted that the above embodiments are only used to illustrate the technical scheme of the present invention, but not to limit it. Although the present invention has been described in detail with reference to the foregoing embodiments, ordinary technicians in the field should understand that it is still possible to modify the technical schemes described in the foregoing embodiments, or equivalently replace some of its technical features. However, these modifications or substitutions do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of each embodiment of the present invention.
Claims (10)
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