NL2030289B1 - Scanning probe microscopy system and method of operating such a system. - Google Patents

Scanning probe microscopy system and method of operating such a system. Download PDF

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Publication number
NL2030289B1
NL2030289B1 NL2030289A NL2030289A NL2030289B1 NL 2030289 B1 NL2030289 B1 NL 2030289B1 NL 2030289 A NL2030289 A NL 2030289A NL 2030289 A NL2030289 A NL 2030289A NL 2030289 B1 NL2030289 B1 NL 2030289B1
Authority
NL
Netherlands
Prior art keywords
signal
probe
probe tip
unit
units
Prior art date
Application number
NL2030289A
Other languages
English (en)
Dutch (nl)
Inventor
Van De Laar Jakob
Kalinin Arseniy
Ruizenaar Ruud
Sadeghian Marnani Hamed
Original Assignee
Nearfield Instr B V
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nearfield Instr B V filed Critical Nearfield Instr B V
Priority to NL2030289A priority Critical patent/NL2030289B1/en
Priority to PCT/NL2022/050760 priority patent/WO2023121467A1/fr
Application granted granted Critical
Publication of NL2030289B1 publication Critical patent/NL2030289B1/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/06—Circuits or algorithms therefor
    • G01Q10/065—Feedback mechanisms, i.e. wherein the signal for driving the probe is modified by a signal coming from the probe itself
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/32—AC mode

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
NL2030289A 2021-12-24 2021-12-24 Scanning probe microscopy system and method of operating such a system. NL2030289B1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
NL2030289A NL2030289B1 (en) 2021-12-24 2021-12-24 Scanning probe microscopy system and method of operating such a system.
PCT/NL2022/050760 WO2023121467A1 (fr) 2021-12-24 2022-12-23 Système de microscopie à sonde à balayage et procédé de fonctionnement dudit système

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL2030289A NL2030289B1 (en) 2021-12-24 2021-12-24 Scanning probe microscopy system and method of operating such a system.

Publications (1)

Publication Number Publication Date
NL2030289B1 true NL2030289B1 (en) 2023-06-30

Family

ID=81648538

Family Applications (1)

Application Number Title Priority Date Filing Date
NL2030289A NL2030289B1 (en) 2021-12-24 2021-12-24 Scanning probe microscopy system and method of operating such a system.

Country Status (2)

Country Link
NL (1) NL2030289B1 (fr)
WO (1) WO2023121467A1 (fr)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040206166A1 (en) * 2002-12-18 2004-10-21 Roger Proksch Fully digital controller for cantilever-based instruments
US20050029450A1 (en) * 1998-04-03 2005-02-10 Hough Paul V.C. Sensing mode atomic force microscope

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050029450A1 (en) * 1998-04-03 2005-02-10 Hough Paul V.C. Sensing mode atomic force microscope
US20040206166A1 (en) * 2002-12-18 2004-10-21 Roger Proksch Fully digital controller for cantilever-based instruments

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
AHMAD AHMAD ET AL: "Large area fast-AFM scanning with active "Quattro" cantilever arrays", JOURNAL OF VACUUM SCIENCE, AMERICAN INSTITUTE OF PHYSICS, 2 HUNTINGTON QUADRANGLE, MELVILLE, NY 11747, vol. 34, no. 6, 9 November 2016 (2016-11-09), XP012213513, ISSN: 2166-2746, [retrieved on 20161109], DOI: 10.1116/1.4967159 *

Also Published As

Publication number Publication date
WO2023121467A1 (fr) 2023-06-29

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