NL2027189B1

NL2027189B1 - Substrate thining using temporary bonding processes

Info

Publication number: NL2027189B1
Application number: NL2027189A
Authority: NL
Inventors: Anne Dorothee Brueckner Julia; Ro Yoon Jun; Kong Bokyung; Jay Zhang Jian-Zhi; Chang Yu-Huei
Original assignee: Corning Inc
Priority date: 2020-11-03
Filing date: 2020-12-21
Publication date: 2022-06-27

Abstract

An article including a support unit, the support unit including a support substrate and a bonding layer such that the bonding layer is bonded to a surface of the support substrate. Furthermore, a total thickness variation TTV across a Width of the support unit is about 2.0 microns or less.

Description

SUBSTRATE THINING USING TEMPORARY BONDING PROCESSES

FIELD OF THE DISCLOSURE The present disclosure is generally directed to a temporary bonding process to provide substrate thinning, and more precisely to a bonding layer with low total thickness variation to provide a temporary bond during a substrate thinning process.

BACKGROUND OF THE DISCLOSURE The thinning of a substrate to a very small thickness, for example 10 microns or less, requires a supporting member during the thinning process. Such enables handling of the substrate during the thinning process to prevent damage of the very thin substrate. However, material removal from the substrate, during the thinning process, must be uniform. Therefore, it is important that the supporting member provides an even baseline for the substrate to be processed. Because the substrate is bonded to the supporting member during the thinning process, if the supporting member is uneven or non-uniform, the substrate will also be processed to be uneven and non- uniform after the thinning process. Supporting members providing an even baseline are even more important when thinning a substrate to an extremely low thickness, for example down to one micron or less. Such thin substrates may be used in applications including surface acoustic wave (SAW) technologies. In these applications, an active material is processed to be less than one micron in thickness in order to increase the upper frequency limits of SAW filters. Accordingly, a need exists to provide a supporting member with uniform dimensions during a thickness reduction process of a substrate.

SUMMARY OF THE DISCLOSURE Substrates in various applications may be reduced in thickness to a precise thickness and flatness with the aid of a supporting member. The supporting member may first be processed to a specific and uniform thickness in order to provide an even baseline for the processing of the substrate. One aspect of uniformity, as discussed throughout this disclosure, is total thickness variation, which refers to deviation in thickness across a defined interval of an article. As discussed further below, a supporting member with high total thickness variation results in an uneven baseline, which can result in thinning of the substrate in an uneven manner. As also discussed further below, aspects of the present disclosure include not only a supporting member with a very low total thickness variation, but also a temporary bonding layer with a very low total thickness variation. The bonding layer provides a temporary bond between the supporting member and the substrate to be thinned during the thinning process.

FIG. 1 shows an exemplary process to provide a semiconductor article 1 in which a semiconductor wafer 10 (the supporting member) is bonded to a piezoelectric substrate 20 {the substrate). In this process, semiconductor wafer 10 has already been subject to an expensive and time consuming process of polishing to provide the specific flatness and uniformity requirements {including total thickness variation). Piezoelectric substrate 20 is then ground down and polished to a specific flatness and uniformity using a back-grinding process, in which piezoelectric substrate 20 remains bonded to semiconductor wafer 10 during the grinding process. Therefore, semiconductor wafer provides a baseline for the grinding and polishing of piezoelectric substrate 20. However, the back-grinding process is non-reversible. Therefore, any deviation in flatness or uniformity 10 produced during the grinding and polishing process of piezoelectric substrate 20 is non-reversible. It is extremely important that this grinding and polishing process starts with an even baseline. FIGS. 2A and 2B further depict the importance of starting with an even baseline during the grinding and polishing process of piezoelectric substrate 20. As shown in FIG. 2A, if semiconductor wafer 10 is not uniform in thickness, then piezoelectric substrate 20 will be disposed on semiconductor wafer 10 in an uneven manner. In this example, semiconductor wafer 10 was not processed with high accuracy so that the wafer is thicker on the left side of the image than on the right side. Therefore, piezoelectric substrate 20 is not deposited on the wafer with an even baseline. Instead, as shown in FIG. 2A, the left side of piezoelectric substrate 20 is slightly higher than the right side of piezoelectric substrate 20. When the grinding wheel is lowered towards piezoelectric substrate 20, it will first contact the slightly higher left side of the substrate before the right sight of the substrate. As shown in FIG. 2B, such will cause piezoelectric substrate 20 to have an uneven thickness after the grinding and polishing process. More specifically, in this example, the left side of the substrate will be thinner than the right side of the substrate. Therefore, piezoelectric substrate 20 will not be a uniform layer with a consistent total thickness variation.

The non-uniformity in piezoelectric substrate 20 becomes even more apparent when the substrate is thinned down to an extremely small thickness of, for example, less than one micron. In these examples, the substrate may be so thin so that the substrate material is polished away on the left side of the substrate in FIG. 2B, thus exposing the underlying semiconductor wafer 10 on this side. The embodiments of the present disclosure provide a unique process in which the substrate to be thinned is attached to a support substrate during the grinding and polishing process. A bonding layer provides a temporary bond between the substrate to be thinned and the support substrate during the grinding and polishing process. The bonding layer is advantageously very thin and is extremely uniform, with ultra-low total thickness variation, in order to provide an even baseline for the substrate to be thinned during its grinding and polishing process. The inventors are the first to produce such a temporary bonding layer with ultra-low total thickness variation, as this has not been commercially produced prior to this disclosure herein,

According to one embodiment, an article is provided. The article comprises a support unit comprising a support substrate having a surface and a bonding layer bonded to the surface of the support substrate. Furthermore, a total thickness variation (TTV) across a width of the support unit is about 2.0 microns or less.

According to another embodiment, an article is provided. The article comprises a support unit comprising a support substrate having a surface and a bonding layer bonded to the surface of the support substrate. A total thickness variation (TTV) across a width of the support unit is about 2.0 microns or less. Additionally, the article comprises a first substrate and a device support wafer. The bonding layer couples the support substrate with the first substrate, and the device support wafer is removably coupled with the support substrate.

According to another embodiment, a method of providing a thin substrate using a support unit is provided. The method comprises bonding a first substrate to a support substrate with a bonding layer. The support substrate and the bonding layer forming a support unit having a total thickness variation (TTV) across a width of the support unit of about 2.0 microns or less.

Itis to be understood that both the foregoing general description and the following detailed description are merely exemplary, and are intended to provide an overview or framework to understanding the nature and character of the claims. The accompanying drawings are included to provide a further understanding, and are incorporated in and constitute a part of this specification. The drawings illustrate one or more embodiment(s), and together with the description serve to explain principles and operation of the various embodiments.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic diagram illustrating a process of polishing a piezoelectric substrate on a semiconductor article; FIGS. 2A and 2B are schematic diagrams illustrating a process of polishing a piezoelectric substrate on a semiconductor article; FIG. 3 is a flow chart illustrating a process to form an article according to the embodiments of the present disclosure; FIG. 4 is an edge view of an exemplary substrate exhibiting thickness deviations, and illustrating measurement of total thickness variation (TTV); FIG. 5 is a cross-sectional view of an article according to embodiments of the present disclosure; FIG. 6 is another cross-sectional view of the article according to embodiments of the present disclosure; FIG. 7 is another cross-sectional view of the article according to embodiments of the present disclosure; and

FIG. 8 is another cross-sectional view of the article according to embodiments of the present disclosure.

DETAILED DESCRIPTION Additional features and advantages of the disclosure will be set forth in the detailed description which follows and will be apparent to those skilled in the art from the description, or recognized by practicing the disclosure as described in the following description, together with the claims and appended drawings. As used herein, the term “and/or,” when used in a list of two or more items, means that any one of the listed items can be employed by itself, or any combination of two or more of the listed items can be employed. For example, if a composition is described as containing components A, B, and/or C, the composition can contain A alone; B alone; C alone; A and B in combination; A and C in combination; B and C in combination; or A, B, and C in combination.

In this document, relational terms, such as first and second, top and bottom, and the like, are used solely to distinguish one entity or action from another entity or action, without necessarily requiring or implying any actual such relationship or order between such entities or actions. Directional terms as used herein - for example up, down, right, left, front, back, top, bottom - are made only with reference to the figures as drawn and are not intended to imply absolute orientation.

Unless otherwise expressly stated, it is in no way intended that any method set forth herein be construed as requiring that its steps be performed in a specific order, nor that with any apparatus, specific orientations be required. Accordingly, where a method claim does not actually recite an order to be followed by its steps, or that any apparatus claim does not actually recite an order or orientation to individual components, or it is not otherwise specifically stated in the claims or description that the steps are to be limited to a specific order, or that a specific order or orientation to components of an apparatus is not recited, it is in no way intended that an order or orientation be inferred, in any respect. This holds for any possible non-express basis for interpretation, including: matters of logic with respect to arrangement of steps, operational flow, order of components, or orientation of components; plain meaning derived from grammatical organization or punctuation, and; the number or type of embodiments described in the specification.

It will be understood by one having ordinary skill in the art that construction of the described disclosure, and other components, is not limited to any specific material. Other exemplary embodiments of the disclosure disclosed herein may be formed from a wide variety of materials, unless described otherwise herein.

Itis also important to note that the construction and arrangement of the elements of the disclosure, as shown in the exemplary embodiments, is illustrative only. Although only a few embodiments have been described in detail in this disclosure, those skilled in the art who review this disclosure will readily appreciate that many modifications are possible (e.g., variations in sizes, dimensions, structures, shapes and proportions of the various elements, values of parameters, mounting arrangements, use of materials, colors, orientations, etc.) without materially departing from the 5 novel and nonobvious teachings and advantages of the subject matter recited. For example, elements shown as integrally formed may be constructed of multiple parts, or elements shown as multiple parts may be integrally formed, the operation of the interfaces may be reversed or otherwise varied, the length or width of the structures, and/or members, or connectors, or other elements of the system, may be varied, and the nature or number of adjustment positions provided IO between the elements may be varied. It should be noted that the elements and/or assemblies of the system may be constructed from any of a wide variety of materials that provide sufficient strength or durability, in any of a wide variety of colors, textures, and combinations. Accordingly, all such modifications are intended to be included within the scope of the present disclosure. Other substitutions, modifications, changes, and omissions may be made in the design, operating conditions, and arrangement of the desired and other exemplary embodiments without departing from the spirit of the present disclosure.

Reference will now be made in detail to the present preferred embodiments of the disclosure, examples of which are illustrated in the accompanying drawings. Whenever possible, the same reference numbers will be used throughout the drawings to refer to the same or like parts.

Referring now to FIG. 3, a process 100 is shown, according to embodiments of the present disclosure, of thinning a substrate using a temporary bond to form an article. In some embodiments, the article is a semiconductor article. However, it is noted that the steps of process 100 may be used to form other articles and components than a semiconductor article. At step 110, the process comprises bonding a support substrate with a processing substrate. As discussed further below, the bond is formed by a bonding layer having ultra-low total thickness variation and a very small thickness. Thus, the bonding layer provides a uniform and flat surface that does not significantly contribute to the overall dimensions of the article. Such is advantageous when reducing the thickness of the processing substrate at step 120, as the processing substrate may be bonded to the support substrate in a precisely uniform manner. The processing substrate is a substrate to be thinned during a thickness reducing process. A device support wafer, for example, is permanently bonded to the processing substrate at step 130. And, at step 140, the device support wafer and processing substrate are removed and de-bonded from the support substrate, thus forming a final product comprising the device support wafer and the processing substrate. It is noted that the final product formed at step 140 includes the device support wafer but does not include the support substrate. Additionally, the final product formed at step 140 may be subjected to further downstream processing.

One or more of the bonding layers, substrates, and wafers disclosed herein may have a low total thickness variation in order to provide a final product with a low total thickness variation.

As used herein, total thickness variation (TTV) refers to the difference between the maximum thickness and the minimum thickness of a substrate across a defined interval v, typically an entire width of the substrate, of an unclamped (free state) substrate. FIG. 4 provides an exemplary substrate 50 exhibiting thickness deviations and illustrating the TTV measurement. As shown in FIG. 4, TTV in this exemplary substrate is the difference between Tm and Tia of the unclamped substrate 50. It is noted that the TTV of a substrate is distinguished from the bow or the warp (flatness) of the substrate.

Referring again to FIG. 3, at step 110, a support substrate is bonded to a processing substrate. As shown in FIG. 5, an article 200 comprising an exemplary support substrate 210 bonded to a first substrate 220 using a bonding layer 205 is shown. First substrate 220 may be a processing substrate that is thinned during a thickness reducing process. Support substrate 210 comprises first surface 212 and second surface 214, and first substrate 220 comprises first surface 222 and second surface 224. First surface 212 of support substrate 210 is bonded to first surface 222 of substrate 220 through bonding layer 205. The bond is a temporary bond that may be removed through mechanical, chemical, thermal, and/or light based means, as discussed further below. Thus, support substrate 210 provides a stable platform for substrate 220 when the thickness of substrate 220 is reduced. Support substrate 210 and bonding layer 205 together form a support unit 215. As also discussed further below, support unit 215 has a very low total thickness variation (TTV). Support substrate 210 may be comprised of glass or glass ceramic such as, for example, silicate glass, an aluminosilicate glass, alkali aluminosilicate glass, alkaline aluminosilicate glass, borosilicate glass, boro-aluminosilicate glass, alkali aluminoborosilicate glass, alkaline aluminoborosilicate glass, soda-lime glass, fused quartz (fused silica), or other type of glass.

Exemplary glass substrates include, but are not limited to, HPFS® ArF Grade Fused Silica sold by Corning Incorporated of Corning, New York under glass codes 7980, 7979, and 8655, and Corning” EAGLE XG® Glass, e.g., boro-aluminosilicate glass also sold by Corning Incorporated of Corning, New York. Other glass substrates include, but are not limited to, Corning Lotus’ NXT Glass, Corning Iris™ Glass, Corning® WILLOW® Glass, Corning” Gorilla® Glass, Corning VALOR” Glass, or PYREX" Glass sold by Corning Incorporated of Corning, New York. In some embodiments, the glass or glass ceramic has 50 wt.% or more, 60 wt.% or more, 70 wt.% or more, 80 wt.% or more, 90 wt.% or more, or 95 wt.% or more silica content by weight on an oxide basis. In other embodiments, support substrate 210 is comprised of ceramic or silicon.

Support substrate 210 may be pre-processed to have a TTV across an entire width of the substrate and between first and second surfaces 212, 214 of about 3.0 microns or less, or about 2.5 microns or less, or about 2.0 microns or less, or about 1.7 microns or less, or about 1.5 microns or less, or about 1.2 microns or less, or about 1.0 microns or less, or about 0.7 microns or less, or about 0.5 microns or less, or about 0.3 microns or less, or about 0.2 microns or less, or about 0.1 microns or less, or about 0.0 microns. Thus, support substrate 210 may have an ultra-low TTV value. In some embodiments, support substrate 210 has a thickness (i.e., between first and second surfaces 212, 214) in a range from about 0.1 mm to about 5 mm, or from about 0.2 mm to about

2.0 mm, or from about 0.3 mm to about 1.0 mm. The thickness of support substrate 210 should be sufficiently thick so that it provides a stable platform that does not bend or flex during the grinding process of first substrate 220. First substrate 220, in some embodiments, comprises a piezoelectric crystal material including, for example, lithium tantalate (LiTa0s), lithiam niobate (LiNbO3), aluminum nitride (AIN), and/or lead zirconate titanate (PZT) (Pb{Zr, Ti, JO: (0=<x<1). In other embodiments, first substrate 220 comprises glass, glass ceramic, or ceramic, including, for example, sapphire or silicon carbide. In yet other embodiments, first substrate 220 may comprise one or more semiconductor materials including, for example, silicon, germanium, gallium arsenide, indinm antirnonite, indium arsenide, gallaan nitride, and/or indiom phosphide. | is also contemplated that first sobstrate 220 is formed of one or more of the materials disclosed above with reference to support substrate 210. First substrate 220 may be comprised of a single layer of material or a plurality of layers of the same or different materials. In some embodiments, the material of support substrate 210 is optimally chosen to correspond to the material of first substrate 220 for coefficient of thermal expansion (CTE) matching purposes. In some embodiments, support substrate 210 is bonded to first substrate 220 such that these substrates are in contact with each other. Therefore, large differences in thermal expansion between the substrates could be a problem when the bonded substrates are thermally annealed, as discussed further below, or otherwise exposed to a thermally variable environment. Due to large differences in CTE between the material of support substrate 210 and that of first substrate 220, when the substrates are thermally annealed and then cooled (or exposed to a thermally variable environment), the substrate with the relatively higher CTE expands and shrinks more than the substrate with the relatively lower CTE so that one or both of the substrates may break after the annealing process. Matching (or substantially matching) the CTE between the material of support substrate 210 and that of first substrate 220 is important, especially when the substrates are annealed at temperatures of 200 °C or greater. Additionally or alternatively, the thicknesses of support substrate 210 and/or first substrate 220 are optimally chosen to reduce stress associated with any CTE mismatch between the materials of support substrate 210 and first substrate 220. In some embodiments, a difference between the CTE of the material of support substrate 210 and the CTE of the material of first substrate 220, at a temperature of 250°C, is from 0 ppm/°C to about

1.0 ppmy°C, or from about 0.3 ppm/°C to about 0.7 ppm/°C. However, it was also found that when the CTE difference between the material of support substrate 210 and the material of first substrate 220 is relatively high (such as, for example, about 10 ppm/°C or higher), the peak temperature during the thermal annealing process should be kept low (such as, for example, about 100°C or lower) to reduce stress and associated breakage between the two materials.

Before first substrate 220 is reduced in thickness at step 120, first substrate 220 may have a thickness (i.e., between first and second surfaces 222, 224) in a range from about 10 microns to about 1,000 microns, or from about 50 microns to about 800 microns, or from about 100 microns to about 400 microns. After first layer 220 is reduced in thickness at step 120, it may have a thickness of about 10 microns or less, or about 5 microns or less, or about 3 microns or less, or {0 about 2 microns or less, or about 1 micron or less, or in a range from about 0.2 microns to about

2.0 microns, or about 0.4 microns to about 1.8 microns, or about 0.5 microns to about 1.7 microns, or about 0.6 microns to about 1.5 microns, or about 0.8 microns to about 1.2 microns.

Bonding layer 205 may be directly disposed on first surface 212 of support substrate 210 and directly disposed on first surface 222 of first substrate 220. However, it is also contemplated that one or more additional materials may be disposed between bonding layer 205 and support substrate 210 and between bonding layer 205 and first substrate 220. Bonding layer 205 may form a single continuous layer between support substrate 210 and first substrate 220. Alternatively, bonding layer 205 may include one or more discontinuous and separated portions of the layer formed by, for example, one or more gaps or voids in the layer. Therefore, in some embodiments, bonding layer 205 may cover less than 100% of surfaces 212, 222 of support substrate 210 and first substrate 220, respectively.

Bonding layer 205 may be sufficiently strong to maintain the bond between support substrate 210 and first substrate 220 while first substrate 220 is reduced in thickness at step 120. Thus, bonding layer 205 must be sufficiently strong to prevent any delamination of support substrate 210 or first substrate 220 caused by the shear force applied to these layers during the thickness reduction step. In some embodiments (as discussed further below), first substrate 220 is reduced in thickness by a back-grinding process, which can include an aggressive grinding of first substrate 220. Therefore, bonding layer 205 must be sufficiently strong to prevent any shear strain of the layers. However, bonding layer 205 must also be able to create a temporary bond that is de-bondable after the thickness reducing process.

In some embodiments, bonding layer 205 provides a bond strength between support substrate 210 and first substrate 220 of about 200 mJ/m” or greater, or about 500 mJ/m’ or greater, or about 600 ml/m” or greater, or about 800 mJ/m” or greater, or about 1 J/ny or greater. Additionally or alternatively, the bond strength between support substrate 210 and first substrate 220 is about 1 Jm’ or less. or about 800 mJAn? or less, or about 100 mJ/m’ or less. In some embodiments, bonding layer 205 is thermally annealed after bonding to support substrate 210 and first substrate

220 to increase its bond strength. For example, bonding layer 205 may be thermally annealed at a temperature in a range of about 100°C to about 500°C for about 5 minutes to about 20 hours. In one embodiment, bonding layer 205 was annealed at 250°C for 30 minutes, which increased the bond energy from 76.4 mJ/m? to 386.7 mJ/m?. In another embodiments, bonding layer 205 was annealed at 450°C for 10 minutes, which increased the bond energy from 116.9 mJ/m’ to 388.3 ml/m’. As discussed further below, although bonding layer 205 provides a very strong bond between support substrate 210 and first substrate 220, the bond is still de-bondable through mechanical, chemical, thermal, and/or light based means. Therefore, the bond is a temporary bond.

Bonding layer 205 may have a TTV across an entire width of the layer of about 3.0 microns or less, or about 2.5 microns or less, or about 2.0 microns or less, or about 1.7 microns or less, or about 1.5 microns or less, or about 1.2 microns or less, or about 1.0 microns or less, or about 0.7 microns or less, or about (0.5 microns or less, or about 0.3 microns or less, or about 0.2 microns or less, or about 0.1 microns or less, or about 0.0 microns. Thus, bonding layer 205 may have an oltra-low TTV value. In some embodiments, bonding layer 205 has a lower TTV value than that of support substrate 210. Bonding layer 205 may have such a low TTV value that it does not contribute to the overall TTV value of support unit 215 and, therefore, may be referred to as having “zero-TTV.” As discussed above, both bonding layer 205 and support substrate 210 have ultra-low TTV values.

Therefore, the total support unit 215 (which is comprised of bonding layer 205 and support substrate 210) may also have an ultra-low TTV value. In some embodiments, support unit 215 has a TTV across an entire width of the unit of about 3.0 microns or less, or about 2.5 microns or less, or about 2.0 microns or less, or about 1.7 microns or less, or about 1.5 microns or less, or about 1.2 microns or less, or about 1.0 microns or less, or about 0.7 microns or less, or about 0.5 microns or less, or about 0.3 microns or less, or about 0,2 microns or less, or about 0.1 microns or less, or about 0.0 microns. Bonding layer 205 may have a very small thickness, such as, for example, in range of about 5.0 nm or less, or about 3.0 nm or less, or about 2.0 nm or less, or about 1.0 nm or less, or about 0.5 nm or less. Additionally or alternatively, the thickness of bonding layer 205 may be about 0.1 nm or greater, or about 0.2 nm or greater, or about 0.3 nm or greater, or about 0.5 nm or greater. In some embodiments, bonding layer 205 is formed of a single row of molecules such that the thickness of bonding layer 205 is the thickness of the molecules themselves. Because bonding layer 205 has such a small thickness, it does not contribute to the overall thickness or dimensions of article 200 or of support unit 215. Exemplary materials for bonding layer 205 are disclosed further below.

Because bonding layer 205 has such a small thickness, in some embodiments, support substrate 210 and/or first substrate 220 may have a low surface roughness in order to increase the mating and bonding of these two substrates. For example, support substrate 210 and/or first substrate 220 may have a surface roughness from about 2.0 nm or less, or about 1.5 nm or less, or about 1.0 nm or less, or about 0.5 nm or less, or about 0.25 nm or less, or about 0.15 nm or less, or about 0.10 nm or less, as measured by Atomic Force Microscope (AFM) on 2 x 2 um? areas across the substrate. Therefore, support substrate 210 has not only ultra-low TTV but also low surface roughness, which advantageously provides improved bonding during the uniform thickness reducing step disclosed herein. Referring again to FIG. 3, the thickness of first substrate 220 is reduced at step 120. During this step, first substrate 220 is bonded to support substrate 210 via bonding layer 205. The thickness of first substrate 220 may be reduced using any well-known suitable process such as, for example, a grinding, chemical, or mechanical processes. Exemplary processes include a chemical mechanical planarization (CMP) process, an ion-beam material removal process, a dry plasma etching process, and a wet etch process. A suitable grinding process may include a rough grinding process and a tine grinding process. During the thinning process, first substrate 220 may be subjected to additional thermal annealing, such as intermediate annealing steps intermixed with the thickness reduction process.

During step 120, first substrate 220 is secured to support unit 215 with the ultra-low TTV value. Therefore, the ultra-low TTV support unit 215 provides an even level baseline during the reduction in thickness of first substrate 220. The reduction in thickness of first substrate 220 is uniform, and the resulting thinner substrate 220 has a constant thickness. It is further noted that support unit 215 provides a stable platform that allows first substrate 220 to be reduced in thickness so that it not only has a final thickness that is uniform but that is also very thin.

When used, for example, in a semiconductor article, it is important to control the thickness and uniformity of first substrate 220 in order to optimize mode stability required for RF filter performance. For example, a thin and uniform substrate reduces undesirable frequency shifts from variations in temperature, reduces insertion loss while increasing the upper frequency limit of SAW filters, helps to improve Q (Quality factor) and filter cutoff sharpness and, thus, allows design of wider bandwidth filters, and provides improves transmission with high frequency selectivity.

In embodiments in which first substrate 220 is reduced in thickness using a grinding process, such may be referred to as a back-grinding process because first substrate 220 remains attached to support substrate 210 during the grinding process. During the back-grinding process, a large grit may be used to coarsely grind the substrate and remove the bulk of the excess substrate. Next, a fine grit may be used to polish the substrate and to accurately grind the substrate to the desired thickness.

FIG. 6 shows an exemplary first substrate 220 after it has been reduced in thickness from a first thickness (before the thickness reduction step) to a second thickness (after the thickness reduction step). As shown in FIGS. 5 and 6, the second thickness of first substrate 220 is less than the first thickness of first substrate 220. In some embodiments, first substrate 220 is reduced in thickness by about 90% or greater, or about 95% or greater, or about 97% or greater, or about 99% or greater. Referring again to FIG. 3, at step 130, a device support wafer is bonded with first substrate 220, As shown in FIG. 7, a device support wafer 230 may be bonded to first substrate 220 such that first substrate 220 is disposed between device support wafer 230 and support substrate 210. The bond between device support wafer 230 and first substrate 220 may be a permanent bond. Although not shown in FIG. 7, one or more additional layers may be disposed between device support wafer 230 and first substrate 220, such as a silicon dioxide layer and/or a polycrystalline silicon layer. These additional layers may help to passivate device support wafer 230 to reduce signal losses in the wafer.

Itis again noted that first substrate 220 is reduced in thickness before it is bonded with device support wafer 230. Therefore, the uniformity and thinness of first substrate 220 is not dependent on device support wafer 230, which reduces manufacturing costs and time.

Device support wafer 230 may be configured to support electrodes or electrical circuits. Exemplary materials of device support wafer 230 include, for example, glass, glass ceramic, or ceramic, including, for example, sapphire or silicon carbide. In yet other embodiments, device support wafer 230 may comprise one or more semiconductor materials including, for example, silicon, germanium, gallium arsenide, inshivn aptivoonite, idiom arsenide, gatiiom nitride, and/or dim phosphude. 1e also contemplated that device support wafer 23015 formed of one or more oof the materials disclosed with reference to support substrate 210, as discussed above, In some embodiments, device support wafer 230 is a semiconductor wafer comprised of silicon, Device support wafer 230 may have a thickness in a range from about 500 microns to about 900 microns, or about 600 microns to about 700 microns. In some embodiments, device support wafer 230 has a thickness of about 600 microns, or about 625 microns, or about 650 microns. Further thinning of device support wafer 230 is also practiced in some embodiments to reduce the overall height of the final device before packaging.

After the bonding of device support wafer 230 with first substrate 220 (and, thus with support unit 215), device support wafer 230 and first substrate 220 are removed from support substrate 210 (step 140 of FIG. 3). Thus, bonding layer 205 is de-bonded such that these components are separated from each other. The de-bonding of these components forms article 240, which is comprised of device support wafer 230 and first substrate 220. FIG. 8 shows article 240 after its separation from support substrate 210. In some embodiments, article 240 is a semiconductor article. During the de-bonding process, bonding layer 205 may remain attached to support substrate 210 such that article 240 is also separated from bonding layer 205. After the de-bonding process, bonding layer 205 may be removed from support substrate 210 using, for example, a cleaning process. Support substrate 210 may then be reused for other substrate thinning processes. Thus, the de-bonding process does not significantly alter or destroy the chemical or mechanical nature of support substrate 210 (more specifically, first surface 212 of support substrate 210) so that the substrate may be reused for other processes. By reusing support substrate 210, the cost to fabricate the substrate is spread over may uses, thus reducing overall costs. The de-bonding process successfully removes article 240 from support substrate 210 without breakage of device support wafer 230 or first substrate 220. As discussed above, the de-bonding process may include mechanical, chemical, thermal, and/or light (e.g., laser) based means. In one embodiment, the components are de-bonded using a suction force applied to a surface of device support wafer 230 (i.e., the top surface in FIG. 7 that is disposed furthest from support substrate 210). The suction force helps to pull device support wafer 230 and first substrate 220 away from support substrate 210. Additionally, a blade is inserted between first substrate 220 and support substrate 210 to remove and prop up a first corner of first substrate 220 away from support substrate 210. After the debonding of this first corner, support substrate 210 is then lifted and removed from {i.e., peeled from) first substrate 220 to fully de-bond these components, thus providing the final article 240. In some embodiments, the suction force may be in a range from about 5 kN to about 15 kN, or about 7 kN to about 12 kN, or about 8 kN to about 10 kN. For example, the suction force is about 8 kN, 8.5 kN, or about 9 kN, or about 9.4 kN, or about 9.6 kN.

Exemplary Materials of Bonding Layer In some embodiments, bonding layer 205 comprises an organic material comprised of surfactants, organic salts, or combinations thereof. The organic material may react with the -OH groups in support substrate 210 and in first substrate 220 to bond the substrates together. Exemplary surfactants of bonding layer 205 include one or more cationic surfactants, one or more cationic polymers, one or more anionic polymers, or combinations thereof. As used herein, surfactants are amphiphilic surface active agents having a hydrophilic head and one or more hydrophobic tails. The hydrophobic tails of the surfactants may comprise a hydrocarbon chain having from foar carbons to at least 24 carbons (C4 — Cy). The hydrocarbon chains can be saturated or unsaturated and can be straight, branched or aromatic. Suitable nonionic surfactants includes those disclosed in WO 2017/087745A1, herein incorporated by reference. Thus, the hydrophilic head groups according to the present disclosure are preferably cationic head groups, i.e. head groups having a cationic functional group. Cationic nitrogen-containing head groups can include primary. secondary, tertiary or quaternary ammonium groups, pyridinium, pyrrolinium, imidazolium, guanidinium cations, or any other nitrogen-containing cation suitable for use as a surfactant head group. Other cations, such as phosphonium or sulfonium can also form suitable cationic head groups. In some embodiments, the cationic polymer is free, or substantially free, of oxygen.

Organic salts as used herein can include any salt comprising an organic ion. Preferred organic salts according to the disclosure contain organic cations, such as nitrogen-containing cations, including but not limited to primary, secondary, tertiary or quaternary ammonium groups, pyridinium, pyrrolinium, imidazolium, and guanidinium cations. Other organic cations suitable for use as organic salts can also be used. In some embodiments, the organic salt is free, or substantially free, of oxygen.

Because of their highly hydrophilic and water soluble nature, cationic surfactants and organic salts allow for simplified application onto support substrate 210 and/or first substrate 220. An aqueous solution of the compound can be made and then support substrate 210 and/or first substrate 220 can be treated by a variety of simple dispensing methods, such as spin coating, dip coating, spray coating, and combinations thereof. Aqueous processing also advantageously avoids the need for organic solvents, thereby decreasing the cost and environmental impact.

In one example, bonding laver 205 can be formed by the deposition of a cationic surfactant comprising an ammonium cation. The ammonium cation can be a primary, secondary, tertiary or quaternary ammonium cation. In the cases of a secondary, tertiary or quaternary ammonium cation, the nitrogen can be independently substituted with a wide variety of substituents, including but not limited to alkyl, vinyl, allyl or amino, and glycidyl. Each substituent can be further substituted, unsubstituted, protected, or unprotected. Where an alkyl substituent is selected, the substituent may be branched or unbranched, saturated or unsaturated. Examples of alkyl groups include methyl, ethyl, n-propyl, iso-propyl, n-butyl, iso-butyl, tert-butyl, n-hexyl, n-decyl, tetradecyl, and the like. Methyl and ethyl substitution is particularly preferred. In one example, the cationic surfactant can be cetyltrimethylammonium bromide (CTAB) (I), or other comparable salt or derivative thereof. In another example, the cationic surfactant can be octyltrimethylammonium bromide (OTAB) (1D), or other comparable salt or derivative thereof.

ee

N fl a a a a Na Nr TN Tao ate IN IN Noy (I)

EN „ebs CH, a ~~ T Be (ID) In another example, bonding layer 205 can be formed by the deposition of a cationic surfactant comprising a pyridinium cation. The aromatic ring of the pyridine can further include any suitable number of substituents covalently bonded to one or more of the ring carbons and/or the nitrogen, and can be independently selected from H, alkyl, vinyl, allyl, amino, glycidyl, and thiol. Each substituent can be further substituted, unsubstituted, protected, or unprotected. Where an alkyl substituent is selected, the substituent may be branched or unbranched, saturated or unsaturated. Examples of alkyl groups include methyl, ethyl, n-propyl, iso-propyl, n-butyl, iso-butyl, tert-butyl, n-hexyl, n-decyl, tetradecyl, and the like. Preferred examples of cationic surfactants containing pyridinium cations include cetylpyridinium chloride (CPCI) (II) and 1-butylpyridinium chloride (BPC) (IV) or other comparable salts or derivatives thereof, H20 Lo w ci ae (111)

SN N, Cf \ { “OH, (IV) In yet another example. bonding layer 205 can be formed by the deposition of an organic salt comprising an ammonium cation. Like the cationic surfactants described above, the ammonium cation of the organic salt can be a primary, secondary, tertiary or quaternary ammonium cation. In the cases of a secondary, tertiary or quaternary ammonium cation, the nitrogen can be substituted with a wide variety of substituents, including but not limited to alkyl. vinyl, allyl or amino, and glycidyl. The substituents can be the same or different. Each substituent can be further substituted, unsubstituted, protected, or unprotected. Where an alkyl substituent is selected, the substituent may be branched or unbranched, saturated or unsaturated. Examples of alkyl groups include methyl, ethyl, n-propyl, iso-propyl. n-butyl, iso-butyl, tert-butyl, n-hexyl, n-decyl, tetradecyl, and the like. Methyl and ethyl substitution is particularly preferred. In particularly preferred examples, the organic salt can be tetramethylammonium bromide (TMAB) (V) or tetraethylammonium bromide (TEAB) (VI), or other comparable salts or derivatives thereof.

GH Hal CH HC ~N=CHg Br N° Rr CH wv) HC CH vi) In yet another example, bonding layer 205 can be formed by the deposition of an organic salt comprising a phosphonium cation. The phosphonium cation can be a primary, secondary, tertiary or quaternary phosphonium cation. In the cases of a secondary, tertiary or quaternary phosphonium cation, the phosphorus can be substituted with a wide variety of substituents, independently selected from H, alkyl, vinyl, allyl, amino, glycidyl, among others. Phenyl substitution is particularly preferred. In one example, the organic salt can be tetraphenyiphosphonium chloride (TPhPCL) (VII) or other comparable salt or derivative thereof.

pe SL, LS (VID In some embodiments, the cationic surfactant of bonding layer 205 comprises polycationic polymers, which includes any polycation-based polymer that is suitable for a liquid- or solution- based surface treatment/coating process. In particular, polycationic polymers that are water soluble and/or hydrophilic are particularly preferred. Polycationic polymers having a polyalkyl backbone are particularly preferred. Also preferred are polycationic polymers comprising aromatic groups, which have higher thermal stability generally. Polycationic repeating units can comprise one or more of a positively charged nitrogen, phosphorous, sulfur, boron, or carbon. In particular are polycationic repeating units comprising primary, secondary, tertiary, or quaternary ammonium cations, imidazolium cations, pyridinium cations, pyrimidinium cations, pyrrole cations, imidazolium cations, iminium cations, phosphonium ions, sulfonium ions, or combinations thereof. Particularly preferred are polycationic repeating units comprising positively charged nitrogens, especially ammonium, pyridinium, and imidazolium cations. In some embodiments, the repeating unit of the polymer comprises a ratio of carbon:nitrogen of from 2:1 to 20:1, or from 3:1 to 15:1, or from 3:1 to 12:1. In some embodiments, the cationic polymer is free, or substantially free, of oxygen. In one example, bonding layer 205 can be formed by the deposition of a polymer comprising an ammonium cation. The ammonium cation can be a primary, secondary, tertiary or quaternary ammonium cation. In the cases of a secondary, tertiary or quaternary ammonium cation, the nitrogen can be substituted with a wide variety of substituents, including but not limited to alkyl,

vinyl, allyl or amino, and glycidyl.

Each substituent can be further substituted, unsubstituted, protected, or unprotected.

Where an alkyl substituent is selected, the substituent may be branched or unbranched, saturated or unsaturated.

Examples of alkyl groups include methyl, ethyl, n- propyl, iso-propyl, n-butyl, iso-butyl, tert-butyl, n-hexyl, n-decyl, tetradecyl, and the like.

Methyl and ethyl substitution is particularly preferred.

In one example, the polymer can be poly(diallyldimethylammonium chloride) (PDADMAC) (VIII), or other comparable salt or derivative thereof.

In another example, the polymer can be poly(vinylbenzyl trimethyl ammonium chloride) (PVBTACH) (IX), or other comparable salt or derivative thereof.

It is believed that the ring structures of PDADMAC and PVBTACT help to impart thermal stability. cl® HsC CHg|n NL VID ijn (IX) In another example, bonding layer 205 can be formed by the deposition of a polymer comprising a pyridinium cation.

The aromatic ring of the pyridine or pyrrole can further include any suitable number of substituents covalently bonded to one or more of the ring carbons and/or the nitrogen, and can be independently selected from H, alkyl, vinyl, allyl, amino, glycidyl, and thiol.

Examples of alkyl groups include methyl, ethyl, n-propyl, iso-propyl, n-butyl, iso-butyl, tert-butyl, n-hexyl, n-decyl, tetradecyl, and the like.

Preferred examples of polymers containing pyridinium cations include poly(4-vinyl-1-methylpyridinium bromide) (PVMPyBr) (X) and poly(4- vinylpyridine hydrochloride) (PVPyCl) (XI). Both of these polymers were selected due to the presence of a quaternary nitrogen in an aromatic ring, which is believed to increase thermal stability. ~~ = Br Si CI ox) noon (XD)

In yet another example, bonding layer 205 can be formed by the deposition of a polymer comprising an imidazolium cation.

As described above, an imidazole can be substituted or unsubstituted with a wide variety of suitable substituents covalently bonded to the ring structure.

A preferred example of a polymer comprising an imidazolium cation is LUVIQUAT FC 550

(BASF) (X11), a quaternary copolymer of |-vinylpyrrolidone and 3-methyl-1-vinylimidazolium chloride. LUVIQUAT was selected for the present application due to the combination of the imidazolium ring and the vinylpyrrolidone. ‚8 CHa

IF

OTN N X Y (X11) An advantage of the anionic polymers disclosed herein is that they are capable of binding strongly to cationic surfaces, for example glass. In one example of anionic polymer deposition, bonding layer 205 can be formed by the deposition of a polymer comprising a negatively charged oxygen. In some embodiments, bonding layer 205 can be formed by the deposition of a polymer comprising a polysulfate anion. In another example, bonding layer 205 can be formed by the deposition of a polymer comprising a polyacrylate anion. In some embodiments, bonding layer 205 can be formed by the deposition of a polymer comprising a polysulfonate anion. A preferred example of an anionic polymer comprising a polysulfonate anion is poly(sodium-4-styrene sulfonate) (“PSS”) {X1ID), Pr, = «| 0-5-0, Na xn In yet other embodiments, the surfactant of bonding layer 205 can be selected from diethanolamide and derivatives thereof (e.g., coconut diethanolamide), polyethylene glycols, 4- nonylphenyl-polyethylene glycol, bisphenol A ethoxylate, octoxynol-9, oxtylphenol ethoxylate and combinations thereof. The surfactant solution can include one or more surfactants in a concentrated or diluted weight percentage, e.g., one or more surfactants can be in the range of about 0.1 or 0.5 to about 99 weight percent, or in a range from about 1 to 75 weight percent, in a range from about 2 to about 50 weight percent, in a range from about 5 to about 30 weight percent, for example 8, 10, 15, 20 or 25 weight percent. The surfactant solution can farther include conventional components as known in the art, such as a liquid carrier.

To apply the surfactant to the bonding surfaces 212, 222, support substrate 210 and first substrate 220 can be brought into contact with the surfactant solution (e.g., rinsing, immersing or dip coating, spraying, spin coating, etc.). In some embodiments, support substrate 210 and first substrate 220 can be submerged or immersed in the surfactant solution. The surfactant solution can be agitated or mixed to generate movement of the surfactant solution against the bonding surfaces 212, 222. To generate fluid flow in the surfactant solution, conventional mixing methods can be used. Pumps, impellers, vibration sources (e.g. ultrasonic) can be used to generate fluid flow. Support substrate 210 and/or first substrate 220 can be in contact with the surfactant solution for a pre-determined period of time, for example, for about 1 to about 60 minutes, or at least 1, 2, 3, 5, 10, 15 or 20 minutes. It is believed that contact with the surfactant solution leads to the bonding surfaces (e.g., bonding surfaces 212, 222) becoming partially passivated with surfactant residuals from the surfactant solution and thus the formation of permanent covalent bonds (e.g., Si-O-S1) from hydroxyl groups can be minimized during bonding of support substrate 210 and first substrate 220. It will be apparent to those skilled in the art that various modifications and variations can be made to the disclosed embodiments without departing from the spirit and scope of the disclosure. Thus, it is intended that the present disclosure cover any and all such modifications and variations as come within the scope of the appended claims and their equivalents.

The disclosure also includes the following clauses, which clauses correspond exactly in English to the appended Dutch language ‘Conclusies’. CLAUSES: I. An article comprising: a support unit comprising: a support substrate having a surface; and a bonding layer bonded to the surface of the support substrate, wherein a total thickness variation TTV across a width of the support unit is about 2.0 microns or less.

2. The article of clause 1, wherein the total thickness variation TTV across the width of the support unit is about 1.0 microns or less.

3. The article of clause 1 or 2, wherein the total thickness variation TTV across the width of the support unit is about 0.2 microns or less.

4. The article of any of the clauses 1 to 3, wherein: a total thickness variation TTV across a width of the support substrate is about 1.0 micron or less, and a total thickness variation TTV across a width of the bonding layer is about 1.0 micron or fess.

5. The article of any of the clauses 1 to 4 wherein the support substrate has a surface roughness of about 1.0 nm or less.

6. The article of any of the clauses 1 to 5 wherein the support substrate is comprised of glass, glass ceramic, ceramic, or silicon. 7 The article of any of the clauses 1 to 6, further comprising a first substrate, the bonding layer coupling the support substrate with the first substrate.

8. The article of clause 7, wherein the first substrate comprises lithium tantalate (LiTa0;), lithium niobate (LiNbO:), aluminum nitride (AIN), lead zirconate titanate (PZT) (Pb{Zr, Ti, (]O; (0<x<l), or a combination thereof.

9. The article of clause 7 or 8, wherein the first substrate has a thickness of about 2.0 microns or less.

10. The article of any of the clauses 7 to 9, wherein the thickness of the first substrate is in a range from about 0.5 microns to about 1.7 microns. It. The article of any of the clauses 7 to 10, wherein the support unit is bonded to the first substrate with a bond energy of about 500 mJ/m? or greater.

12. The article of any of the preceding clauses, wherein the bonding layer has a thickness of about 1.0 nm or less.

13. The article of any of the preceding clauses, wherein the thickness of the bonding layer is in arange from about 0.1 nm to about 0.5 nm.

14. The article of any of the preceding clauses, wherein the bonding layer comprises one or more cationic surfactants, one or more cationic polymers, one or more anionic polymers, one or more organic salts, or combinations thereof.

15. The article of clause 14, wherein the cationic surfactant comprises a head group comprising a charged nitrogen selected from the group consisting of primary, secondary, tertiary, or quaternary ammonium, pyridiniam, and combinations thereof.

16. The article of clause 14 or 15, wherein a repeating unit of the cationic polymer comprises one or more of a positively charged nitrogen, phosphorous, sulfur, boron, or carbon.

17. The article of any of the clauses 14 to 16, wherein a repeating unit of the anionic polymer comprises a negatively charged oxygen.

18. The article of any of the preceding clauses, wherein a thickness of the support substrate is in a range from about 0.3 mm to about 1.0 mm.

19. An article comprising: a support unit comprising: a support substrate having a surface; and a bonding layer bonded to the surface of the support substrate, wherein a total thickness variation TTV across a width of the support unit is about

2.0 microns or less; a first substrate, the bonding layer coupling the support substrate with the first substrate; and a device support wafer removably coupled with the support substrate.

20. The article of clause 19, wherein the support substrate is comprised of glass, glass ceramic, ceramic, or silicon.

21. The article of clause 19 or 20, wherein the first substrate comprises lithium tantalate {LiTa0:), lithium niobate (LiNbO:s), aluminum nitride (AIN), lead zirconate titanate (PZT) (Pb[Zr,T1,. JO: (xl). or a combination thereof.

22. The article of any of the clauses 19 to 21, wherein the device support wafer is a semiconductor wafer.

23. A method of forming a thin substrate using a support unit, the method comprising: bonding a first substrate to a support substrate with a bonding layer,

the support substrate and the bonding layer forming a support unit having a total thickness variation TTV across a width of the support unit of about 2.0 microns or less.

24. The method of clause 23, further comprising, after bonding the first substrate to the support substrate, reducing the thickness of the first substrate from a first thickness to a second thickness, the second thickness being less than the first thickness.

25. The method of clause 23 or 24, wherein the first thickness is in a range from about 10 microns to about 1,000 microns.

26. The method of clauses 24 or 25 , wherein the second thickness is about 2.0 microns or less.

27. The method of any of the clauses 24 to 26, further comprising, after reducing the thickness of the first substrate, bonding the first substrate with a device support wafer.

28. The method of clause 27, further comprising debonding the support substrate from the first substrate.

29. The method of clause 28, wherein the debonding step comprises applying a suction force on the device support wafer.

30. The method of clause 28 or 29, wherein the support substrate does not break during the debonding step.

31. The method of clause 23, further comprising thermally annealing the bonding layer after bonding the first substrate to the support substrate.

32. The method of any of the clauses 23 to 31, wherein the support substrate is comprised of glass, glass ceramic, ceramic, or silicon.

33. The method of any of the clauses 23 to 32, wherein the first substrate comprises lithium tantalate (LiTa03), lithium niobate (LiNbO3), aluminum nitride (AIN), lead zirconate titanate (PZT) (Pb[Zr Ti JO; (0<x<1), or a combination thereof.

34 The method of any of the clauses 23 to 33, wherein the support substrate has a surface roughness of about 1.0 nm or less.

Claims

CONCLUSIONS

An article comprising: a support unit comprising: a support substrate having a surface; and an adhesive layer adhered to the surface of the support substrate, wherein a total thickness variation TTV over a width of the support unit is about 2.0 microns or less.

The article of claim 1, wherein the total thickness variation TTV across the width of the support unit is about 1.0 microns or less.

The article of claim 1 or 2, wherein the total thickness variation TTV across the width of the support unit is about 0.2 microns or less.

The article of any one of claims 1 to 3, wherein: a total thickness variation TTV over a width of the support substrate is about 1.0 microns or less, and a total thickness variation TTV over a width of the adhesive layer is about 1.0 microns or less.

The article of any one of claims 1 to 4, wherein the support substrate has a surface roughness of about 1.0 nm or less.

The article of any one of claims 1 to 5, wherein the support substrate comprises glass, glass-ceramic, ceramic or silicon.

The article of any one of claims 1 to 6, further comprising a first substrate, wherein the adhesive layer couples the support substrate to the first substrate.

The article of claim 7, wherein the first substrate is lithium tantalate (LiTaO), lithium niobate (LiNbO:3), aluminum nitride (AlN), lead zirconate titanate (PZT) (Pb[ZrTi, ]O 3 (0<x<1), or a combination of which includes.

The article of claim 7 or 8, wherein the first substrate has a thickness of about 2.0 microns or less.

The article of any one of claims 7 to 9, wherein the thickness of the first substrate is in the range of about 0.5 microns to about 1.7 microns.

An article according to any one of claims 7 to 10, wherein the support unit . . 2 is bonded to the first substrate with a bonding energy of about 500 mJ/m" or more.

The article of any one of the preceding claims, wherein the adhesive layer has a thickness of about 1.0 nm or less.

An article according to any one of the preceding claims, wherein the thickness of the adhesive layer is in a range from about 0.1 nm to about 0.5 nm.

The article of any preceding claim, wherein the adhesive layer comprises one or more cationic surfactants, one or more cationic polymers, one or more anionic polymers, one or more organic salts, or combinations thereof.

The article of claim 14, wherein the cationic surfactant comprises a main group comprising a charged nitrogen selected from the group consisting of primary, secondary, tertiary or quaternary ammonium, pyridinium and combinations thereof.

The article of claim 14 or 15, wherein a structural unit of the cationic polymer comprises one or more of a positively charged nitrogen, phosphorus, sulfur, boron or carbon.

The article of any one of claims 14 to 16, wherein a structural unit of the anionic polymer comprises a negatively charged oxygen.

The article of any preceding claim, wherein a thickness of the support substrate is in the range of about 0.3mm to about 1.0mm.

An article comprising: a support unit comprising: a support substrate having a surface; and an adhesive layer adhered to the surface of the support substrate, wherein a total thickness variation TTV over a width of the support unit is about 2.0 microns or less;

a first substrate, the adhesive layer coupling the support substrate to the first substrate; and a device support walfer removably coupled to the support substrate.

The article of claim 19, wherein the support substrate comprises glass, glass-ceramic, ceramic or silicon.

The article of claim 19 or 20, wherein the first substrate is lithium tantalate (LiTaO:), lithium niobate (LiNbO:), alumimiam nitride (AlN), lead zirconate titanate (PZT) (Pb [ZrTi, ]O: (0Z x<1) or includes a combination thereof.

The article of any one of claims 19 to 21, wherein the device support wafer is a semiconductor wafer.

A method of forming a thin substrate using a support unit, the method comprising: adhering a first substrate to a support substrate having an adhesive layer, wherein the support substrate and the adhesive layer form a support unit having a total thickness variation TTV over a width of the support unit of about 2.0 microns or less.

The method of claim 23, further comprising, after adhering the first substrate to the support substrate, reducing the thickness of the first substrate from a first thickness to a second thickness, wherein the second thickness is less than the first thickness.

The method of claim 23 or 24, wherein the first thickness is in a range from about 10 microns to about 1000 microns.

The method of claim 24 or 25, wherein the second thickness is about 2.0 microns or less.

The method of any one of claims 24 to 26, further comprising, after reducing the thickness of the first substrate, adhering the first substrate to a device support wafer.

The method of claim 27, further comprising detaching the support substrate from the first substrate.

The method of claim 28, wherein the detaching step comprises applying a suction force to the device support wafer.

The method of claim 28 or 29, wherein the support substrate does not break during the detaching step.

The method of claim 23, further comprising thermally annealing the adhesive layer after adhering the first substrate to the support substrate.

A method according to any one of claims 23 to 31, wherein the support substrate comprises glass, glass-ceramic, ceramic or silicon.

A method according to any one of claims 23 to 32, wherein the first substrate is lithium tantalate (LiTaO 3 ), lithium niobate (LiNbO), ahiminium nitride (AlN), lead zirconate titanate (PZT) (Pb [ZrTiJO: (0=x<1 ) or a combination thereof.

The method of any one of claims 23 to 33, wherein the support substrate has a surface roughness of about 1.0 nm or less.