NL2025771B1 - Hardware-in-loop simulation system and method for ultra-precision motion platform - Google Patents

Hardware-in-loop simulation system and method for ultra-precision motion platform Download PDF

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NL2025771B1
NL2025771B1 NL2025771A NL2025771A NL2025771B1 NL 2025771 B1 NL2025771 B1 NL 2025771B1 NL 2025771 A NL2025771 A NL 2025771A NL 2025771 A NL2025771 A NL 2025771A NL 2025771 B1 NL2025771 B1 NL 2025771B1
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motion platform
ultra
precision motion
simulation
target machine
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NL2025771A
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Dutch (nl)
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Zhang Cheng
Zhang Hualiang
Li Qingxin
Li Ziyang
Wang Fudong
Zhao Bingjie
Sun Haitao
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Innovation Inst Of Intelligent Robotics Shenyang Co Ltd
Nat Institute Of Intelligent Robotics Shenyang Co Ltd
Shenyang Inst Automation Cas
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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B17/00—Systems involving the use of models or simulators of said systems
    • G05B17/02—Systems involving the use of models or simulators of said systems electric
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • G03F7/70725—Stages control
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

The present invention relates to a hardware-in-loop simulation system and method for an ultra-precision motion platform. An upper computer is used for building a simulation environment, conducting modeling and simulation test on an ultra-precision motion platform, deploying a simulation program to a control algorithm target machine or a model target machine, and obtaining control parameters of the control algorithm target machine and state parameters of the model target machine. The control algorithm target machine is used for providing the simulation environment for running simulation program real-time codes for the upper computer and running the deployed simulation program in real time, The model target machine is used for providing the simulation environment for running simulation program real-time codes for the upper computer or providing real state parameters of the ultra-precision motion platform. The present invention can accelerate the development speed of the control system of the ultra-precision motion platform, improve the authenticity and credibility of the simulation, enhance the timeliness and transplantability of a control strategy of the system through the combination of real-time simulation and software and hardware of a controller, save cost for development of an ultra-precision control system and also prepare for the industrialization of domestic lithography machines.

Description

HARDWARE-IN-LOOP SIMULATION SYSTEM AND METHOD FOR ULTRA-PRECISION MOTION PLATFORM Technical Field The present invention relates to a hardware-in-loop platform simulation and verification problem in the field of lithography machines, particularly to a real-time simulation and verification problem of a control method ultra-precision motion platform, and belongs to the field of ultra-precision control. Background In the information age, the importance of large-scale integrated circuit manufacturing technology is increasingly prominent. The importance of a lithography machine as the core equipment of chip fabrication is self-evident. The main technology of the IC manufacturing technology is to reduce a large circuit diagram to a chip size through multi-layer exposure etching of wafer to automatically form a circuit. The lithography process is of great significance to the technical quality control and product quality of the IC manufacturing process.
As the chip fabrication technology is below 32 nm, IC chip integration density is larger and larger and the sizes of semiconductor devices and circuits are smaller and smaller; and higher requirements are proposed for ultra-precision motion control precision of the lithography machine.
On one hand, as the market competition pressure of the IC chip is gradually increased, the speed of the lithography process is also gradually increased. At the same time, the lithography machine needs to complete multiple lithography processes accurately on the premise of high acceleration operation. Higher requirements are proposed for the precision motion control of the lithography machine by the industrial needs. On the other hand, the motion control system of the lithography machine needs to complete multi-platform, multi-coupling and high-precision synchronous control of a mask platform and a working platform, multi-platform high-rate signal acquisition, multi-platform vibration suppression, etc.
The traditional development of the lithography machine control system follows the processes of modeling and simulation, code development, and software and hardware design, has strong association between software and hardware communication and control task management, is difficult to solve the problems of dynamic design and computational complexity increases caused by the uncertainty of the motion control system of the lithography machine, and is also difficult to guarantee the design and development efficiency of the ultra-precision motion platform of the lithography machine.
The software and hardware integrated modeling design means based on software definition 1s an emerging design method system of a complex control system, which can greatly reduce the design complexity of the control system and increase the development efficiency through a model-based software and hardware loose-coupling design means, a model-in-loop testing means, a hardware-in-loop testing means and other testing means.
Therefore, it is of great significance to develop a hardware-in-loop simulation system for an ultra-precision motion platform based on model design.
Summary The technical problem to be solved by the present invention is to develop a hardware-in-loop simulation system for an ultra-precision motion platform based on model design with respect to the problem that a lithography machine has no model-in-loop and hardware-in-loop test methods.
The system encapsulates the core components of the lithography machine, including a lithography machine model library, a control library, a communication library, and the like, constructs the hardware-in-loop simulation system for the ultra-precision motion platform, solves the problem that traditional digital simulation cannot adjust parameters online, and realizes rapid C coding and simulation timeliness of Matlab/Simulink simulation program.
Thus, designers are assisted in quickly realizing simulation, analysis and optimization of the design solution of the ultra-precision control system of the lithography machine, thereby improving the development efficiency of the lithography machines and shortening a design cycle.
To solve the above technical problems, the present invention adopts the following technical solutions: a hardware-in-loop simulation system for an ultra-precision motion platform comprises: an upper computer used for building a simulation environment, conducting modeling and simulation test on an ultra-precision motion platform, deploying a simulation program to a control algorithm target machine or a model target machine, adjusting control parameters of the control algorithm target machine on line and monitoring state parameters of the model target machine; the control algorithm target machine used for providing the simulation environment for running simulation program real-time codes for the upper computer and running the deployed simulation program in real time;
the model target machine used for providing the simulation environment for running simulation program real-time codes for the upper computer or providing real state parameters of the ultra-precision motion platform.
A primary FPGA card is arranged in the control algorithm target machine; a secondary FPGA card is arranged in the model target machine; and the primary FPGA card and the secondary FPGA card are used for realizing clock signal synchronization and realizing signal transmission between two target machines through optical fiber communication.
The primary FPGA card is used as a clock source, sends sensor information data from the secondary FPGA card in a previous cycle to the controller kernel layer through DMA every set time, and also sends a control instruction in the previous cycle to the secondary FPGA card.
After receiving the control instruction in the previous cycle from the FPGA, the control instruction is sent to the kernel layer of a controlled object through DMA.
After the controller calculation is completed, the control instruction calculated by the controller is saved in a sending cache of the primary FPGA through DMA; and the model target machine saves the sensor information data calculated by a controlled object model to a receiving cache of the primary FPGA through DMA, to end current cycle work.
The model target machine is replaced with a real ultra-precision motion platform.
The ultra-precision motion platform is a lithography machine.
A hardware-in-loop simulation method for an ultra-precision motion platform comprises the following steps: step S1: building a controlled object model of the ultra-precision motion platform; step S2: building a controller for the controlled object model of the ultra-precision motion platform; step S3: starting a simulation test and adjusting control parameters through the upper computer; step S4: respectively deploying the controller and the controlled object model to the control algorithm target machine and the model target machine for simulation.
The process that the primary FPGA card and the secondary FPGA card are used for realizing clock signal synchronization and realizing signal transmission between two target machines through optical fiber communication comprises the following steps:
1) the primary FPGA card sends the sensor information data of the model target machine in a receiving data cache to the controller and waits, and also sends the control instruction in a sending data cache to the secondary FPGA card and watts; 2) when the primary FPGA card receives a calculation result in the current cycle from the controller, the control instruction is saved in a sending cache area to wait to send to the controlled object model in a next cycle; when receiving the sensor information data in the current cycle from the secondary FPGA card, the sensor information data of the controlled object model is saved in the receiving data cache to wait to send to the controller in a next cycle; 3) after the secondary FPGA card receives a clock synchronization signal, the secondary FPGA card sends the control instruction in the receiving data cache to the controlled object model and waits, and also sends the sensor information data in the sending data cache to the primary FPGA card and waits; 4) when the secondary FPGA card receives a calculation result in the current cycle from the controlled object model, the sensor information data is saved in the sending cache area to wait to send to the primary FPGA card in a next cycle; after receiving the control instruction in the current cycle from the primary FPGA card, the control instruction is saved in the receiving data cache to wait to send a next clock departure signal to the controlled object model.
The control algorithm target machine executes the following steps: the primary FPGA card acquires secondary FPGA information through optical fibers to obtain the sensor information data of the precision motion platform; different control cycles are entered through Workingstep values; different motion processes are entered according to parameter setting.
The motion processes comprise: a physical axis position of the precision motion platform acquired by the optical fibers is converted to a logical axis coordinate to obtain a current initial posture; an expected trajectory is planned according to the parameters and the initial posture, and the motion platform is controlled according to the controller so that the motion platform follows the expected trajectory to move; the obtained control instruction 1s converted from the logical axis coordinate to a physical axis coordinate; the converted control instruction is sent to the secondary FPGA card through the optical fibers to end the control cycle. The present invention has the following beneficial effects:
1. The control system of the present invention is not directed to a certain type of lithography machine, and the standardized and modular design concept 1s suitable for ultra-precision motion control application of various types of lithography machines.
2. The hardware-in-loop simulation system for the ultra-precision motion platform 5 in the present invention integrates driving, perception and control, and can conduct hardware-in-loop verification of multiple control algorithms.
3. The present invention can quickly realize simulation, analysis and optimization of the design solution of the electromechanical system of the lithography machine, improve the development efficiency of the lithography machines and shorten the design cycle.
4. The simulation and verification platform of the present invention can accelerate the development speed of the control system of the ultra-precision motion platform, improve the authenticity and credibility of the simulation, enhance the timeliness and transplantability of a control strategy of the system through the combination of real-time simulation and software and hardware of a controller, save cost for development of an ultra-precision control system and also prepare for the industrialization of domestic lithography machines.
Description of Drawings Fig. 1 is a hardware architecture diagram of an embodiment of the present invention; Fig. 2 is an upper computer functional diagram of an embodiment of the present invention; Fig. 3 is a target machine architecture diagram of an embodiment of the present invention; Fig. 4 is a flow chart of a control system of an embodiment of the present invention; Fig. 5 is a flow chart of data synchronization of a control target machine and a model target machine of an embodiment of the present invention; and Fig. 6 is a development flow chart of a hardware-in-loop simulation system of an embodiment of the present invention. Detailed Description To make the statement of the purpose and the technical solution of the present application more clear, the present invention is further described below in detail with reference to the drawings and the listed embodiments.
A hardware-in-loop simulation system for an ultra-precision motion platform comprises an upper computer for building a lithography machine model. Two target machines respectively deploy the control method and model of the ultra-precision motion platform. Two lithography machines realize real-time interaction of state parameters and control parameters of the motion platform through optical fiber communication.
Fig. 1 is a hardware architecture diagram of hardware-in-loop simulation for an ultra-precision motion platform, mainly involving an upper computer and target machines.
The upper computer is an ordinary PC platform that operates Windows operating system, builds a simulation environment based on Matlab software and conducts modeling and simulation tests on the ultra-precision motion platform. The upper computer is connected with two target machines through Ethernet. The upper computer can conduct one-key deployment of Simulink program into the target machines for downloading remote programs. Meanwhile, operating parameter information of the target machines can be fed back into the upper computer in real time. The upper computer can adjust control parameters of a control algorithm target machine online (e.g., design parameters of a PID controller), and simultaneously monitor state parameters of a model target machine (e.g., posture, speed and acceleration information of the precision motion platform).
The target machines are X86 architecture platforms based on RTLinux real-time operating system, provide a simulation environment that can operate Matlab real-time codes for the upper computer, can operate the deployed Simulink program in real time and respectively operate a control algorithm and a controlled model of the precision motion control platform in the present invention.
The FPGA card is divided into a primary FPGA card and a secondary FPGA card for realizing clock signal synchronization and realizing signal transmission between the two target machines through optical fiber communication. The primary FPGA card is used as a clock source of a communication system, and sends data from the secondary FPGA card in a previous cycle to a controller kernel layer through DMA every 50us. At the same time, the primary FPGA card sends the controller data in the previous cycle to the secondary FPGA, and after receiving the data, the secondary FPGA sends the data to a controlled object kernel layer through DMA. After the end of computation of the controller and the controlled object, computation results are respectively saved in two caches of the primary FPGA through IPC, DMA and optical fiber communication to end the current cycle work.
With reference to Fig. 2, the upper computer designed in the patent comprises three parts: an ultra-precision motion platform model library, a simulation development environment and a rapid prototyping tool.
The ultra-precision motion platform model library comprises: 1) a model library comprising a voice coil motor, a linear motor, a precision motion platform and a sensor perception model that form the ultra-precision motion platform; 2) a control method library comprising a trajectory planning module, a filtering module, a PID control module and the like; 3) an interface library comprising an optical fiber communication input-output model of a lithography machine; and 4) a model display which realizes online display of a 3D model of the precision motion platform.
The simulation development environment comprises: 1) program development which builds a lithography machine model using a model of the ultra-precision motion platform model library based on Matlab/Simulink environment and comprises a simulation model and a hardware-in-loop model; and 2) simulation verification which realizes numerical simulation of the precision motion platform based on Matlab/Simulink environment and optimizes control parameters through simulation effects.
The rapid prototyping tool comprises: 1) target machine connection: communication connection is established according to the IP addresses of the target machines; 2) automatic code generation: Simulink program is converted into C codes by compiling tlc file; 3) one-key deployment: the generated C codes are compiled and downloaded to the target machines; and 4) operation management: the connection, start, stop and other management of the target machine programs is controlled.
With reference to Fig. 3, the target machine of the ultra-precision motion platform designed in the patent is a multi-core system designed and developed based on X86 architecture, operates Linux real-time operating system, supports MATLAB automatic code generation mechanism at operating runtime, can operate the designed control algorithm program or model program of the ultra-precision motion platform and conducts data interaction through an optical fiber communication component.
With reference to Fig. 4, the flow of the control system of the ultra-precision motion platform in the present invention is: to obtain an ideal collaborative robot control effect.
Step S1: optical fiber data acquisition: the primary FPGA acquires secondary FPGA information through optical fibers to obtain the state information of the precision motion platform.
Step S2: control phase judgment: the motor process of the precision motion platform is judged through Workingstep value to enter different control cycles; and an initial value is default.
Step S3: setting of related parameters: related configuration parameters, including target posture, speed constraint, acceleration constraint and operating time, are read according to the different motion processes entered.
Step S4: coordinate transformation: a physical axis position of the precision motion platform acquired by the optical fibers is converted to a logical axis coordinate to obtain a current initial posture.
Step S5: reference curve generation: an expected trajectory is generated by a fifth-order path planning method through the related parameters provided in S3 and S4.
Step S6: feedback feedforward control computation: a feedback feedforward control method is adopted so that the motion platform follows the expected trajectory to move.
Step S7: coordinate transformation: the obtained control instruction is converted from the logical axis coordinate to a physical axis coordinate.
Step S8: judgment end: it is judged that whether the precision motion platform reaches a target position; if so, step S9 is conducted; if not, step S10 is conducted.
Step S9: Workingstep setting: a value is assigned to Workingstep according to the control cycle entered in S2; 2 is assigned if 1 phase is completed; and 0 is assigned if 2 phase is completed.
Step S10: optical fiber data processing: the control data converted in S7 is sent to the secondary FPGA through the optical fibers. The control cycle is ended.
Fig. 5 is a flow chart of data synchronization of a control target machine and a model target machine.
1) A kernel drive module in the control algorithm target machine issues a clock cycle matching instruction to the primary FPGA card and notifies a communication card to start communication work.
2) The primary FPGA card sends the state information data of the model target machine in a receiving data cache to the controller and waits, and also sends the control parameter data in a sending data cache to the secondary FPGA card and waits.
3) When the primary FPGA card receives a calculation result in the current cycle from the control program of the precision motion platform, the control instruction data is saved in a sending cache area to wait to send to a controlled object in a next cycle; when receiving the state information data in the current cycle from the secondary FPGA card, the sensor information data of the model is saved in the receiving data cache to wait to send to the control program of the precision motion platform in a next cycle. 4) After the secondary FPGA card receives a clock synchronization signal, the secondary FPGA card sends the control instruction data in the receiving data cache to the model program of the precision motion platform and waits, and also sends the sensor information data in the sending data cache to the primary FPGA card and waits.
5) When the secondary FPGA card receives a calculation result in the current cycle from the model program of the precision motion platform, the sensor information data is saved in the sending cache area to wait to send to the primary FPGA card in a next cycle; after receiving the control instruction data in the current cycle from the primary FPGA card, the data is saved in the receiving data cache to wait to send a next clock departure signal to the model program of the precision motion platform.
With reference to Fig. 6, the development flow of the control system of the ultra-precision motion platform in the present invention is: firstly, the simulation model is built for conducting control parameter optimization and simulation verification; then, the precision motion platform model and the control are separated to respectively replace the communication interface modules; corresponding programs are respectively run in the two target machines; the hardware-in-loop simulation system is built; and online optimization is conducted on the control parameters.
An implementation example of the present invention will be described below. The steps of research and development personnel for the collaborative robot development are specifically as follows: Step S1: building a controlled object model of the ultra-precision motion platform; designing the model based on the ultra-precision motion platform model library; and establishing a precision motion platform simulation model.
Step S2: designing a controller, and designing a control algorithm for the model of S1, comprising trajectory planning, control algorithm design and filtering.
Step S3: starting a simulation test and adjusting the control parameters; and conducting numerical simulation in Simulink environment and observing the control effect.
Step S4: judging whether a control need is satisfied; if not, returning to S3; if so, entering S5.
Step SS: dividing and replacing the model; dividing the simulation model into two programs: control and model; and respectively adding the communication interface modules from the interface library.
Step S6: respectively deploying rapid prototyping tools into the two target machines; starting the programs, and observing the control effect of the hardware-in-loop simulation.
Step S7: dynamically adjusting the control parameters according to the actual operation effect.
Step S8: judging whether the control need is satisfied; if not, returning to S7 until the control need is satisfied, to complete the development of the hardware-in-loop simulation system for the ultra-precision motion platform.
In conclusion, the technical problem to be solved by the present invention is to develop a hardware-in-loop simulation system for an ultra-precision motion platform based on model design with respect to the problem that a lithography machine has no model-in-loop and hardware-in-loop test methods. The system encapsulates the core components of the lithography machine, including a lithography machine model library, a control library, a communication library, and the like, constructs the hardware-in-loop simulation system for the ultra-precision motion platform, solves the problem that traditional digital simulation cannot adjust parameters online, and realizes rapid C coding and simulation timeliness of Matlab/Simulink simulation program. The technical problem to be solved by the present invention is to assist the designers in quickly realizing simulation, analysis and optimization of the design solution of the ultra-precision control system of the lithography machine, thereby improving the development efficiency of the lithography machines and shortening the design cycle. The present invention is a new quick design solution and is beneficial for promotion and use.

Claims (8)

ConclusiesConclusions 1. Hardware-in-loop-simulatiesysteem voor een ultraprecisie-bewegingsplatform, met het kenmerk, dat dit omvat: een bovenste computer die wordt gebruikt voor het bouwen van een simulatie- omgeving, het uitvoeren van modellerings- en simulatie-testen op een ultraprecisie- bewegingsplatform, het toepassen van een simulatieprogramma op een besturingsalgoritme- doelmachine of een modeldoelmachine, het online bijstellen van besturingsparameters van de besturingsalgoritme-doelmachine en het bewaken van toestandsparameters van de modeldoelmachine; waarbij de besturingsalgoritme-doelmachine wordt gebruikt voor het verschaffen van de simulatieomgeving voor het uitvoeren van ware-tijd-simulatieprogrammacodes voor de bovenste computer en het in ware tijd uitvoeren van het toegepaste simulatieprogramma; waarbij de modeldoelmachine wordt gebruikt voor het verschaffen van de simulatie- omgeving voor het uitvoeren van ware-tijd-simulatieprogrammacodes voor de bovenste computer of het verschaffen van ware-toestand-parameters van het ultraprecisie- bewegingsplatform.1. Hardware-in-loop simulation system for an ultra-precision motion platform, characterized in that it comprises: an upper computer used for building a simulation environment, performing modeling and simulation testing at an ultra-precision motion platform, applying a simulation program to a control algorithm target machine or a model target machine, adjusting control parameters of the control algorithm target machine on-line and monitoring state parameters of the model target machine; wherein the control algorithm target machine is used to provide the simulation environment for executing real-time simulation program codes for the top computer and real-time executing the applied simulation program; wherein the model target machine is used to provide the simulation environment for executing real-time simulation program codes for the top computer or for providing real-state parameters of the ultra-precision motion platform. 2. Hardware-in-loop-simulatiesysteem en -werkwijze voor het ultraprecisie- bewegingsplatform volgens conclusie 1, met het kenmerk, dat een primaire FPGA-kaart is aangebracht in de besturingsalgoritme-doelmachine; een secundaire FPGA-kaart is aangebracht in de modeldoelmachine; en de primaire FPGA-kaart en de secundaire FPGA- kaart worden gebruikt voor het realiseren van kloksignaalsynchronisatie en het realiseren van signaaltransmissie tussen twee doelmachines door middel van optische-vezel-communicatie.A hardware-in-loop simulation system and method for the ultra-precision motion platform according to claim 1, characterized in that a primary FPGA card is provided in the control algorithm target machine; a secondary FPGA card is provided in the model target machine; and the primary FPGA card and the secondary FPGA card are used to realize clock signal synchronization and realize signal transmission between two target machines by means of optical fiber communication. 3. Hardware-in-loop-simulatiesysteem en -werkwijze voor het ultraprecisie- bewegingsplatform volgens conclusie 2, met het kenmerk, dat de primaire FPGA-kaart wordt gebruikt als een klokbron, sensorinformatiedata vanuit de secundaire FPGA-kaart in een voorgaande cyclus op elke ingestelde tijd naar de besturingseenheid-kernellaag zendt door middel van DMA, en tevens een besturingsinstructie in de voorgaande cyclus naar de secundaire FPGA-kaart zendt; na het ontvangen van de besturingsinstructie in de voorgaande cyclus vanuit de FPGA, wordt de besturingsinstructie naar de kernellaag van een bestuurd object gezonden door middel van DMA; nadat de berekening door de besturingseenheid is voltooid, wordt de besturingsinstructie die door de besturingseenheid is berekend opgeslagen in een zendcachegeheugen van de primaire FPGA door middel van DMA; en de modeldoelmachine slaat de sensorinformatiedata die zijn berekend door een bestuurd objectmodel op in een ontvangcachegeheugen van de primaire FPGA door middel van DMA, om het actuele 40 cycluswerk te beëindigen.The hardware-in-loop simulation system and method for the ultra-precision motion platform according to claim 2, characterized in that the primary FPGA card is used as a clock source, sensor information data from the secondary FPGA card in a previous cycle on each send set time to the controller kernel layer by means of DMA, and also send a control instruction in the previous cycle to the secondary FPGA card; after receiving the control instruction in the previous cycle from the FPGA, the control instruction is sent to the kernel layer of a controlled object by means of DMA; after the calculation by the controller is completed, the control instruction calculated by the controller is stored in a transmit cache of the primary FPGA by DMA; and the model target machine stores the sensor information data calculated by a controlled object model in a receive cache memory of the primary FPGA by DMA to terminate the current 40 cycle work. 4, Hardware-in-loop-simulatiesysteem en -werkwijze voor het ultraprecisie- bewegingsplatform volgens conclusie 1, met het kenmerk, dat de modeldoelmachine wordt vervangen door een echt ultraprecisie-bewegingsplatform.The hardware-in-loop simulation system and method for the ultra-precision motion platform according to claim 1, characterized in that the model target machine is replaced by a true ultra-precision motion platform. 5. Hardware-in-loop-simulatiesysteem en -werkwijze voor het ultraprecisie- bewegingsplatform volgens conclusie 1, met het kenmerk, dat het ultraprecisie- bewegingsplatform een lithografiemachine is.Hardware-in-loop simulation system and method for the ultra-precision motion platform according to claim 1, characterized in that the ultra-precision motion platform is a lithography machine. 6. Hardware-in-loop-simulatiewerkwijze voor een ultraprecisie-bewegingsplatform, met het kenmerk, dat deze de volgende stappen omvat: stap S1: het bouwen van een bestuurd objectmodel van het ultraprecisie- bewegingsplatform; stap S2: het bouwen van een besturingseenheid voor het bestuurde objectmodel van het ultraprecisie-bewegingsplatform; stap 3: het starten van een simulatietest en het bijstellen van besturingsparameters door middel van de bovenste computer; stap 4: het respectievelijk toepassen van de besturingseenheid en het bestuurde objectmodel op de besturingsalgoritme-doelmachine en de modeldoelmachine voor simulatie.A hardware-in-loop simulation method for an ultra-precision motion platform, characterized in that it comprises the following steps: step S1: building a controlled object model of the ultra-precision motion platform; step S2: building a controller for the controlled object model of the ultra-precision motion platform; step 3: starting a simulation test and adjusting control parameters by means of the top computer; step 4: respectively applying the control unit and the controlled object model to the control algorithm target machine and the model target machine for simulation. 7. Hardware-in-loop-simulatiewerkwijze voor het ultraprecisie-bewegingsplatform volgens conclusie 6, met het kenmerk, dat het proces dat de primaire FPGA-kaart en de secundaire FPGA-kaart worden gebruikt voor het realiseren van kloksignaalsynchronisatie en het realiseren van signaaltransmissie tussen twee doelmachines door middel van optische-vezel- communicatie de volgende stappen omvat: 1) de primaire FPGA-kaart zendt de sensorinformatiedata van de modeldoelmachine in een ontvangdata-cachegeheugen naar de besturingseenheid en wacht, en zendt ook de besturingsinstructie in een zenddata-cachegeheugen naar de secundaire FPGA-kaart en wacht; 2) wanneer de primaire FPGA-kaart een berekeningsresultaat in de actuele cyclus vanuit de besturingseenheid ontvangt, wordt de besturingsinstructie opgeslagen in een zend- cachegeheugengebied om te wachten om deze in een volgende cyclus naar het bestuurde objectmodel te zenden; wanneer de sensorinformatiedata in de actuele cyclus vanuit de secundaire FPGA-kaart wordt ontvangen, wordt de sensorinformatiedata van het bestuurde objectmodel opgeslagen in het ontvangdata-cachegeheugen om te wachten om deze in een volgende cyclus naar de besturingseenheid te zenden; 3) nadat de secundaire FPGA-kaart een kloksynchronisatiesignaal ontvangt, zendt de secundaire FPGA-kaart de besturingsinstructie in het ontvangdata-cachegeheugen naar het bestuurde objectmodel en wacht, en zendt ook de sensorinformatiedata in het zenddata- 40 cachegeheugen naar de primaire FPGA-kaart en wacht;The hardware-in-loop simulation method for the ultra-precision motion platform according to claim 6, characterized in that the process that the primary FPGA card and the secondary FPGA card are used to realize clock signal synchronization and realize signal transmission between two target machines by means of optical fiber communication comprises the following steps: 1) the primary FPGA card sends the sensor information data of the model target machine in a receive data cache to the control unit and waits, and also sends the control instruction in a send data cache to the secondary FPGA card and wait; 2) when the primary FPGA card receives a calculation result in the current cycle from the control unit, the control instruction is stored in a send cache memory area to wait to send it to the controlled object model in a next cycle; when the sensor information data in the current cycle is received from the secondary FPGA card, the sensor information data of the controlled object model is stored in the receive data cache to wait to be sent to the controller in a next cycle; 3) after the secondary FPGA card receives a clock synchronization signal, the secondary FPGA card sends the control instruction in the receive data cache to the controlled object model and waits, and also sends the sensor information data in the transmit data cache to the primary FPGA card and wait; 4) wanneer de secundaire FPGA-kaart een berekeningsresultaat in de actuele cyclus vanuit het bestuurde objectmodel ontvangt, wordt de sensorinformatiedata opgeslagen in het zend-cachegeheugen om te wachten om deze in een volgende cyclus naar de primaire FPGA- kaart te zenden; na het ontvangen van de besturingsinstructie in de actuele cyclus vanuit de primaire FPGA-kaart wordt de besturingsinstructie opgeslagen in het ontvangdata- cachegeheugen om te wachten om een volgend klokvertreksignaal naar het bestuurde objectmodel te zenden.4) when the secondary FPGA card receives a calculation result in the current cycle from the controlled object model, the sensor information data is stored in the transmit cache to wait to be sent to the primary FPGA card in a next cycle; after receiving the control instruction in the current cycle from the primary FPGA card, the control instruction is stored in the receive data cache to wait to send a next clock departure signal to the controlled object model. 8. Hardware-in-loop-simulatiewerkwijze voor het ultraprecisie-bewegingsplatform volgens conclusie 6, met het kenmerk, dat de besturingsalgoritme-doelmachine de volgende stappen uitvoert: de primaire FPGA-kaart verwerft secundaire FPGA-informatie door middel van optische vezels voor het verkrijgen van de sensorinformatiedata van het precisie-bewegingsplatform; verschillende besturingscycli worden ingevoerd door middel van Workingstep-waarden; verschillende bewegingsprocessen worden ingevoerd volgens parameterinstelling; de bewegingsprocessen omvatten: een fysieke-as-positie van het precisie- bewegingsplatform die wordt verworven door de optische vezels wordt omgezet naar een logische-as-coördinaat voor het verkrijgen van een actuele initiële houding; een verwachte baan wordt gepland volgens de parameters en de initiële houding, en het bewegingsplatform wordt bestuurd volgens de besturingseenheid, zodat het bewegingsplatform de verwachte baan volgt om te bewegen; de verkregen besturingsinstructie wordt omgezet vanuit de logische-as-coördinaat naar een fysieke-as-coördinaat; de omgezette besturingsinstructie wordt via de optische vezels naar de secundaire FPGA-kaart gezonden om de besturingscyclus te beëindigen.The hardware-in-loop simulation method for the ultra-precision motion platform according to claim 6, characterized in that the control algorithm target machine performs the following steps: the primary FPGA card acquires secondary FPGA information by means of optical fibers to obtain of the sensor information data of the precision motion platform; different control cycles are entered by means of Workingstep values; different motion processes are input according to parameter setting; the motion processes include: a physical axis position of the precision motion platform acquired by the optical fibers is converted to a logical axis coordinate to obtain a current initial attitude; an expected trajectory is planned according to the parameters and the initial attitude, and the motion platform is controlled according to the control unit so that the motion platform follows the expected trajectory to move; the obtained control instruction is converted from the logical axis coordinate to a physical axis coordinate; the converted control instruction is sent through the optical fibers to the secondary FPGA card to end the control cycle.
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