NL2025219A - A fluid handling system, method and lithographic apparatus - Google Patents
A fluid handling system, method and lithographic apparatus Download PDFInfo
- Publication number
- NL2025219A NL2025219A NL2025219A NL2025219A NL2025219A NL 2025219 A NL2025219 A NL 2025219A NL 2025219 A NL2025219 A NL 2025219A NL 2025219 A NL2025219 A NL 2025219A NL 2025219 A NL2025219 A NL 2025219A
- Authority
- NL
- Netherlands
- Prior art keywords
- liquid
- substrate
- fluid handling
- space
- immersion
- Prior art date
Links
Claims (1)
- CONCLUSIE1. Een inrichting ingericht voor het belichten van een substraat.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL2025219A NL2025219A (en) | 2020-03-27 | 2020-03-27 | A fluid handling system, method and lithographic apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL2025219A NL2025219A (en) | 2020-03-27 | 2020-03-27 | A fluid handling system, method and lithographic apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
NL2025219A true NL2025219A (en) | 2020-05-07 |
Family
ID=70610597
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NL2025219A NL2025219A (en) | 2020-03-27 | 2020-03-27 | A fluid handling system, method and lithographic apparatus |
Country Status (1)
Country | Link |
---|---|
NL (1) | NL2025219A (nl) |
-
2020
- 2020-03-27 NL NL2025219A patent/NL2025219A/en unknown
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