NL2025219A - A fluid handling system, method and lithographic apparatus - Google Patents

A fluid handling system, method and lithographic apparatus Download PDF

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Publication number
NL2025219A
NL2025219A NL2025219A NL2025219A NL2025219A NL 2025219 A NL2025219 A NL 2025219A NL 2025219 A NL2025219 A NL 2025219A NL 2025219 A NL2025219 A NL 2025219A NL 2025219 A NL2025219 A NL 2025219A
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NL
Netherlands
Prior art keywords
liquid
substrate
fluid handling
space
immersion
Prior art date
Application number
NL2025219A
Other languages
English (en)
Inventor
Wilhelmus Polet Theodorus
Steffens Koen
Henricus Egidius Catharina Eummelen Erik
Van Der Ham Ronald
Fahrni Francis
Pieterse Gerben
Original Assignee
Asml Netherlands Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=70610597&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=NL2025219(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Asml Netherlands Bv filed Critical Asml Netherlands Bv
Priority to NL2025219A priority Critical patent/NL2025219A/en
Publication of NL2025219A publication Critical patent/NL2025219A/en

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Claims (1)

  1. CONCLUSIE
    1. Een inrichting ingericht voor het belichten van een substraat.
NL2025219A 2020-03-27 2020-03-27 A fluid handling system, method and lithographic apparatus NL2025219A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
NL2025219A NL2025219A (en) 2020-03-27 2020-03-27 A fluid handling system, method and lithographic apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL2025219A NL2025219A (en) 2020-03-27 2020-03-27 A fluid handling system, method and lithographic apparatus

Publications (1)

Publication Number Publication Date
NL2025219A true NL2025219A (en) 2020-05-07

Family

ID=70610597

Family Applications (1)

Application Number Title Priority Date Filing Date
NL2025219A NL2025219A (en) 2020-03-27 2020-03-27 A fluid handling system, method and lithographic apparatus

Country Status (1)

Country Link
NL (1) NL2025219A (nl)

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